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Design and Optimization of a Shunt RF MEMS Switch with a Hybrid Contact Type

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International Youth Conference on Electronics, Telecommunications and Information Technologies

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 268))

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Abstract

This paper presents the results of the design, optimization and simulation of a radio-frequency (RF) switch made using microelectromechanical systems (MEMS) technology. The device is a capacitive shunt switch with a hybrid contact type and a high capacitance ratio and a small air gap. To increase the capacitance ratio in the developed design of the RF MEMS switch, a fixed capacitor with metal–insulator-metal (MIM) plates is used. As the material of the insulator layer, a material with a high permittivity—titanium oxide—is used. To reduce the value of the activation voltage and increase the speed of the switch in the presented design of the RF MEMS switch, a zig-zag type of elastic suspension element is used. According to the results of the simulation of the optimized design of the RF MEMS switch, the activation voltage is no more than 3.5 V with a closing time of no more than 6.5 us. In addition, the RF MEMS switch presented by the results of electromagnetic modeling is characterized by low insertion loss −0.06 dB @ 3.6 GHz in the open position and a high isolation value −43.5 dB @ 3.6 GHz in the closed position. The effective frequency spectrum of the presented RF MEMS switch with a hybrid contact type is the S-band, which includes various types of ground and satellite radio communications.

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Acknowledgements

The work was carried out at the expense of funds, task No. FENW-2020-0022 for the implementation of scientific research carrying out scientific research at the expense of the Federal budget, in terms of scientific activities on the topic “Development and research of methods and means of monitoring, diagnostics and forecasting state of engineering objects based on artificial intelligence”.

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Authors and Affiliations

  1. Southern Federal University, Taganrog, Rostov-on-Don Region, 347922, Russia

    Alexey Tkachenko, Igor Lysenko, Mark Denisenko & Olga Ezhova

Authors
  1. Alexey Tkachenko
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  2. Igor Lysenko
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  3. Mark Denisenko
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  4. Olga Ezhova
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Editor information

Editors and Affiliations

  1. Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia

    Elena Velichko

  2. Peter the Great St. Petersburg Polytechn, St. Petersburg, Russia

    Viktoria Kapralova

  3. Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia

    Platon Karaseov

  4. Peter the Great St. Petersburg Polytechnic University, St. Petersburg, Russia

    Sergey Zavjalov

  5. Dept. Communication Engineering, Univ Basque Country UPV EHU, Bilbao, Spain

    Pablo Angueira

  6. Unit of Electrical Engineering, Tampere University, Tampere, Finland

    Sergey Andreev

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Tkachenko, A., Lysenko, I., Denisenko, M., Ezhova, O. (2022). Design and Optimization of a Shunt RF MEMS Switch with a Hybrid Contact Type. In: Velichko, E., Kapralova, V., Karaseov, P., Zavjalov, S., Angueira, P., Andreev, S. (eds) International Youth Conference on Electronics, Telecommunications and Information Technologies. Springer Proceedings in Physics, vol 268. Springer, Cham. https://doi.org/10.1007/978-3-030-81119-8_30

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