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Light-Emission from Ion-Implanted Group-IV Nanostructures

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Silicon Photonics IV

Part of the book series: Topics in Applied Physics ((TAP,volume 139))

Abstract

Silicon photonics is destined to revolutionize technological areas, such as short-distance data transfer and sensing applications by combining the benefits of integrated optics with the assertiveness of silicon-based microelectronics. However, the lack of practical and low-cost silicon-based monolithic light sources such as light-emitting diodes and, in particular, lasers remains the main bottleneck for silicon photonics to become the key technology of the twenty-first century. After briefly reviewing the state of the art regarding silicon-based light-emitters, we discuss the challenges and benefits of a highly flexible approach: The epitaxial incorporation of group-IV nanostructures into crystalline silicon. We argue that a paradigm change for group-IV quantum dots (QDs) can be achieved by the intentional incorporation of extended point defects inside the QDs upon low-energy ion implantation. The superior light-emission properties from such defect-enhanced quantum dots (DEQDs), our present understanding of their structural formation and light-emission mechanisms will be discussed. We will show that useful electrically driven devices, such as light-emitting diodes (LEDs), can be fabricated employing optically active DEQD material. These LEDs exhibit exceptional temperature stability of their light-emission properties even up to 100 °C, unprecedented for purely group-IV-based optoelectronic devices. Thereafter, we will assess the superior temperature stability of the structural properties of DEQDs upon thermal annealing, the scalability of the light-emission with the DEQD density and passivation schemes to further improve the optical properties. The chapter ends with a discussion of future research directions that will spark the development of this exciting field even further.

