Abstract
Recent years have seen significant progress in the improvements of surfaces properties of various materials, as well as efficiency and reliability in a wide ranges of engineering applications such as chemical vapor deposition (CVD technology) on cutting tools, forming tools, dies, and moulds, with perfected equipment and processes to synthesize the composite multilayer-coatings. The present paper has focused on concepts in the impact of modified surface on a set of properties that define the composite coating-structures and microstructures. Rated among this are coating structure, heat resistance, adhesion to a workpiece material, corrosion and oxidation resistance at elevated temperatures. The results of literatures survey showed that, the anti-corrosion and wear performance of the coatings was greatly improved by the addition of several compounds and elements such as aluminum oxide, silicon carbide, nitrides, borides or their mixtures. Also, the properties of substrates significate effected by the chemical composition, thickness, and number of layers of the coatings. As well, the present article provides some theoretical insights into the CVD process for further understanding and improving the coating structures and microstructure, as well as shedding light on some a survey of trends in development of the properties and characterization of composite-multilayered coatings.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Chow, L.A.: Equipment and manufacturability issues in chemical vapor deposition processes. In: Handbook of Thin Film Deposition, pp. 269–316. Elsevier (2018). https://doi.org/10.1016/B978-0-12-812311-9.00009-8
Mochalov, L., Yu, M., Dorokhin, M., et al.: Thermoelectrical properties of ternary lead chalcogenide plumbum-selenium-tellurium thin films with excess of tellurium prepared by plasma-chemical vapor deposition. J. Thin Solid Films 752, 139244 (2022). https://doi.org/10.1016/j.tsf.2022.139244
Sachin, S., Kumar, S., Ramesh, K.: A comprehensive review: super hydrophobic graphene nanocomposite coatings for underwater and wet applications to enhance corrosion resistance. FlatChem. 31, 100326 (2022). https://doi.org/10.1016/j.flatc.2021.100326
Plankovskyy, S., Shypul, O., Zaklinskyy, S., Tsegelnyk, Y., Kombarov, V.: A method of rapid measurement of vessels volume with complex shape by critical nozzles. In: Nechyporuk, M., Pavlikov, V., Kritskiy, D. (eds.) Integrated Computer Technologies in Mechanical Engineering - 2020: Synergetic Engineering, pp. 247–255. Springer International Publishing, Cham (2021). https://doi.org/10.1007/978-3-030-66717-7_20
Shuai, S., Xiang, H., Xiao, L., et al.: A novel TiC-TiN based spectrally selective absorbing coating: structure, optical properties and thermal stability. Infrared Phys. Technol. 110, 103471 (2020). https://doi.org/10.1016/j.infrared.2020.103471
Kai, X., Hao, L., Yan, C., et al.: Preparation of T-carbon by plasma enhanced chemical vapor deposition. J. Carbon 157, 270–276 (2020). https://doi.org/10.1016/j.carbon.2019.10.032
Apera, T., Yama, F., Beh, K.: Influence of temperature and nickel catalyst on the structural and optical properties of indium oxide nanostructured films synthesized by chemical vapor deposition technique. Mater. Sci. Semicond. Process. 132, 105925 (2021). https://doi.org/10.1016/j.mssp.2021.105925
Lin, J., et al.: Investigation of the parameters of carbon nanotube growth on zirconium diboride supported Ni catalyst via CVD. Diamond Related Mater. 115, 108347 (2021). https://doi.org/10.1016/j.diamond.2021.108347
Plankovskyy, S.I., Shypul, O.V., Zaklinskyy, S.A., Tryfonov, O.V.: Dynamic method of gas mixtures creation for plasma technologies. Probl. Atomic Sci. Technol.: Plasma Phys. 118, 189–193 (2018). https://www.scopus.com/inward/record.uri?eid=2-s2.085060735723&partnerID=40&md5=260bac2951c609b3d280a0689b980ed6
Rahul, S., Swastik, P., Ravi, N.: Design and fabrication of spiral triangular micro texture on chemical vapor deposition coated cutting insert using femtosecond laser machine. J. Mater. Today Proc. 28(3), 1439–1444 (2020). https://doi.org/10.1016/j.matpr.2020.04.817
Song, X., Wang, X., Sun, F.: Fabrication and evaluation of diamond thick film brazed cutting tool by microwave plasma chemical vapor deposition method. J. Mater. Process. Technol. 291, 117034 (2021). https://doi.org/10.1016/j.jmatprotec.2020.117034
Gao, S., Li, S., Zhang, S., et al.: Chemical vapor deposition of pyrolytic boron nitride ceramics from single source precursor. J. Ceram. Int. 43, 10020–10025 (2017). https://doi.org/10.1016/j.ceramint.2017.05.016
Liu, Y., Liu, D., Vasiliy, P., et al.: Influences of modulation period on structure and properties of AlTiSiN/AlCrSiN nanocomposite multilayer coatings. J. Vacuum 193, 110516 (2021). https://doi.org/10.1016/j.vacuum.2021.110516
