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Influence of Nitrogen Partial Pressure on the Structural, and Mechanical Properties of Ti-N Thin Films

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Proceedings of the 4th International Symposium on Materials and Sustainable Development (ISMSD 2019)

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Abstract

Modern technologies based on the exploitation of the typical thin film properties (adhesion, thermal stability, low porosity, desirable stoichiometry), have strongly developed to become one of the most essential industrial interests during recent years. TiN coatings, for example, usually used to edge retention and corrosion resistance on machine tools besides, it discovered applications in the nuclear industry as hard facing material mainly due to its high thermal stability. This work aims to develop and characterize, titanium nitride thin films deposited by the magnetron sputtering method on silicon and XC100 steel substrates, containing 1% wt. of carbon, under (N2 and Ar) mixed atmosphere. The influence of nitrogen concentration on the structural, mechanical and tribological properties of the coatings was determined by EDS, DRX, AFM, MEB, Nano-indentation and alternative tribometer test. By varying the nitrogen flow rate from 0 to 20 sccm, it’s thus formed a titanium nitrides mixture (Ti2N and TiN). The study’s interest in the mechanical behavior of titanium nitride films on this steel type, and in this range of nitrogen percentage, is particularly because the obtained hardness, and adhesion in this area are extremely important. Also, the deposited titanium thin films on the XC100 steel show that the hardness achievement in the inter-critical area is as important as that obtained in the uncoated XC100 due to the change in the phase’s proportion.

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Author information

Authors and Affiliations

  1. Mater Science Department, ABBES Laghrour University, P. O 1252, 40004, Khenchela, Algeria

    F. Salhi & L. Aissani

  2. Laboratory of Active Components and Materials, Larbi Ben M’Hidi. University, 04000, Oum El Bouaghi, Algeria

    L. Aissani

  3. La.Bo.Ma.P. ENSAM, Rue Porte de Paris, 71250, Cluny, France

    C. Nouveu

  4. ICD – LASMIS, Université de Technologie de Troyes. Antenne de Nogent, Pôle Technologique de Sud Champagne 26, Rue Lavoisier, 52800, Nogent, France

    A. Alhussein

Authors
  1. F. Salhi
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  2. L. Aissani
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  3. C. Nouveu
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  4. A. Alhussein
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Corresponding author

Correspondence to F. Salhi .

Editor information

Editors and Affiliations

  1. Faculté de Technologie, Université M'hamed Bougara Boumerdes, Boumerdès, Algeria

    Brahim Safi

  2. Université M'hamed Bougara Boumerdes, Boumerdès, Algeria

    Abdelhakim Daoui

  3. Université M'hamed Bougara Boumerdes, Boumerdès, Algeria

    Hamza Mechakra

  4. Université M'hamed Bougara Boumerdes, Boumerdès, Algeria

    Youcef Ghernouti

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Salhi, F., Aissani, L., Nouveu, C., Alhussein, A. (2020). Influence of Nitrogen Partial Pressure on the Structural, and Mechanical Properties of Ti-N Thin Films. In: Safi, B., Daoui, A., Mechakra, H., Ghernouti, Y. (eds) Proceedings of the 4th International Symposium on Materials and Sustainable Development. ISMSD 2019. Springer, Cham. https://doi.org/10.1007/978-3-030-43211-9_17

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