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References

  1. D.J. Paul, Semicond. Sci. Technol. 19, R75 (2004)

    Article  ADS  Google Scholar 

  2. G. Capellini, M. De Seta, F. Evangelisti, Appl. Phys. Lett. 78, 303 (2001)

    Article  ADS  Google Scholar 

  3. G. Capellini, M. De Seta, F. Evangelisti, J. Appl. Phys. 93, 291 (2003)

    Article  ADS  Google Scholar 

  4. J.L. Gray, S. Atha, R. Hull, J.A. Floro, Nano Lett. 4, 2447 (2004)

    Article  ADS  Google Scholar 

  5. I. Berbezier, A. Ronda, Surf. Sci. Rep. 64, 47 (2009)

    Article  ADS  Google Scholar 

  6. J.N. Aqua, I. Berbezier, L. Favre, T. Frisch, A. Ronda, Phys. Rep. 522, 59 (2013)

    Article  ADS  Google Scholar 

  7. D. Grützmacher et al., Nano Lett. 7, 3150 (2007)

    Article  ADS  Google Scholar 

  8. T. Tayagaki, S. Fukatsu, Y. Kanemitsu, Phys. Rev. B 79, 041301 (2009)

    Article  ADS  Google Scholar 

  9. J.M. Amatya, J.A. Floro, Appl. Phys. Lett. 109, 193112 (2016)

    Article  ADS  Google Scholar 

  10. S. Wirths et al., Nat. Photonics 9, 88 (2015)

    Article  ADS  Google Scholar 

  11. V. Schlykow et al., Nanotechnology 29, 415702 (2018)

    Article  Google Scholar 

  12. V. Reboud et al., Appl. Phys. Lett. 111, 092101 (2017)

    Article  ADS  Google Scholar 

  13. W. Dou et al., Opt. Lett. 43, 4558–4561 (2018)

    Article  ADS  Google Scholar 

  14. A.D. Lee, J. Qi, T. Mingchu, Z. Yunyan, A.J. Seeds, H. Liu, IEEE J. Sel. Top. Quantum Electron. 19, 1701510 (2013)

    Google Scholar 

  15. S. Chen et al., Nat. Photonics 10, 307 (2016)

    Article  ADS  Google Scholar 

  16. G. Pellegrini et al., ACS Photonics 5, 3601–3607 (2018)

    Article  Google Scholar 

  17. R.W. Millar et al., Opt. Exp. 25, 25374 (2017)

    Article  ADS  Google Scholar 

  18. M. Brehm, M. Grydlik, Nanotechnology 28, 392001 (2017)

    Article  Google Scholar 

  19. M. Grydlik et al., ACS Photonics 3, 298 (2016)

    Article  Google Scholar 

  20. M. Grydlik et al., Nano Lett. 16, 6802 (2016)

    Article  ADS  Google Scholar 

  21. P. Rauter et al., ACS Photonics 5, 431 (2018)

    Article  Google Scholar 

  22. H. Groiss et al., Semicond. Sci. Technol. 32, 02LT01 (2017)

    Google Scholar 

  23. R.A. Soref, J. Schmidtchen, K. Petermann, IEEE J. Quantum Electron. 27, 1971 (1991)

    Google Scholar 

  24. L. Tsybeskov, D.J. Lockwood, Proc. IEEE 97, 1284 (2009)

    Article  Google Scholar 

  25. P. Chaisakul et al., Nat. Photonics 8, 482 (2014)

    Article  ADS  Google Scholar 

  26. B. Stern et al., Optica 2, 530 (2015)

    Article  ADS  Google Scholar 

  27. L. Zhou, A.W. Poon, Opt. Exp. 15, 9194 (2007)

    Article  ADS  Google Scholar 

  28. L.W. Luo et al., Nat. Commun. 5, 3069 (2014)

    Article  ADS  Google Scholar 

  29. G.T. Reed, G. Mashanovich, F.Y. Gardes, D.J. Thomson, Nat. Photonics 4, 518 (2010)

    Article  ADS  Google Scholar 

  30. D.C.S. Dumas et al., Opt. Exp. 22, 19284 (2014)

    Article  ADS  Google Scholar 

  31. J. Michel, J. Liu, L.C. Kimerling, Nat. Photonics 4, 527 (2010)

    Article  ADS  Google Scholar 

  32. L. Vivien et al., Opt. Exp. 20, 1096 (2012)

    Article  ADS  Google Scholar 

  33. R.A. Soref, J.P. Lorenzo, Quant. Electron. 22, 873 (1986)

    Article  ADS  Google Scholar 

  34. M.A. Green, J. Zhao, A. Wang, P.J. Reece, M. Gal, Nature 412, 805 (2001)

    Article  ADS  Google Scholar 

  35. E.Ö. Sveinbjörnsson, J. Weber Appl. Phys. Lett. 69, 2686 (1996)

    Article  ADS  Google Scholar 

  36. L. Ng, Nature 410, 192 (2001)

    Article  ADS  Google Scholar 

  37. L.T. Canham, Appl. Phys. Lett. 57, 1046 (1990)

    Article  ADS  Google Scholar 

  38. F. Priolo, T. Gregorkiewicz, M. Galli, T.F. Krauss, Nat. Nanotechn. 9, 19 (2014)

    Article  ADS  Google Scholar 

  39. S. Takeoka, M. Fujii, S. Hayashi, Phys. Rev. B 62, 16820 (2000)

    Article  ADS  Google Scholar 

  40. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franzo, F. Priolo, Nature 408, 440 (2000)

