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Nano-in-Nano Integration Technology for Advanced Fabrication of Functional Nanofluidic Devices

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Advanced MEMS/NEMS Fabrication and Sensors

Abstract

In this chapter, Nano-in-Nano Integration was introduced as the progress of functional nanofluidic devices. Most contemporary nanofluidic devices use bare nanochannels without functional components, which limits their nanofluidic application. Nano-in-Nano fabrication technologies have been proposed as a solution, which includes the subtractive method using the focus ion beam and the additive method using multiple electron beam lithography. Nanocomponents with different functions, such as arrays, valves, and electrodes, have been integrated into nanochannels, as proof-of-concept studies, which can be envisioned to offer a new angle for the advanced fabrication of functional nanofluidic devices.

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Acknowledgments

This work was supported in part by JSPS KAKENHI (Grant Nos. JP19KK0129, JP18H01848, JP20H00497, JP16K13653, JP26706010, JP26630403, JP21H04640, JP20H00497, JP21J14595), MEXT KAKENHI (Grant Nos. JP19H04678, JP17H05468, and JP26107714), JST PRESTO (Grant No. JPMJPR18H5), and the Asahi Glass Foundation.

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  1. Department of Chemical Engineering, Graduate School of Engineering, Osaka Prefecture University, Osaka, Japan

    Jinbin Yang & Yan Xu

  2. Japan Science and Technology Agency (JST), PRESTO, Kawaguchi, Saitama, Japan

    Yan Xu

  3. NanoSquare Research Institute, Osaka Prefecture University, Osaka, Japan

    Yan Xu

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  1. Jinbin Yang
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Correspondence to Yan Xu .

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  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, China

    Zhuoqing Yang

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Yang, J., Xu, Y. (2022). Nano-in-Nano Integration Technology for Advanced Fabrication of Functional Nanofluidic Devices. In: Yang, Z. (eds) Advanced MEMS/NEMS Fabrication and Sensors. Springer, Cham. https://doi.org/10.1007/978-3-030-79749-2_5

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