Abstract
This paper presents the results of high-performance atomistic modeling of heating and the initial stage of evaporation of thin silicon dioxide films under the action of high-power laser radiation. Both dense isotropic films obtained by normal deposition and highly porous anisotropic silicon dioxide films obtained by deposition at a large angle to the substrate are investigated. The dependence of the initial stage of film evaporation on its structural properties is analyzed.
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References
Danson, C., Hillier, D., Hopps, N., Neely, D.: High Power Laser Sci. Eng. 3, 1–14 (2015)
Danson, C.N., et al.: High Power Laser Sci. Eng. 7(54), (2019)
Lawrence Livermore National Laboratory: https://lasers.llnl.gov/
Kozlowski, M.R., Chow, R.: Role of defects in laser damage of multilayer coatings. In: SPIE Proceedings Volume 2114, Laser-Induced Damage in Optical Materials: 1993 (1994) https://doi.org/10.1117/12.180876
Stolz, C., et al.: Optical Interference Coating, Banff, Canada, (2001)
Natoli, J.-Y., Gallais, L., Akhouayri, H., Amra, C.: Appl. Opt. 41, 3156–3166 (2002)
ISO 21254-1, Laser and laser-related equipment - Test methods for laser-induced damage threshold (2011)
Jeschke, H.O., Diakhate, M.S., Garcia, M.E.: Appl. Phys. A 96(1), 33–42 (2009)
Wu, C.: Lasers in Materials Science, vol.191/ed. Z.L. Castillejo M., Ossi P. – Springer, 67–100 (2014) https://doi.org/10.1007/978-3-319-02898-9
Bai, Q.S.: Molecular simulation and ablation property on the laser-induced metal surface. In: Bai, Q.S. et al. Proc.SPIE. vol. 11063 (2019)
Klein, D., Eisfeld, E., Roth, J.: J. Phys. D: Appl. Phys. 54, 015103 (2021)
Yu, J., et al.: Advances in condensed matter physics, 2014, 364627 (2014)
Grigoriev, F.V., Zhupanov, V.P., Chesnokov, D.A., Sulimov, V.B., Tikhonravov, A.V.: Lobachevskii Journal of Mathematics 42(7), 1514–1520 (2021)
Keldysh, L.V.: Sov. Phys. JETP 20, 1307 (1965)
Mero, M., Liu, J., Rudolph, W., Ristau, D., Starke, K.: Phys. Rev. B 71(115109), 1–7 (2005)
Jasapara, J., Nampoothiri, A.V.V., Rudolph, W., Ristau, D., Starke, K.: Phys. Rev. B 63(045117), 1–5 (2001)
Grigoriev, F., Sulimov, V., Tikhonravov, A.: J. Non-Cryst. Solids 512, 98–102 (2019)
Grigoriev, F., Sulimov, V., Tikhonravov, A.: Coatings 9, 568 (2019)
Grigoriev, F.V., Sulimov, A.V., Kochikov, I.V., Kondakova, O.A., Sulimov, V.B., Tikhonravov, A.V.: Supercomputer modeling of the ion beam sputtering process: full-atomistic level. In: Proceedings of the Optical Systems Design 2015: Advances in Optical Thin Films V, International Society for Optics and Photonics, Bellingham, WA, USA, 7–10 September 2015, vol. 9627, p. 962708 (2015)
Perry, D.L.: Handbook of Inorganic Compounds. CRC Press (2016). https://doi.org/10.1201/b10908
Berendsen, H.J.C., Postma, J.P.M., Van Gunsteren, W.F., DiNola, A., Haak, J.R.: J. Chem. Phys. 81, 3684–3690 (1984)
Abraham, M.J., et al.: SoftwareX 1, 19–25 (2015)
Robbie, K., Brett, M.J., Lakhtakia, A.: Nature 384, 616 (1996)
Hawkeye, M.M., Brett, M.J.: J. Vac. Sci. Technol. 25, 1317 (2007)
Voevodin, V.V., et al.: Supercomput. Front. Innov. 6(2), 4–11 (2019)
Leko, V.K., Mazurin, O.V.: Properties of Quartz Glass. Nauka, Leningrad (1985).[in Russian]
Carr, C.W., Radousky, H.B., Rubenchik, A.M., Feit, M.D., Demos, S.G.: Phys. Rev. Lett. 92(8), 087401 (2004)
Carr, C. W., Radousky, H. B., Demos, S. G.: Phys. Rev. Lett. 91, 127402 (2003)
Chen, M., Ding, W., Cheng, J., Yang, H., Liu, Q.: Crystal. Appl. Sci. 10, 6642 (2020)
Demuth, T., Jeanvoine, Y., Hafner, J., Angyan, J.G.: J. Phys.: Condens. Mat. 11, 3833 (1999)
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Grigoriev, F., Sulimov, V., Tikhonravov, A. (2021). High-Performance Atomistic Modeling of Evaporation of Thin Films Under Intense Laser Irradiation. In: Voevodin, V., Sobolev, S. (eds) Supercomputing. RuSCDays 2021. Communications in Computer and Information Science, vol 1510. Springer, Cham. https://doi.org/10.1007/978-3-030-92864-3_9
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