    Article  ADS  Google Scholar 

  41. J. Valenta, R. Juhasz, J. Linnros, Appl. Phys. Lett. 80, 1070 (2002)

    Article  ADS  Google Scholar 

  42. H. Ennen et al., Appl. Phys. Lett. 46, 381 (1985)

    Article  ADS  Google Scholar 

  43. Z. Fang, Q.Y. Chen, C.Z. Zhao, Opt. Laser Techn. 46, 103 (2013)

    Article  ADS  Google Scholar 

  44. H. Krzyżanowska, K.S. Ni, Y. Fu, P.M. Fauchet, Mat. Sci. Eng. B 177, 1547 (2012)

    Article  Google Scholar 

  45. A. Tengattini et al., J. Lightwave Techn. 31, 391 (2013)

    Article  ADS  Google Scholar 

  46. Y. Takahashi et al., Nature 498, 470 (2013)

    Article  ADS  Google Scholar 

  47. H. Rong et al., Nature 433, 292 (2005)

    Article  ADS  Google Scholar 

  48. M.J. Süess et al., Nat. Photonics 7, 466 (2013)

    Article  ADS  Google Scholar 

  49. J. Liu, X. Sun, R. Camacho-Aguilera, L.C. Kimerling, J. Michel, Opt. Lett. 35, 679 (2010)

    Article  ADS  Google Scholar 

  50. F.T. Armand Pilon et al., Nat. Commun. 10, 2724 (2019)

    Google Scholar 

  51. S. Bao et al., Nat. Commun. 8, 1–7 (2017)

    Article  ADS  Google Scholar 

  52. D. Stange et al., Optica 4, 185 (2017)

    Article  ADS  Google Scholar 

  53. A. Elbaz et al., Nat. Photonics 14, 375–382 (2020)

    Article  ADS  Google Scholar 

  54. E.M.T. Fadaly et al., Nature 580, 205–209 (2020)

    Article  ADS  Google Scholar 

  55. H.I.T. Hauge et al., Nano Lett. 15, 5855–5860 (2015)

    Article  ADS  Google Scholar 

  56. A.W. Fang et al., Opt. Exp. 14, 9203 (2006)

    Article  ADS  Google Scholar 

  57. M. Liao et al., IEEE J. Sel. Top. Quantum Electron. 23, 1900910 (2017)

    Article  Google Scholar 

  58. Y. Wan et al., Opt. Lett. 41, 1664 (2016)

    Article  ADS  Google Scholar 

  59. C. Cornet, Y. Léger, C. Robert, Integrated Lasers on Silicon (ISTE Press, London, UK, 2016)

    Google Scholar 

  60. V. Kveder et al., Appl. Phys. Lett. 84, 2106 (2004)

    Article  ADS  Google Scholar 

  61. A. Nikolskaya et al., Nucl. Instrum. Methods Phys. Res. Sect. B 472, 32–35 (2020)

    Article  ADS  Google Scholar 

  62. D.S. Korolev et al., J. Phys. Conf. Ser. 1410, 012152 (2019)

    Article  Google Scholar 

  63. A.A. Shklyaev, Y. Nakamura, F.N. Dultsev, M. Ichikawa, J. Appl. Phys. 105, 063513 (2009)

    Article  ADS  Google Scholar 

  64. S.M. Buckley et al., Opt. Exp. 28, 16057–16072 (2020)

    Article  ADS  Google Scholar 

  65. A.G. Nassiopoulos et al., Thin Solid Films 255, 329–333 (1995)

    Article  ADS  Google Scholar 

  66. O. Bisia, S. Ossicini, L. Pavesi, Surf. Sci. Rep. 38, 1–126 (2000)

    Article  ADS  Google Scholar 

  67. J. Valenta et al., Sci. Rep. 9, 11214 (2019)

    Article  ADS  Google Scholar 

  68. J. Heitmann, F. Müller, M. Zacharias, U. Gösele, Adv. Mater. 17, 795–803 (2005)

    Article  Google Scholar 

  69. A.J. Kenyon, Semicond. Sci. Technol. 20, R65–R84 (2005)

    Article  ADS  Google Scholar 

  70. P.A. Dmitriev et al., Nanoscale 8, 9721–9726 (2016)

    Article  ADS  Google Scholar 

  71. M. Virgilio, C.L. Manganelli, G. Grosso, T. Schroeder, G. Capellini, J. Appl. Phys. 114, 243102 (2013)

    Article  ADS  Google Scholar 

  72. M. El Kurdi et al., Appl. Phys. Lett. 108, 091103 (2016)

    Article  ADS  Google Scholar 

  73. X. Li, Z. Li, S. Li, L. Chrostowski, G. Xia, Semicond. Sci. Technol. 31, 065015 (2016)

    Article  ADS  Google Scholar 

  74. C. Xu, J. Kouvetakis, J. Menéndez, J. Appl. Phys. 125, 085704 (2019)