Ashin, S., Karol, V., Michaela, S., et al.: Stepwise sulfurization of moo3 to mos2 thin films studied by real-time x-ray scattering. J. Appl. Surf. Sci., PII S0169–4332(22), 02300–02305 (2022). https://doi.org/10.1016/j.apsusc.2022.154772
Guolong, Z., Ziyi, L., Maoshun, H.: Fabrication and performance of CVD diamond cutting tool in micro milling of oxygen-free copper. Int. J. Diam. Relat. Mater. 100, 107589 (2019). https://doi.org/10.1016/j.diamond.2019.107589
Liu, C., Liu, Z., Wang, B.: Modification of surface morphology to enhance tribological properties for CVD coated cutting tools through wet micro-blasting post-process. Ceram. Int. 44(3), 3430–3439 (2018). https://doi.org/10.1016/j.ceramint.2017.11.142
Jian, Z., Yulei, Z., Yanqin, F.: Growth mechanism and ablation behavior of CVD-HfC coating on the surface of C/C composites and CVD-SiC coating. Corros. Sci. 192, 109819 (2021). https://doi.org/10.1016/j.corsci.2021.109819
Cherifia, A., Aouinea, M., Decams, M., et al.: Chemical vapor deposition (DLI-CVD) and characterization of multiphasic molybdate-based catalysts for propene oxidation. Catal. Sci. Technol. 12(10), 3261–3271 (2022). https://doi.org/10.1039/d1cy02021h
Kenneth, H., Helena, R., Anssi, L.: Friction and wear of coated surfaces — scales, modelling and simulation of tribomechanisms. Surf. Coatings Technol. 202(4–7), 1034–1049 (2007). https://doi.org/10.1016/j.surfcoat.2007.07.105
Pengfei, Z., Yulei, Z., Guohui, C.: High-temperature oxidation behavior of CVD-SiC ceramic coating in wet oxygen and structural evolution of oxidation product: experiment and first-principle calculations. J. Appl. Surf. Sci. 556, 149808 (2021). https://doi.org/10.1016/j.apsusc.2021.149808
Sakai, A., Kitamori, N., Nishi, K., Motojima, S.: Preparation and characterization of SiC-coated C/C composites using pulse chemical vapor deposition (pulse-CVD). Mater. Let. 25(1–2), 61–64 (1995). https://doi.org/10.1016/0167-577X(95)00143-3
Jingguo, F., Yihe, S., Yulong, J., Jifeng, Z., et al.: Fabrication of robust ceramic based superhydrophobic coating on aluminum substrate via plasma electrolytic oxidation and chemical vapor deposition methods. J. Mater. Process. Technol. 306, 117641 (2022). https://doi.org/10.1016/j.jmatprotec.2022.117641
Mandal, D., Dabhade, P., Chougule, B.: Thin film coating of silicon carbide on zircaloy-4 tube by FCVD process and a study on its kinetics. J. Nucl. Mater. 552, 152996 (2021). https://doi.org/10.1016/j.jnucmat.2021.152996
Anu, M., Udayakumar, A., Ashutosh, S.: High temperature oxidation behaviour of CVD β-SiC seal coated SiCf/SiC composites in static dry air and combustion environment. J. Ceram. Int. 43(12), 9472–9480 (2017). https://doi.org/10.1016/j.ceramint.2017.04.125
Hui, Y., Hongsheng, Z., Taowei, W.: The oxidation behavior of multi-layered SiC coated graphite in water vapor containing environment. Corros. Sci. 196, 110025 (2022). https://doi.org/10.1016/j.corsci.2021.110025
Xiaowei, Y., Laifei, C., Litong, Z., et al.: Oxidation behaviors of C/SiC in the oxidizing environments containing water vapor. Mater. Sci. Eng. 348(1–2), 47–53 (2003). https://doi.org/10.1016/S0921-5093(02)00644-5
Nedal, Y., Abu-Thabit1, H.: Fundamental of Smart Coatings and Thin Films: Synthesis, Deposition Methods, and Industrial Applications. Elsevier (2020). ISBN 978-0-12-849870-5
Schalk, N., Tkadletz, M., Mitterer, C.: Hard coatings for cutting applications: Physical vs. chemical vapor deposition and future challenges for the coatings community. Surf. Coat. Technol. 429, 127949 (2022). https://doi.org/10.1016/j.surfcoat.2021.127949
Leyland, A., Matthews, A.: On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour. Wear 246(1–2), 1–11 (2000). https://doi.org/10.1016/S0043-1648(00)00488-9
Acknowledgment
This work was supported by the TKP2020-NKA-10 project financed under the 2020-4.1.1-TKP2020 Thematic Excellence Programme by the National Research, Development and Innovation Fund of Hungary.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2023 The Author(s), under exclusive license to Springer Nature Switzerland AG
About this paper
Cite this paper
Ali, O.I., Gyurika, I.G. (2023). Recent Advances in Development and Characterization of CVD Multilayer Composite Coatings—A Comprehensive Review. In: Nechyporuk, M., Pavlikov, V., Kritskiy, D. (eds) Integrated Computer Technologies in Mechanical Engineering - 2022. ICTM 2022. Lecture Notes in Networks and Systems, vol 657. Springer, Cham. https://doi.org/10.1007/978-3-031-36201-9_6
Download citation
DOI: https://doi.org/10.1007/978-3-031-36201-9_6
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-031-36200-2
Online ISBN: 978-3-031-36201-9
eBook Packages: EngineeringEngineering (R0)