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Synchronization in Coupled MEMS Resonators

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International Conference on Theory and Application in Nonlinear Dynamics (ICAND 2012)

Part of the book series: Understanding Complex Systems ((UCS))

Abstract

In this paper, the experimental results of a MEMS resonator with hard-spring response are shown. Under specific excitation conditions, the resonator shows an extension of the hysteresis during upsweep and downsweep of the excitation frequency. The extension of the hysteresis can be tuned by changing the excitation voltage. Sensitivity in regards to change in excitation conditions including ac voltage, dc bias, and pressure is demonstrated. Furthermore a unidirectionally coupled system consisting of the above nonlinear resonators is also characterized.

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Notes

  1. 1.

     Here we assume that the fabrication process has no/very little effect on the initial positions of the resonators.

References

  1. A. Cowen, G. Hames, D. Monk, S. Wilcenski, B. Hardy, Soimumps Design Handbook Revision 6.0 (MEMSCAP Inc., Durham, 2009)

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  2. C. Acar, A. Shkel, MEMS Vibratory Gyroscopes (Springer Science+Business Media, New York, 2009)

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  3. S. Naik, T. Hikihara, Characterization of a mems resonator with extended hysteresis. IEICE Electron. Expr. 8(5), 291–298 (2011)

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Acknowledgments

This work was supported in part by Global Center of Excellence (GCOE) program at Kyoto University, Kyoto Environmental Nanotechnology Cluster, Regional Innovation Cluster Program 2010, and Ministry of Education, Culture, Sports, Science and Technology (MEXT). The authors would like to acknowledge valuable help and advice from Dr. Patrick Longhini (SSC-Pacific), Dr. Huy Vu (San Diego State University), Dr. Antonio Palacios (San Diego State University), and Dr. Visarath In (SSC-Pacific).

Author information

Authors and Affiliations

  1. SSC-Pacific, 53560 Hull Street, San Diego, CA, 92152, USA

    Suketu Naik

  2. Department of Electrical Engineering, Kyoto University, Katsura, Nishikyo, Kyoto, 615–8510, Japan

    Takashi Hikihara

Authors
  1. Suketu Naik
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  2. Takashi Hikihara
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Corresponding author

Correspondence to Suketu Naik .

Editor information

Editors and Affiliations

  1. Code 71730, Spawar Systems Center, San Diego, California, USA

    Visarath In

  2. Department of Mathematics, San Diego State University, San Diego, California, USA

    Antonio Palacios

  3. Code 71730, Spawar Systems Center, San Diego, California, USA

    Patrick Longhini

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Naik, S., Hikihara, T. (2014). Synchronization in Coupled MEMS Resonators. In: In, V., Palacios, A., Longhini, P. (eds) International Conference on Theory and Application in Nonlinear Dynamics (ICAND 2012). Understanding Complex Systems. Springer, Cham. https://doi.org/10.1007/978-3-319-02925-2_31

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