    Article  ADS  Google Scholar 

  75. Y. Zhou et al., ACS Photonics 6, 1434–1441 (2019)

    Article  Google Scholar 

  76. Y. Zhou et al., Optica 7, 924–928 (2020)

    Article  ADS  Google Scholar 

  77. H. Groiss et al., Sci. Rep. 7, 16114 (2017)

    Article  ADS  Google Scholar 

  78. P. Zaumseil et al., APL Mater. 6, 076108 (2018)

    Article  ADS  Google Scholar 

  79. J. Nicolas et al., Cryst. Growth Des. 20, 3493 (2020)

    Article  Google Scholar 

  80. U. Gnutzmann, K. Clausecker, Appl. Phys. 3, 9–14 (1974)

    Article  ADS  Google Scholar 

  81. Y. Qiu et al., Sci. Rep. 5, 12692 (2015)

    Article  ADS  Google Scholar 

  82. D. Liang, G. Roelkens, R. Baets, J. E. Bowers Mater. 3, 1782 (2010)

    Google Scholar 

  83. K. Tanabe, K. Watanabe, Y. Arakawa, Sci. Rep. 2, 349 (2012)

    Article  ADS  Google Scholar 

  84. E. Menard, K.J. Lee, D.-Y. Khang, R.G. Nuzzo, J.A. Rogers, Appl. Phys. Lett. 84, 5398–5400 (2004)

    Article  ADS  Google Scholar 

  85. Z. Wang et al., Laser Photonics Rev. 11, 1700063 (2017)

    Article  ADS  Google Scholar 

  86. J. Zhang et al., APL Photonics 4, 110803 (2020)

    Article  Google Scholar 

  87. S. Pan et al., J. Semiconductors 40, 101302 (2019)

    Article  ADS  Google Scholar 

  88. Q. Feng et al., Appl. Sci. 9, 385 (2019)

    Article  Google Scholar 

  89. C. Hantschmann et al., J. Lightwave Technol. 38, 4801 (2020)

    Article  ADS  Google Scholar 

  90. R. Chen et al., Nat. Photonics 5, 170 (2011)

    Article  ADS  Google Scholar 

  91. G. Koblmüller, B. Mayer, T. Stettner, G. Abstreiter, J.J. Finley, Semicond. Sci. Technol. 32, 053001 (2017)

    Article  ADS  Google Scholar 

  92. T. Stettner et al., ACS Photonics 4, 2537–2543 (2017)

    Article  Google Scholar 

  93. J. Bissinger, D. Ruhstorfer, T. Stettner, G. Koblmüller, J.J. Finley, J. Appl. Phys. 125, 243102 (2019)

    Article  ADS  Google Scholar 

  94. S. Conesa-Boj et al., Nano Lett. 14, 326–332 (2014)

    Article  ADS  Google Scholar 

  95. T. Frost et al., Nano Lett. 14, 4535–4541 (2014)

    Article  ADS  Google Scholar 

  96. Z. Wang et al., Nat. Photonics 9, 837 (2015)

    Article  ADS  Google Scholar 

  97. J. Van Campenhout et al., Opt. Exp. 15, 6744 (2007)

    Article  ADS  Google Scholar 

  98. Y. Shi et al., Optica 4, 1468–1473 (2017)

    Article  ADS  Google Scholar 

  99. Y. Han et al., Optica 7, 148 (2020)

    Article  ADS  Google Scholar 

  100. Y. Xue et al., Opt. Exp. 28, 18172 (2020)

    Article  ADS  Google Scholar 

  101. J.R. Reboul, L. Cerutti, J.B. Rodriguez, P. Grech, E. Tournié, Appl. Phys. Lett. 99, 121113 (2011)

    Article  ADS  Google Scholar 

  102. M.R. Calvo et al., Optica 7, 263–266 (2020)

    Article  ADS  Google Scholar 

  103. Y. Sun et al., Light Sci. Appl. 7, 13 (2018)

    Google Scholar 

  104. J. Wang et al., Photonics Res. 7, B32–B35 (2019)

    Article  Google Scholar 

  105. P.D. Kanungo et al., Nanotechnology 24, 225304 (2013)

    Article  ADS  Google Scholar 

  106. M. Borg et al., Nano Lett. 14, 1914–1920 (2014)

    Article  ADS  Google Scholar 

  107. H. Schmid et al., Appl. Phys. Lett. 106, 233101 (2015)

    Article  ADS  Google Scholar 

  108. B.F. Mayer et al., IEEE Photonics Technol. Lett. 31, 1021–1024 (2019)

    Article  ADS  Google Scholar 

  109. Z.I. Alferov, Rev. Mod. Phys. 73, 767 (2001)

    Article  ADS  Google Scholar 

  110. https://www.statista.com/statistics/266973/global-semiconductor-sales-since-1988/

