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A Methodology for In-Situ FIB/SEM Tension Testing of Metals

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Dynamic Behavior of Materials, Volume 1

Abstract

We report on recent investigations into the mechanical properties of metallic micro-specimens deformed in tension and compression. We will focus on investigations using a custom test apparatus for in-situ focused ion beam and scanning electron microscope (FIB/SEM) mechanical testing. Our system utilizes a 3-axis piezoelectric positioning system that enables precise alignment of the micro-specimens within a tensile grip. Loads are applied using a high-resolution linear actuator with a reported resolution of ~1 nm and measured with a strain gage based S-beam load cell. The load cells have a capacity of 10 or 100 g with a resolution of ~0.01 g. Specimen load/stress and crosshead displacements are measured using a customized data acquisition program, while the specimen strain is calculated from SEM micrographs using an open source digital image correlation script developed by Eberl and coworkers for MATLAB©. This system was used to investigate response of coarse grained and nanocrystalline tantalum micro-pillars with minimum dimensions smaller than 10 μm.

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Correspondence to J. P. Ligda or B. E. Schuster .

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© 2014 The Society for Experimental Mechanics, Inc.

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Ligda, J.P., Wei, Q., Sharpe, W.N., Schuster, B.E. (2014). A Methodology for In-Situ FIB/SEM Tension Testing of Metals. In: Song, B., Casem, D., Kimberley, J. (eds) Dynamic Behavior of Materials, Volume 1. Conference Proceedings of the Society for Experimental Mechanics Series. Springer, Cham. https://doi.org/10.1007/978-3-319-00771-7_52

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  • DOI: https://doi.org/10.1007/978-3-319-00771-7_52

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-00770-0

  • Online ISBN: 978-3-319-00771-7

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