Abstract
A silicon-on-insulator (SOI) technology has become a key tool for manufacturing of microsensors. A number of the SOI-based microsensors have been presented in the chapter. The developments are related mostly to non-electrical sensors. Most of them have been developed at Instytut Technologii Elektronowej (ITE) Warsaw, in collaboration with numerous partners. The chapter is divided into two main sections describing the technology and device issues. First, ITE expertise in the area of SOI technologies is described. The SOI CMOS processes based on wafers with a thick and thin device layers are presented. The CMOS technology has become an origin for a PaDEOx technique developed for narrow (order of 100 nm width) line fabrication on the silicon wafers, which allows for development of nanowire-based devices (e.g. multi-gate MOSFETs). The second branch of the SOI technologies, being under development in ITE, includes micromachining techniques. Based on the SOI technologies, a number of devices have been developed with the ITE participation. The following solutions have been presented: monolithic pixel detectors of ionizing radiation, sub-THz radiation detectors based on a concept of radiation-induced plasmon oscillations in the MOSFET channels, smart antennas with a reconfigurable aperture. Next, devices fabricated based on micromachining techniques have been mentioned, e.g. microactuators and probes for scanning thermal microscopy. Finally, development of SOI-based biochemical sensors for small volume sample testing is more widely described. These devices have been manufactured based on the PaDEOx technique and have been applied for analysis of hydrogen an metal ions in water solutions.
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Acknowledgments
Authors would like to acknowledge a collaboration with Prof. Teodor Gotszalk, and Dr. Piotr Pałetko, Wroclaw University of Technology in terms of measurements and helpful discussions. Also a financial support by The National Centre for Research and Development, Poland under grant “Multipixel detector of THz radiation based on selective MOS transistors and its application in biology, medicine and safety installations”, PBS1/A9/11/2012 is acknowledged.
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Tomaszewski, D. et al. (2014). SOI-Based Microsensors. In: Nazarov, A., Balestra, F., Kilchytska, V., Flandre, D. (eds) Functional Nanomaterials and Devices for Electronics, Sensors and Energy Harvesting. Engineering Materials. Springer, Cham. https://doi.org/10.1007/978-3-319-08804-4_18
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DOI: https://doi.org/10.1007/978-3-319-08804-4_18
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