  111. Y.-W. Mo, D.E. Savage, B.S. Swartzentruber, M.G. Lagally, Phys. Rev. Lett. 65, 1020 (1990)

    Article  ADS  Google Scholar 

  112. D.J. Eaglesham, M. Cerullo, Phys. Rev. Lett. 64, 1943 (1990)

    Article  ADS  Google Scholar 

  113. F. Hackl et al., Nanotechnology 22, 165302 (2011)

    Article  ADS  Google Scholar 

  114. L. Vescan et al., Appl. Phys. A 71, 423 (2000)

    Article  ADS  Google Scholar 

  115. D. Pachinger et al., Appl. Phys. Lett. 91, 23 (2007)

    Article  Google Scholar 

  116. L. Persichetti et al., Surf. Sci. 683, 31–37 (2019)

    Article  ADS  Google Scholar 

  117. A.V. Novikov, M.V. Shaleev, D.V. Yurasov, P.A. Yunin, Semiconductors 50, 1630 (2016)

    Article  ADS  Google Scholar 

  118. M. Abbarchi et al., ACS Nano. 8, 11181–11190 (2014)

    Article  Google Scholar 

  119. V. Poborchii et al., Nanotechnology 31, 195602 (2020)

    Article  ADS  Google Scholar 

  120. G. Niu et al., Sci. Rep. 6, 22709 (2016)

    Article  ADS  Google Scholar 

  121. N. Motta et al., Mater. Sci. Eng. B 88, 264–268 (2002)

    Article  Google Scholar 

  122. C. Ishii, Y. Shigeta, Thin Solid Films 709, 138007 (2020)

    Article  ADS  Google Scholar 

  123. D. Rainko et al., Sci. Rep. 8, 15557 (2018)

    Article  ADS  Google Scholar 

  124. I.N. Stranski, L. Krastanow, Monatsh. Chem. 71, 351–364 (1937)

    Article  Google Scholar 

  125. B. Voigtländer, Surf. Sci. Rep. 43, 127–254 (2001)

    Article  ADS  Google Scholar 

  126. C. Teichert, Phys. Rep. 365, 335–432 (2002)

    Article  ADS  Google Scholar 

  127. G. Costantini et al., J. Cryst. Growth 278, 38–45 (2005)

    Article  ADS  Google Scholar 

  128. J. Zhang, M. Brehm, M. Grydlik, O.G. Schmidt, Chem. Soc. Rev. 44, 26–39 (2015)

    Article  Google Scholar 

  129. M. Strassburg et al., Appl. Phys. Lett. 76, 685 (2000)

    Article  ADS  Google Scholar 

  130. E. Dimakis et al., J. Appl. Phys. 97, 113520 (2005)

    Article  ADS  Google Scholar 

  131. S.G. Corcoran, G.S. Chakarova, K. Sieradzki, Phys. Rev. Lett. 71, 1585 (1993)

    Article  ADS  Google Scholar 

  132. S. Haq, J. Harnett, A. Hodgson, Surf. Sci. 505, 171 (2002)

    Article  ADS  Google Scholar 

  133. G. Medeiros-Ribeiro, A.M. Bratkovski, T.I. Kamins, D.A.A. Ohlberg, R.S. Williams, Science 279, 353 (1998)

    Article  ADS  Google Scholar 

  134. E. Sutter, P. Sutter, J.E. Bernard, Appl. Phys. Lett. 84, 2262 (2004)

    Article  ADS  Google Scholar 

  135. M. Brehm, H. Lichtenberger, T. Fromherz, G. Springholz, Nanoscale Res. Lett. 6, 70 (2011)

    Article  ADS  Google Scholar 

  136. A. Vailionis et al., Phys. Rev. Lett. 85, 3672 (2000)

