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Characterization of Films Prepared by Aerosol Spray Deposition in the (MgO)x(In2O3)(1−x) System

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6th International Conference on Nanotechnologies and Biomedical Engineering (ICNBME 2023)

Part of the book series: IFMBE Proceedings ((IFMBE,volume 91))

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Abstract

In this paper nanostructured thin films with thickness of 150 nm have been prepared by aerosol deposition method on p-Si in the system (MgO)x(In2O3)(1−x) with the composition range x = 0.2, 0.4 and 0.6, using indium chloride and magnesium chloride as precursors. The produced films were investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM) to determine the morphology and roughness, energy dispersive X-ray (EDX) analysis for the chemical composition estimation, and X-ray diffraction (XRD) for establishing the structural and crystallographic phases. It was found that the nano-crystallites sizes grow with increasing the Mg content, therefore influencing the roughness of the films. The film surface roughness calculated from topographic AFM images is in the RMS range from 5.7 to 7.5 nm with increasing Mg concentration, but the value of the Coefficient of Kurtosis parameter is from 0.18 to 0.64. The evolution of the crystalline phases content with increasing the x value from 0.2 to 0.6 was established. The electrical and photoelectrical properties were studied by I-V characterization under the illumination with the light with the wavelength of 365 nm. It was shown that the films are sensitive to this radiation with the ratio of the photocurrent to the dark current from 5 to 7 at the excitation density of 2.4 mW/cm−2.

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Acknowledgments

This work was supported financially by the ANCD through grant no. #20.80009.5007.02.

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Authors and Affiliations

  1. Technical University of Moldova, D. Ghitu Institute of Electronic Engineering and Nanotechnologies, Chisinau, Republic of Moldova

    Vadim Morari & Emil V. Rusu

  2. National Center for Materials Study and Testing, Technical University of Moldova, Chisinau, Republic of Moldova

    Veaceslav V. Ursaki & Ion M. Tiginyanu

  3. Petru Poni Institute of Macromolecular Chemistry, Romanian Academy, Iasi, Romania

    Daniela Rusu

Authors
  1. Vadim Morari
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  2. Daniela Rusu
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  3. Emil V. Rusu
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  4. Veaceslav V. Ursaki
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  5. Ion M. Tiginyanu
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Correspondence to Vadim Morari .

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Editors and Affiliations

  1. Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, Chisinau, Moldova

    Victor Sontea

  2. Academy of Sciences of Moldova, Chisinau, Moldova

    Ion Tiginyanu

  3. Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, Chisinau, Moldova

    Serghei Railean

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Morari, V., Rusu, D., Rusu, E.V., Ursaki, V.V., Tiginyanu, I.M. (2024). Characterization of Films Prepared by Aerosol Spray Deposition in the (MgO)x(In2O3)(1−x) System. In: Sontea, V., Tiginyanu, I., Railean, S. (eds) 6th International Conference on Nanotechnologies and Biomedical Engineering. ICNBME 2023. IFMBE Proceedings, vol 91. Springer, Cham. https://doi.org/10.1007/978-3-031-42775-6_6

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  • DOI: https://doi.org/10.1007/978-3-031-42775-6_6

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  • Online ISBN: 978-3-031-42775-6

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