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Design and Performance Analysis of TiOx Based MEMS Bolometer Pixel

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Microactuators, Microsensors and Micromechanisms (MAMM 2022)

Part of the book series: Mechanisms and Machine Science ((Mechan. Machine Science,volume 126))

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Abstract

In this study the electro-thermo-mechanical behavior and analysis of TiOx microbolometer is presented. Different thermal, electrical and coupled electromechanical simulations were performed to achieve the target Noise Equivalent Temperature Difference (NETD) and thermal time constant. The influence of various device dimensions and film thickness on device thermal conductance, NETD and thermal time constant has been reported.

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Acknowledgments

The authors sincerely thank Dr. Seema Vinayak, Director SSPL for her continuous support and kind permission to publish this work.

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Authors and Affiliations

  1. Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi, 110054, India

    Isha Yadav, Sudha Gupta, A. Vishwakarma & S. Dutta

  2. Department of Physics, IIT Delhi, Hauz Khas, New Delhi, 110016, India

    Isha Yadav & Ratnamala Chatterjee

Authors
  1. Isha Yadav
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  2. Sudha Gupta
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  3. A. Vishwakarma
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  4. S. Dutta
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  5. Ratnamala Chatterjee
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Corresponding author

Correspondence to Isha Yadav .

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Editors and Affiliations

  1. Department of Mechanical and Aerospace Engineering, Indian Institute of Technology Hyderabad, Sangareddy, Telangana, India

    Ashok Kumar Pandey

  2. Department of Physics, Indian Institute of Technology Hyderabad, Sangareddy, Telangana, India

    Prem Pal

  3. Central Manufacturing Technology Institute, Bengaluru, Karnataka, India

    Nagahanumaiah

  4. Department of Mechanical Engineering, Technische Universität Ilmenau, Ilmenau, Germany

    Lena Zentner

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Yadav, I., Gupta, S., Vishwakarma, A., Dutta, S., Chatterjee, R. (2023). Design and Performance Analysis of TiOx Based MEMS Bolometer Pixel. In: Pandey, A.K., Pal, P., Nagahanumaiah, Zentner, L. (eds) Microactuators, Microsensors and Micromechanisms. MAMM 2022. Mechanisms and Machine Science, vol 126. Springer, Cham. https://doi.org/10.1007/978-3-031-20353-4_19

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  • DOI: https://doi.org/10.1007/978-3-031-20353-4_19

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-031-20352-7

  • Online ISBN: 978-3-031-20353-4

  • eBook Packages: EngineeringEngineering (R0)

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