    Article  ADS  Google Scholar 

  137. A. Rastelli, H. von Känel, Surf. Sci. 532–535, 769–773 (2003)

    Article  ADS  Google Scholar 

  138. M. Brehm et al., Phys. Rev. B 80, 205321 (2009)

    Article  ADS  Google Scholar 

  139. M.R. McKay, J.A. Venables, J. Drucker, Phys. Rev. Lett. 101, 216104 (2008)

    Article  ADS  Google Scholar 

  140. M. Brehm et al., J. Appl. Phys. 109, 123505 (2011)

    Article  ADS  Google Scholar 

  141. T.U. Schülli et al., Phys. Rev. Lett. 90, 066105 (2003)

    Article  ADS  Google Scholar 

  142. A. Rastelli et al., Nano Lett. 8, 1404 (2008)

    Article  ADS  Google Scholar 

  143. M. Brehm et al., Nanoscale Res. Lett. 5, 1868 (2010)

    Article  ADS  Google Scholar 

  144. F. Hackl et al., Ann. Phys. 531, 1800259 (2019)

    Article  Google Scholar 

  145. C. Georgiou, T. Leontiou, P.C. Kelires, AIP Adv. 4, 077135 (2014)

    Article  ADS  Google Scholar 

  146. P. Klenovský et al., Phys. Rev. B 86, 115305 (2012)

    Article  ADS  Google Scholar 

  147. G. Capellini, M. De Seta, L. Di Gaspare, F. Evangelisti, F. d’Acapito, J. Appl. Phys. 98, 124901 (2005)

    Article  ADS  Google Scholar 

  148. A. Rastelli, E. Müller, H. von Känel, Appl. Phys. Lett. 80, 1438 (2002)

    Article  ADS  Google Scholar 

  149. O.G. Schmidt, U. Denker, K. Eberl, O. Kienzle, F. Ernst, Appl. Phys. Lett. 77, 2509 (2000)

    Article  ADS  Google Scholar 

  150. M. Brehm et al., Nanotechnology 26, 225202 (2015)

    Article  ADS  Google Scholar 

  151. A. Rastelli, M. Kummer, H. von Känel, Phys. Rev. Lett. 87, 256101 (2001)

    Article  ADS  Google Scholar 

  152. F. Montalenti et al., Phys. Rev. Lett. 93, 216102 (2004)

    Article  ADS  Google Scholar 

  153. J. Stangl, V. Holý, G. Bauer, Rev. Mod. Phys. 76, 725 (2004)

    Article  ADS  Google Scholar 

  154. A.F. Zinovieva et al., Sci. Rep. 10, 9308 (2020)

    Article  ADS  Google Scholar 

  155. O.G. Schmidt, K. Eberl, Y. Rau, Phys. Rev. B 62, 16715 (2000)

    Article  ADS  Google Scholar 

  156. J.M. Baribeau, N.L. Rowell, D.J. Lockwood, Nanoscale Materials (Springer, New York, 2006), pp. 1–52

    Google Scholar 

  157. M. Brehm et al., New J. Phys. 11, 063021 (2009)

    Article  ADS  Google Scholar 

  158. R.O. Rezaev, S. Kiravittaya, V.M. Fomin, A. Rastelli, O.G. Schmidt, Phys. Rev. B 82, 153306 (2010)

    Article  ADS  Google Scholar 

  159. M. Grydlik, G. Langer, T. Fromherz, F. Schäffler, M. Brehm, Nanotechnology 24, 105601 (2013)

    Article  ADS  Google Scholar 

  160. A.V. Dvurechenskii et al., Phys. Stat. Sol. C 14, 1700187 (2017)

    Google Scholar 

