Abstract
In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of objects based on MEMS technology. This sensor is a structure of a 4 × 4 array, with metal Ag as the capacitive electrode, which forms the tactile sensing unit of the sensor. The structure of capacitive flexible tactile sensor was designed and an experimental platform was established to test the performance. The tests show that when the thickness of the intermediate layer is 2 mm and the density is medium, the sensor’s sensitivity is the best while the time of both the response and the rebound is fast.
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Acknowledgments
This work was supported in part by Science Foundation of the department of education of Jiangxi province (GJJ180938, GJJ170987, GJJ180936). Open project of Shanxi Key Laboratory of Intelligent Robot (SKLIRKF2017004).
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Yuan, D., Shu, H., Bao, Y., Xu, B., Wang, H. (2021). A Capacitive Flexible Tactile Sensor. In: Zu, Q., Tang, Y., Mladenović, V. (eds) Human Centered Computing. HCC 2020. Lecture Notes in Computer Science(), vol 12634. Springer, Cham. https://doi.org/10.1007/978-3-030-70626-5_28
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DOI: https://doi.org/10.1007/978-3-030-70626-5_28
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