Abstract
Glancing Angle Deposition (GLAD) is a technique used in Physical Vapor Deposition (PVD) to prepare thin films with specific properties. During the deposition process, a tilt is introduced between the sputtered atoms flux and the normal of the substrate surface. By shadowing effect, this induces tilted nano-columns that affect the properties of the coating. To predict these properties, several existing tools simulate the different steps of the PVD deposition. First, a simulation of the sputtering of atoms from a metallic target is made, followed by the computation of the atoms transportation from the target to the substrate. Finally, the growth of the film is computed. All these simulations use point based representation to represent the deposited atoms. However, such representation is not suited for classical finite elements analysis (FEA).
In this paper, a methodology for generating FEA meshes from the points produced by film growth simulation is presented. Two major scientific challenges are overcome. Firstly, how to segment the “film” point cloud into a collection of individual “columns” and secondly, how to generate the meshes of the columns that are approximately represented by points. The point cloud segmentation is computed through neighbourhood notion. The mesh is obtained as an implicit surface by the marching cubes algorithm and smoothed by a Humphrey’s class Laplacian algorithm. Numerical simulations based on the generated FEA meshes will be conducted using Abaqus FEA software.
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References
Martin, P.M.: Handbook of Deposition Technologies for Films and Coatings, third edition. Cambridge, Elsevier, p. 936 (2010). ISBN 978–0–8155–2031–3
Baptista, A.: On the physical vapour deposition (PVD): evolution of magnetron sputtering processes for industrial applications. Procedia Manuf. 17, 746–757 (2018). https://doi.org/10.1016/j.promfg.2018.10.125
Stoessel, C.H.: Optical Thin Films and Coatings (Second Edition), Woodhead Publishing, p. 860 (2018). ISBN 978–0–08–102073–9
Ma, Y.: Materials and structure engineering by magnetron sputtering for advanced lithium batteries. Energy Storage Mater. 39, 203–224 (2021). https://doi.org/10.1016/j.ensm.2021.04.012
Bobzin, K.: Enhanced PVD process control by online substrate temperature measurement. Surf. Coat. Technol. 354, 383–389 (2018). https://doi.org/10.1016/j.surfcoat.2018.07.096
Ziegler, J.F.: “SRIM-2003”, Nuclear Instruments and Methods in Physics Research B, vol. 219–220, pp. 1027–1036 (2004). https://doi.org/10.1016/j.nimb.2004.01.208
Möller, W.: Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solids. Comput. Phys. Commun. 51, 355–368 (1998). https://doi.org/10.1016/0010-4655(88)90148-8
Aeken, K.V.: The metal flux from a rotating cylindrical magnetron: a Monte Carlo simulation. J. Phy. D: Appl. Phys. 41, 205307 (2008). https://doi.org/10.1088/0022-3727/41/20/205307
Lucas, S., Moskovkin, P.: Simulation at high temperature of atomic deposition, islands coalescence, Ostwald and inverse Ostwald ripening with a general simple kinetic Monte Carlo code. Thin Solids Films 518, 5355–5361 (2010). https://doi.org/10.1016/j.tsf.2010.04.064
Moskovkin, P., Lucas, S.: Computer simulations of the early stage growth of Ge clusters at elevated temperatures, on patterned Si substrate using the kinetic Monte Carlo method. Thin Solids Films 536, 313–317 (2013). https://doi.org/10.1016/j.tsf.2013.03.031
Besnard, A., Martin, N., Carpentier, L.: Three-dimensional growth simulation: a study of substrate oriented films. Mater. Sci. Eng. 12, 012011 (2010). https://doi.org/10.1088/1757-899X/12/1/012011
Hawkeye, M.M.: Glancing Angle Deposition of Thin Films: Engineering the Nanoscale, p. 320 Wiley, Hoboken (2013). ISBN 978–1–118–84756–5
Lacroix, B.: Nanostructure and physical properties control of indium tin oxide films prepared at room temperature through ion beam sputtering deposition at oblique angles. J. Phys. Chem. C 123, 14036–14046 (2019). https://doi.org/10.1021/acs.jpcc.9b02885
Potočnik, J.: The influence of thickness on magnetic properties of nanostructured nickel thin films obtained by GLAD technique. Mater. Res. Bull. 84, 455–461 (2016). https://doi.org/10.1016/j.materresbull.2016.08.044
Lintymer, J.: Influence of zigzag microstructure on mechanical and electrical properties of chromium multilayered thin films. Surf. Coat. Technol. 180–181, 26–32 (2004). https://doi.org/10.1016/j.surfcoat.2003.10.027
Siad, A. : Etude numérique et expérimentale de la croissance de couches minces déposées par pulvérisation réactive (2016). tel-01418118
Besnard, A.: Three-dimensional growth simulation: A study of substrate oriented films. In: IOP Conference Series: Materials Science and Engineering, vol. 12 (2010). https://doi.org/10.1088/1757-899X/12/1/012011
Kudela, L.: Direct structural analysis of domains defined by point clouds. Comput. Methods Appl. Mech. Eng. 358, 112581 (2019). https://doi.org/10.1016/j.cma.2019.112581
Bernardini, F.: The ball-pivoting algorithm for surface reconstruction. IEEE Trans. Vis. Comput. Graph. 5, 349–359 (1999). https://doi.org/10.1109/2945.817351
Lai, S., Cheng, F.(: Voxelization of free-form solids represented by catmull-clark subdivision surfaces. In: Kim, M.-S., Shimada, K. (eds.) GMP 2006. LNCS, vol. 4077, pp. 595–601. Springer, Heidelberg (2006). https://doi.org/10.1007/11802914_45
Lorensen, W.: Marching cubes: a high resolution 3D surface construction algorithm. Comput. Graph. 21, 163–169 (1987). https://doi.org/10.1145/37402.37422
Lewiner, T.: Efficient implementation of marching cubes’ cases with topological guarantees. J. Graph. Tools 8, 1–15 (2003). https://doi.org/10.1080/10867651.2003.10487582
Vollmer, J.: Improved laplacian smoothing of noisy surface meshes. Comput. Graph. Forum 18, 131–138 (1999). https://doi.org/10.1111/1467-8659.00334
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Watiez, N. et al. (2023). Finite Element Mesh Generation for Nano-scale Modeling of Tilted Columnar Thin Films for Numerical Simulation. In: Noël, F., Nyffenegger, F., Rivest, L., Bouras, A. (eds) Product Lifecycle Management. PLM in Transition Times: The Place of Humans and Transformative Technologies. PLM 2022. IFIP Advances in Information and Communication Technology, vol 667. Springer, Cham. https://doi.org/10.1007/978-3-031-25182-5_22
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