  161. M. Grydlik et al., Phys. Rev. B 88, 115311 (2013)

    Article  ADS  Google Scholar 

  162. J. Xia, Y. Ikegami, Y. Shiraki, N. Usami, Y. Nakata, Appl. Phys. Lett. 89, 201102 (2006)

    Article  ADS  Google Scholar 

  163. X. Xu et al., IEEE J. Sel. Top. Quantum Electron. 18, 1830 (2012)

    Article  ADS  Google Scholar 

  164. N. Hauke et al., New J. Phys. 14, 083035 (2012)

    Article  ADS  Google Scholar 

  165. T. Tsuboi et al., Appl. Phys. Exp. 5, 052101 (2012)

    Article  ADS  Google Scholar 

  166. J.S. Xia, Y. Takeda, N. Usami, T. Maruizumi, Y. Shiraki, Opt. Exp. 18, 13945 (2010)

    Article  ADS  Google Scholar 

  167. M. Schatzl et al., ACS Phot. 4, 665 (2017)

    Article  Google Scholar 

  168. A. Simbula et al., APL Photonics 2, 056102 (2017)

    Article  ADS  Google Scholar 

  169. A.I. Yakimov, V.V. Kirienko, A.V. Dvurechenskii, Opt. Mat. Exp. 8, 3479 (2018)

    Article  Google Scholar 

  170. V. Schlykow et al., Nanotechnology 31, 345203 (2020)

    Article  Google Scholar 

  171. T.I. Kamins, R.S. Williams, Appl. Phys. Lett. 71, 1201 (1997)

    Article  ADS  Google Scholar 

  172. P.D. Szkutnik, A. Sgarlata, S. Nufris, N. Motta, A. Balzarotti, Phys. Rev. B 69, 201309 (2004)

    Article  ADS  Google Scholar 

  173. J.K. Murphy et al., J. Vac. Sci. Technol. B 29, 011029 (2011)

    Article  Google Scholar 

  174. A. Karmous et al., Appl. Phys. Lett. 85, 6401–6403 (2004)

    Article  ADS  Google Scholar 

  175. Y.J. Ma et al., J. Phys. D Appl. Phys. 47, 485303 (2014)

    Article  Google Scholar 

  176. J.J. Zhang et al., Phys. Rev. Lett. 105, 166102 (2010)

    Article  ADS  Google Scholar 

  177. F. Pezzoli, M. Stoffel, T. Merdzhanova, A. Rastelli, O.G. Schmidt, Nanoscale Res. Lett. 4, 1073 (2009)

    Article  ADS  Google Scholar 

  178. M. Grydlik et al., Appl. Phys. Lett. 106, 251904 (2015)

    Article  ADS  Google Scholar 

  179. J. Ziegler, M. Ziegler, J. Biersack, Nucl. Instrum. Methods Phys. Res. Sect. B 268, 1818 (2010)

    Google Scholar 

  180. G. Davies, Phys. Rep. 176, 83–188 (1989)

    Article  ADS  Google Scholar 

  181. L. Ouyang et al., Opt. Exp. 26, 15899 (2018)

    Article  ADS  Google Scholar 

  182. A. Shakoor et al., Physica B 407, 4027–4031 (2012)

    Article  ADS  Google Scholar 

  183. S. Facsko et al., Science 285, 1551–1553 (1999)

    Article  Google Scholar 

  184. T. Bobek et al., Phys. Rev. B 68, 085324 (2003)

    Article  ADS  Google Scholar 

  185. K.J. Kirkby, R.P. Webb, Encyclopedia of Nanoscience and Nanotechnology, edited by H.S. Nalwa, vol. 4. (American Scientific, Valecia, USA, 2004), pp. 283–291

