Abstract
Examples of piezoelectric MEMS (micro-electromechanical systems) developed to work as sensors, actuators and energy harvesting devices are presented. Specifically, a distance-independent contactlessly-interrogated piezoelectric microresonator has been developed to operate as a microbalance. Acoustic-wave piezoelectric microactuators have been investigated to centrifugate liquid drops in acoustofluidics applications and to operate as tunable sound transducers. A piezoelectric MEMS energy harvester which combines the multi-converter and nonlinear approaches has been proposed.
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Nastro, A., Baù, M., Ferrari, M., Ferrari, V. (2023). Piezoelectric MEMS for Sensors, Actuators and Energy Harvesting. In: Di Francia, G., Di Natale, C. (eds) Sensors and Microsystems. AISEM 2021. Lecture Notes in Electrical Engineering, vol 918. Springer, Cham. https://doi.org/10.1007/978-3-031-08136-1_41
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DOI: https://doi.org/10.1007/978-3-031-08136-1_41
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