Abstract
One strategic trend in electronic devices is the greater utilization of limited frequency bands at low GHz frequencies. Nano-granular structured thin film materials are promising materials for high-frequency electromagnetic applications, such as thin film magnetic sensors, electromagnetic noise suppressors, and thin film inductors. Soft magnetic nano-granular thin films and magnetic nano-granules embedded in metal-oxide or metal-nitride matrices have been keenly studied because of their high electrical resistivity and high permeability up to few GHz. This chapter provides an evolution of the synthesis process, its unique structure, and the high-frequency soft magnetic performance of nano-granular cobalt-(metal-oxide, metal-nitride) system thin films. We also discuss the effects of perpendicular magnetic anisotropy on magnetic domains and high-frequency soft magnetic performance over 10 GHz frequencies.
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Acknowledgments
I would like to express my great appreciation to Dr. H. Masumoto (Tohoku Univ.) for his dedication as mentor for whole research. The author appreciates the support of Dr. T. Miyazaki (Tohoku Univ.) in performing TEM observations. I am also grateful to Dr. T. Yamaoka (SII NanoTechnology Inc.) for his taking MFM observations. Dr S. Takeda (KEYCOM Co.) provided us refined high-frequency measurements up to GHz frequencies and helpful perspectives. My thanks are also extended to Dr. S. Ohnuma (Denjiken), Dr. Y. Endo (Tohoku Univ.), M. Yamaguchi (Tohoku Univ.), and Dr. Y. Shimada (Tohoku Univ.) for their contribution in providing fruitful discussion and helpful advice.
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Kijima-Aoki, H. (2021). High-Frequency Soft Magnetic Properties of Nano-Granular Cobalt-(Metal-Oxide, Metal-Nitride) Thin Films with Perpendicular Magnetic Anisotropy. In: Roca, A.G., et al. Surfaces and Interfaces of Metal Oxide Thin Films, Multilayers, Nanoparticles and Nano-composites. Springer, Cham. https://doi.org/10.1007/978-3-030-74073-3_12
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