    Google Scholar 

  186. N. Chekurov, K. Grigoras, A. Peltonen, S. Franssila, I. Tittonen, Nanotechnology 20, 065307 (2009)

    Article  ADS  Google Scholar 

  187. L. Spindlberger, S. Prucnal, J. Aberl, M. Brehm, Physica Status Solidi (a) 216, 1900307 (2019)

    Article  ADS  Google Scholar 

  188. L. Spindlberger et al., Crystals 10, 351 (2020)

    Article  Google Scholar 

  189. R.S. Averback, T.D. de la Rubia, Solid State Phys. 51, 281–402 (1997)

    Article  Google Scholar 

  190. G. Carter, W.A. Grant, Ion Implantation of Semiconductors. (London Edward Arnold Ltd. 1976), pp. 1976 1−214

    Google Scholar 

  191. J.S. Williams, Nucl. Instrum. Methods Phys. Res. 209, 219–228 (1983)

    Article  ADS  Google Scholar 

  192. P.E. Blöchl et al., Phys. Rev. Lett. 70, 2435 (1993)

    Article  ADS  Google Scholar 

  193. A.J.R. da Silva, A. Janotti, A. Fazzio, R.J. Baierle, R. Mota, Phys. Rev. B 62, 9903 (2000)

    Article  ADS  Google Scholar 

  194. M. Dionízio Moreira, R.H. Miwa, P. Venezuela, Phys. Rev. B 70, 115215 (2004)

    Google Scholar 

  195. P. Giannozzi et al., J. Phys. Condens. Matter 21, 395502 (2009)

    Article  Google Scholar 

  196. F. Murphy-Armando et al., Phys. Rev. B 103, 085310 (2021)

    Google Scholar 

  197. E.-K. Lee et al., Phys. Rev. B 80, 049904 (2009)

    Article  ADS  Google Scholar 

  198. B. Julsgaard, P. Balling, J.L. Hansen, A. Svane, A.N. Larsen, Nanotechnology 22, 435401 (2011)

    Article  Google Scholar 

  199. E.C. Le Ru, J. Fack, R. Murray, Phys. Rev. B 67, 245318 (2003)

    Article  ADS  Google Scholar 

  200. M.W. Dashiell, U. Denker, O.G. Schmidt, Appl. Phys. Lett. 79, 2261 (2001)

    Article  ADS  Google Scholar 

  201. T. Brunhes et al., Appl. Phys. Lett. 77, 1822 (2000)

    Article  ADS  Google Scholar 

  202. D.N. Lobanov et al., Semiconductors 46, 1418–1422 (2012)

    Article  ADS  Google Scholar 

  203. H. Takeuchi, A. Wung, X. Sun, R.T. Howe, T.-J. King, IEEE Trans. Electron. Dev. 52, 2081–2086 (2005)

    Article  ADS  Google Scholar 

  204. H. Xiao, Introduction to Semiconductor Manufacturing Technology (Prentice-Hall, Upper Saddle River, NJ, USA, 2001)

    Google Scholar 

  205. E. Cartier, J.H. Stathis, D.A. Buchanan, Appl. Phys. Lett. 63, 1510 (1993)

    Article  ADS  Google Scholar 

  206. S. Wang et al., Sol. Energ. Mater. Sol. Cells 193, 403–410 (2019)

    Article  Google Scholar 

  207. S. Fujimori, R. Nagai, M. Ikeda, K. Makihara, S. Miyazaki, Jpn. J. Appl. Phys. 58, SIIA01 (2019)

    Google Scholar 

  208. G. Davies, Phys. Rep. 176, 83–188 (1989)

    Google Scholar 

  209. B. Hallam et al., Phys. Status Solidi A 214, 1700305 (2017)

    Article  ADS  Google Scholar 

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Acknowledgements

I would like to use this opportunity to gratefully thank the main mentors in my scientific career, Günther Bauer, Friedrich Schäffler, Thomas Fromherz and Armando Rastelli. This work was funded by the Austrian Science Fund (FWF): Y1238-N36, P29137-N36. Funding was also provided by the EU H2020 QuantERA ERA-NET via the Quantum Technologies project CUSPIDOR, which is co-funded by FWF(I3760) and the Linz Institute of Technology (LIT): LIT-2019-7-SEE-114.

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Brehm, M. (2021). Light-Emission from Ion-Implanted Group-IV Nanostructures. In: Lockwood, D.J., Pavesi, L. (eds) Silicon Photonics IV. Topics in Applied Physics, vol 139. Springer, Cham. https://doi.org/10.1007/978-3-030-68222-4_2

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