Abstract
Acoustic emission (AE) monitoring in laser micro-/nanofabrication detects audible or ultrasonic emissions generated during laser processing of materials. This chapter introduces the physical phenomena of laser-generated acoustic emission signals with pulsed lasers in the thermoelastic and the ablative regimes. AE detection methods, including the use of wideband microphones, piezoelectric AE transducers, acoustic mirror/nozzles, interferometer, and optical microphones, are presented. A data processing approach, K-means clustering analysis, is introduced, which can be used to reveal the underlying information from raw AE signals to understand the status of the laser-material interaction processes. Typical applications of AE monitoring during laser micro-/nanofabrication processes are presented, which show that AE monitoring techniques are suitable for detecting defects, focus positions, and laser ablation rates in real time during the laser fabrication processes.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Amira N, Saiful A, Shahidan S, Abdullah SR (2017) A preliminary study application clustering system in acoustic emission monitoring. MATEC Web Conf 103:02027
Bastuck M, Herrmann H, Wolter B, Zinn P, Zaeh R (2015) Acoustic in-process monitoring of laser welding. 410. https://doi.org/10.2351/1.5063193
Davies SJ, Edwards C, Taylor GS, Palmer SB (1993) Laser-generated ultrasound: its properties, mechanisms and multifarious applications. J Phys D Appl Phys 26:329–348. https://doi.org/10.1088/0022-3727/26/3/001
Dewhurs RJ, Shan Q (1999) Optical remote measurement of ultrasound. Meas Sci Technol 10:R139
Fischer B, Rohringer W, Panzer N, Hecker S (2017) Acoustic process control for laser material processing optical microphone as a novel “ear” for industrial manufacturing. Laser Tech J 14(5):21–25. https://doi.org/10.1002/latj.201700029
Gaja H, Liou F (2017) Defects monitoring of laser metal deposition using acoustic emission sensor. Int J Adv Manuf Technol 90:561–574. https://doi.org/10.1007/s00170-016-9366-x
Gusarov AV, Smurov I (2011) Gas-dynamic boundary conditions of evaporation and condensation: numerical analysis of the Knudsen layer. 4242. https://doi.org/10.1063/1.1516211
Gutkin R, Green CJ, Vangrattanachai S, Pinho ST, Robinson P, Curtis PT (2011) On acoustic emission for failure investigation in CFRP: pattern recognition and peak frequency analyses. Mech Syst Signal Process 25:1393–1407. https://doi.org/10.1016/j.ymssp.2010.11.014
Hariharan P (1992) Chapter 5 multiple-beam interference. In: Basics of interferometry. Academic, pp 37–43. https://doi.org/10.1016/B978-0-08-091861-7.50010-3
Hébert H, Vidal F, Martin F, Kieffer JC, Nadeau A, Johnston TW, Blouin A, Moreau A, Monchalin JP (2005) Ultrasound generated by a femtosecond and a picosecond laser pulse near the ablation threshold. J Appl Phys 98. https://doi.org/10.1063/1.1999827
Hong MH, Lu Y, Chong TC (2002) Diagnostics and real-time monitoring of pulsed laser ablation. Second Int Symp Laser Precis Microfabr 4426:51. https://doi.org/10.1117/12.456861
Hutchins DA (1988) Ultrasonic generation by pulsed lasers. In: Physical acoustics. Academic, New York. https://doi.org/10.1016/B978-0-12-477918-1.50008-4
Kacaras A, Bächle M, Schwabe M, Zanger F, León FP, Schulze V (2019) Acoustic emission-based characterization of focal position during ultra-short pulse laser ablation. Procedia CIRP 81:270–275. https://doi.org/10.1016/j.procir.2019.03.047
Koester LW, Taheri H, Bigelow TA, Bond LJ, Faierson EJ (2018) In-situ acoustic signature monitoring in additive manufacturing processes. AIP Conf Proc 1949. https://doi.org/10.1063/1.5031503
Li L (2002) A comparative study of ultrasound emission characteristics in laser processing. Appl Surf Sci 186:604–610. https://doi.org/10.1016/S0169-4332(01)00695-X
Li L, Steen WM (1993) Non-contact acoustic emission monitoring during laser processing. LIA (Laser Inst Am) 75:719–728. https://doi.org/10.2351/1.5058543
Lifshitz EM, Kosevich AM, Pitaevskii LP (1986) Theory of elasticity, Chapter III – elastic waves. In: Lifshitz EM, Kosevich AM, Pitaevskii L.P.B.T.-T. of E. (Third E.) (eds) Butterworth-Heinemann, Oxford, pp 87–107. https://doi.org/10.1016/B978-0-08-057069-3.50010-3
