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Preparation and Investigation of ZnO Nanorods Array Based Resistive and SAW CO Gas Sensors

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Advanced Materials

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 152))

Abstract

Resistive sensors of carbon monoxide based on zinc oxide nanorod arrays were investigated. ZnO nanorods were produced by pulsed laser deposition (PLD) method at high pressure of argon and carbothermal synthesis. Several constructions of resistive carbon monoxide sensors are obtained. Their resistive properties are investigated. The passive wireless CO sensor on surface acoustic waves (SAW) was studied. The dependence of SAW reflection factor for unidirectional inter-digital transducers (IDT) loaded by impedance on its resistance value was investigated. It is shown that the reflection factor varied in linear way versus the value of the resistance in the range from 50 to 400 Ω. The total resistance value for one of the sintered sample lied in the range from 50 to 250 Ω in the case of parallel junction of ZnO nanorods in array by top electrode. This result corresponds to the linear range in the dependence of IDT reflection factor from resistance value. This can be used for determination of small concentrations of CO gas by IDT loaded with impedance based on ZnO nanorod array, because their resistance value depends on CO concentration.

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Acknowledgments

This work has been supported by the Ministry of Education and Science of Russian Federation, project No 2.5896 “The development of methods to obtain and study the properties of semiconductor nanostructures to create the elements of nanophotonic devices”, and by the internal funding of the Southern Federal University “The research and development of technological bases to produce the nanostructured ZnO and VOx films for application as sensitive elements of sensors” (Nano-011, SFedU).

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Correspondence to E. M. Kaidashev .

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Nikolaev, A.L., Karapetyan, G.Y., Nesvetaev, D.G., Lyanguzov, N.V., Dneprovski, V.G., Kaidashev, E.M. (2014). Preparation and Investigation of ZnO Nanorods Array Based Resistive and SAW CO Gas Sensors. In: Chang, SH., Parinov, I., Topolov, V. (eds) Advanced Materials. Springer Proceedings in Physics, vol 152. Springer, Cham. https://doi.org/10.1007/978-3-319-03749-3_3

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