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Nanoindentation Study of Mechanical Properties of Diamond Like Carbon Coatings

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Physics of Semiconductor Devices

Part of the book series: Environmental Science and Engineering ((ENVENG))

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Abstract

Nanoindentation is a depth sensing indentation technique to probe the mechanical properties of small volume. In this contribution, the results of nanoindentation response of diamond like carbon (DLC) coatings on SiAlON ceramics are presented. Indentation measurements were performed with an applied load of 3 mN in order to examine the pressure induced deformation of the structure. The DLC coated SiAlON ceramics exhibited increased elastic modulus and hardness compared to uncoated samples. The other mechanical parameters estimated from nanoindentation measurements are elastic recovery, stiffness and plastic deformation energy.

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Acknowledgments

The authors are grateful to Prof. R. C. Budhani, Director, CSIR-National Physical Laboratory, New Delhi (India) for his kind permission to publish this work. Mr. R. K. Tripathi is grateful to Ministry of New and Renewable Energy, Government of India for providing financial assistant.

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Authors and Affiliations

  1. Polymorphic Carbon Thin Films Group, Physics of Energy Harvesting Division, CSIR-National Physical Laboratory, New Delhi, 110012, India

    S. Chockalingam, R. K. Tripathi & O. S. Panwar

Authors
  1. S. Chockalingam
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  2. R. K. Tripathi
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  3. O. S. Panwar
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Corresponding author

Correspondence to S. Chockalingam .

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Editors and Affiliations

  1. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    V. K. Jain

  2. Amity Institute for Advanced Research and Studies (Meterials & Devices), Amity University, Noida, Uttar Pradesh, India

    Abhishek Verma

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© 2014 Springer International Publishing Switzerland

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Chockalingam, S., Tripathi, R.K., Panwar, O.S. (2014). Nanoindentation Study of Mechanical Properties of Diamond Like Carbon Coatings. In: Jain, V., Verma, A. (eds) Physics of Semiconductor Devices. Environmental Science and Engineering(). Springer, Cham. https://doi.org/10.1007/978-3-319-03002-9_191

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