Liu G (1982) Theory of the photoacoustic effect in condensed matter. Appl Opt 21:955–960. https://doi.org/10.1364/AO.21.000955
Liu G, Ng C (2015) Monitoring of excimer laser ablation of multi-layer thin films by acoustic emission. Industrial Research Institute Swinburne (IRIS), Swinburne University of Technology, Melbourne, pp 228–235
Liu G, Harvey EC, Toncich DJ, Hayes JP, Ng CK, Jin H, Solomon M (2002) Real-time monitoring of excimer laser ablation of multilayer thin films by detecting acoustic emission. Nano Microtechnol Mater Process Packag Syst 4936:146. https://doi.org/10.1117/12.469427
Lyamshev LM (1981) Optoacoustic sources of sound. Sov Phys Uspekhi 24:977–995. https://doi.org/10.1070/pu1981v024n12abeh004757
Manzo AJ, Helvajian H (2017) Pulsed laser ultrasonic excitation and heterodyne detection for in situ process control in laser 3D manufacturing. J Laser Appl 29:012012. https://doi.org/10.2351/1.4967366
Murray TW, Wagner JW (1998) Thermoelastic and ablative generation of ultrasound: source effects. Rev Prog Quant Nondestruct Eval 17:619–625. https://doi.org/10.1007/978-1-4615-5339-7_80
Pezeril T (2016) Laser generation and detection of ultrafast shear acoustic waves in solids and liquids. Opt Laser Technol 83:177–188. https://doi.org/10.1016/j.optlastec.2016.03.019
Pezeril T, Ruello P, Gougeon S, Chigarev N, Mounier D, Breteau J, Picart P, Gusev V (2007) Generation and detection of plane coherent shear picosecond acoustic pulses by lasers: experiment and theory laser metallic film. Phys Rev B 75:174307. https://doi.org/10.1103/PhysRevB.75.174307
Ready JF (1971) Chapter 4 – laser-Induced particle emission. In: Ready J.F.B.T.-E. of H.-P.L.R. (ed) Academic, pp 127–211. https://doi.org/10.1016/B978-0-12-583950-1.50009-X
Rousseeuw PJ (1987) Silhouettes: a graphical aid to the interpretation and validation of cluster analysis. J Comput Appl Math 20:53–65
Sarrafzadeh A, Churchill RJ, Niimura M G (1988) Laser generated ultrasound. In: Acousto-ultrasonics. Springer US, Springer, pp 201–207. https://doi.org/10.1007/978-1-4757-1965-9_15
Schneider D (2018) Laser-induced surface acoustic waves for material testing BT. In: Ida N, Meyendorf N (eds) Handbook of advanced non-destructive evaluation. Springer International Publishing, Cham, pp 1–63. https://doi.org/10.1007/978-3-319-30050-4_38-1
Scruby C, Drain L (1990) Laser ultrasonics techniques and applications. Taylor & Francis Group, New York
Shao J, Yan Y (2005) Review of techniques for on-line monitoring and inspection of laser welding. J Phys Conf Ser 15:101–107. https://doi.org/10.1088/1742-6596/15/1/017
Shiosaki T, Masuda H, Adachi M, Kawabata A (1987) Detection and application of acoustic emission in laser-enhanced chemical etching. Jpn J Appl Phys 26:230–232. https://doi.org/10.7567/JJAPS.26S1.230
Sinharay S (2010) An overview of statistics in education. In: Peterson P, Baker E, McGaw B.B.T.-I.E. of E. (Third E.) (eds) International encyclopedia of education, 3rd edn. Elsevier, Oxford, pp. 1–11. https://doi.org/10.1016/B978-0-08-044894-7.01719-X
Vanlanduit S, Guillaume P, Van Der Linden G (2003) On-line monitoring of fatigue cracks using ultrasonic surface waves. NDT E Int 36:601–607. https://doi.org/10.1016/S0963-8695(03)00082-3
You A, Be MAY, In I (2001) Wavelet analysis of acoustic emission signals and quality control in laser welding. J Laser Appl 13:167
Zhu S, Hong M, Koh ML, Lu Y (2002) Laser ablation of Si in water and ambient air. Second Int Symp Laser Precis Microfabr 4426:39. https://doi.org/10.1117/12.456836
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Section Editor information
Rights and permissions
Copyright information
© 2021 Springer Nature Switzerland AG
About this entry
Cite this entry
Wei, C., Li, L. (2021). Acoustic Emission and Ultrasound Monitoring in Laser Micro/Nanofabrication. In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-030-63647-0_47
Download citation
DOI: https://doi.org/10.1007/978-3-030-63647-0_47
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-63646-3
Online ISBN: 978-3-030-63647-0
eBook Packages: Physics and AstronomyReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics