Abstract
This chapter provides fundamental optical properties of β-Ga2O3. Valence band ordering was investigated by polarized transmittance and reflectance measurements. Anisotropic optical properties were also investigated by spectroscopic ellipsometry measurements. The optical anisotropy in a biaxial crystal as well as the gradual increase in the absorption coefficient were recognized as origins of the scattering in optical bandgap energies in a range 4.5–5.0 eV. Temperature-dependent exciton resonance energies were studied by using polarized reflectance measurement. The large changes in the exciton resonance energies with temperature were found to be originated from the exciton—longitudinal optical phonon interaction. Correlation between blue luminescence (BL) intensity and formation energy of oxygen vacancy (VO) was found by measuring temperature-dependent cathodoluminescence spectra. Suppression of the BL band in the heavily nitrogen-doped epitaxial films was shown as an evidence for the decrease in the VO concentration by N-doping and resultant high resistivity in the N-doped epitaxial films.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
S. Geller, J. Chem. Phys. 33, 676 (1960)
H.H. Tippins, Phys. Rev. 140, A316 (1965)
T. Matsumoto, M. Aoki, A. Kinoshita, T. Aono, Jpn. J. Appl. Phys. 13, 1578 (1974)
N. Ueda, H. Hosono, R. Waseda, H. Kawazoe, Appl. Phys. Lett. 71, 933 (1997)
M. Passlack, E.F. Schubert, W.S. Hobson, M. Hong, N. Moriya, S.N.G. Chu, K. Konstadinidis, J.P. Mannaerts, M.L. Schnoes, G.J. Zydzik, J. Appl. Phys. 77, 686 (1995)
M. Orita, H. Ohta, M. Hirano, H. Hosono, Appl. Phys. Lett. 77, 4166 (2000)
E.G. Víllora, K. Shimamura, K. Kitamura, K. Aoki, Appl. Phys. Lett. 88, 031105 (2006)
T. Oshima, T. Okuno, S. Fujita, Jpn. J. Appl. Phys. 46, 7217 (2007)
L. Binet, D. Gourier, C. Minot, J. Solid State Chem. 113, 420 (1994)
T. Onuma, S. Saito, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, M. Higashiwaki, Jpn. J. Appl. Phys. Part 1 54, 112601 (2015)
C. Sturm, J. Furthműller, F. Bechstedt, R. Schmidt-Grund, M. Grundmann, APL Mater. 3, 106106 (2015)
C. Sturm, R. Schmidt-Grund, C. Kranert, J. Furthműller, F. Bechstedt, M. Grundmann, Phys. Rev. B 94, 035148 (2016)
A. Mock, R. Korlacki, C. Briley, V. Darakchieva, B. Monemar, Y. Kumagai, K. Goto, M. Higashiwaki, M. Schubert, Phys. Rev. B 96, 245205 (2017)
K. Yamaguchi, Solid State Commun. 131, 739 (2004)
H. He, M.A. Blanco, R. Pandey, Appl. Phys. Lett. 88, 261904 (2006)
H. He, R. Orlando, M.A. Blanco, R. Pandey, E. Amzallag, I. Baraille, M. Rérat, Phys. Rev. B 74, 195123 (2006)
J.B. Varley, J.R. Weber, A. Janotti, C.G. Van de Walle, Appl. Phys. Lett. 97, 142106 (2010) [108, 039901 (2016)]
J.B. Varley, A. Schleife, Semicond. Sci. Technol. 30, 024010 (2015)
H. Peelaers, C.G. Van de Walle, Phys. Status Solidi B 252, 828 (2015)
J. Furthműller, F. Bechstedt, Phys. Rev. B 93, 115204 (2016)
K.A. Mengle, G. Shi, D. Bayerl, E. Kioupakis, Appl. Phys. Lett. 109, 212104 (2016)
T. Harwig, F. Kellendonk, S. Slappendel, J. Phys. Chem. Solids 39, 675 (1978)
T. Harwig, F. Kellendonk, J. Solid State Chem. 24, 255 (1978)
L. Binet, J. Gourier, J. Phys. Chem. Solids 59, 1241 (1998)
E.G. Víllora, T. Atou, T. Sekiguchi, T. Sugawara, M. Kikuchi, T. Fukuda, Solid State Commun. 120, 455 (2001)
K. Shimamura, E.G. Víllora, T. Ujiie, K. Aoki, Appl. Phys. Lett. 92, 201914 (2008)
T. Onuma, S. Fujioka, T. Yamaguchi, M. Higashiwaki, K. Sasaki, T. Masui, T. Honda, Appl. Phys. Lett. 103, 041910 (2013)
S. Yamaoka, M. Nakayama, Phys. Status Solidi C 13, 93 (2016)
S. Yamaoka, Y. Furukawa, M. Nakayama, Phys. Rev. B 95, 094304 (2017)
J.B. Verley, A. Janotti, C. Franchini, C.G. Van de Walle, Phys. Rev. B 85, 081109 (2012)
T.G. Castner, W. Könzig, J. Phys. Chem. Solids 3, 178 (1957)
Y. Toyozawa, Optical Process in Solids (Cambridge University Press, Cambridge, 2003)
T. Onuma, Y. Nakata, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, A. Kuramata, S. Yamakoshi, M. Higashiwaki, J. Appl. Phys. 124, 075103 (2018)
Z. Zhang, E. Farzana, A.R. Arehart, S.A. Ringel, Appl. Phys. Lett. 108, 052105 (2016)
Y. Nakano, ECS J. Solid State Sci. Technol. 6, P615 (2017)
T. Onuma, S. Saito, K. Sasaki, T. Masui, T. Yamaguchi, T. Honda, A. Kuramata, M. Higashiwaki, Jpn. J. Appl. Phys. 55, 1202B2 (2016)
T. Onuma, S. Saito, K. Sasaki, K. Goto, T. Masui, T. Yamaguchi, T. Honda, A. Kuramata, M. Higashiwaki, Appl. Phys. Lett. 108, 101904 (2016)
E.G. Víllora, K. Shimamura, Y. Yoshikawa, K. Aoki, N. Ichinose, J. Cryst. Growth 270, 420 (2004)
A. Kuramata, K. Koshi, S. Watanabe, Y. Yamaoka, T. Masui, S. Yamakoshi, Jpn. J. Appl. Phys. 55 1202A2 (2016)
Y. Nakata, T. Kamimura, A. Kuramata, S. Yamakoshi, M. Higashiwaki, in 65th The Japan Society of Applied Physics Spring Meeting, 2018, No. 19p-P11-18 [in Japanese]
T. Kamimura, Y. Nakata, A. Kuramata, S. Yamakoshi, M. Higashiwaki, 2nd International Workshop on Gallium Oxide and Related Materials, Parma, Italy, September 13 (2017), No. O2
M.H. Wong, C.-H. Lin, A. Kuramata, S. Yamakoshi, H. Murakami, Y. Kumagai, M. Higashiwaki, Appl. Phys. Lett. 113, 102103 (2018)
M.H. Wong, K. Goto, H. Murakami, Y. Kumagai, M. Higashiwaki, IEEE Electron Device Lett. 40, 431 (2019)
P. Hovington, D. Drouin, R. Gauvin, Scanning 19, 1 (1997)
D. Drouin, A.R. Couture, D. Joly, X. Tastet, V. Aimez, R. Gauvin, Scanning 29, 92 (2007)
T. Onuma, T. Yamaguchi, T. Honda, Phys. Status Solidi C 10, 869 (2013)
F.A. Cotton, Chemical Applications of Group Theory, 2nd edn. (Wiley, New York, 1971)
C.F. Klingshirn, Semiconductor Optics, 4th edn. (Springer, Heidelberg, 2012)
M. Born, E. Wolf, Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light, 7th expanded edn. (Cambridge University Press, Cambridge, U.K., 1999)
M. Dressel, B. Gompf, D. Faltermeier, A.K. Tripathi, J. Pflaum, M. Schubert, Opt. Express 16, 19770 (2008)
G.E. Jellison Jr., M.A. McGuire, L.A. Boatner, J.D. Budai, E.D. Specht, D.J. Singh, Phys. Rev. B 84, 195439 (2011)
J.A. Woollam Co., Inc., Guide to Using WVASE32
H. Fujiwara, Spectroscopic Ellipsometry, 2nd edn. (Maruzen, Tokyo, 2011)
M. Schubert, Phys. Rev. B 53, 4265 (1996)
M. Schubert, Infrared Ellipsometry on Semiconductor Layer Structures (Springer, Heidelberg, 2004)
M. Schubert, R. Korlacki, S. Knight, T. Hofmann, S. Schöche, V. Darakchieva, E. Janzén, B. Monemar, D. Gogova, Q.-T. Thieu, R. Togashi, H. Murakami, Y. Kumagai, K. Goto, A. Kuramata, S. Yamakoshi, M. Higashiwaki, Phys. Rev. B 93, 125209 (2016)
M. Cardona, Modulation Spectroscopy (Academic, New York, 1969)
D.E. Aspnes, Surf. Sci. 37, 418 (1973)
Y.P. Varshni, Physica 34, 149 (1967)
Z. Guo, A. Verma, X. Wu, F. Sun, A. Hickman, T. Masui, A. Kuramata, M. Higashiwaki, D. Jena, T. Luo, Appl. Phys. Lett. 106, 111909 (2015)
K.P. O’Donnell, X. Chen, Appl. Phys. Lett. 58, 2924 (1991)
S. Rudin, T.L. Reinecke, B. Segall, Phys. Rev. B 42, 11218 (1990)
D. Dohy, G. Lucazeau, A. Revcolevschi, J. Solid State Chem. 45, 180 (1982)
T. Onuma, S. Fujioka, T. Yamaguchi, Y. Itoh, M. Higashiwaki, K. Sasaki, T. Masui, T. Honda, J. Cryst. Growth 401, 330 (2014)
H. Haug, S.W. Koch, Quantum Theory of The Optical and Electronic Properties of Semiconductors, 5th edn. (World Scientific, 2009)
M. Passlack, N.E.J. Hunt, E.F. Schubert, G.J. Zydzik, M. Hong, J.P. Mannaerts, R.L. Opila, R.J. Fischer, Appl. Phys. Lett. 64, 2715 (1994)
K. Irmscher, Z. Galazka, M. Pietsch, R. Uecker, R. Fornari, J. Appl. Phys. 110, 063720 (2011)
T. Oishi, Y. Koga, K. Harada, M. Kasu, Appl. Phys. Express 8, 031101 (2015)
N. Ma, N. Tanen, A. Verma, Z. Guo, T. Luo, H. Xing, D. Jena, Appl. Phys. Lett. 109, 212101 (2016)
E. Korhonen, F. Tuomisto, D. Gogova, G. Wagner, M. Baldini, Z. Galazka, R. Schewski, M. Albrecht, Appl. Phys. Lett. 106, 242103 (2015)
Acknowledgements
The author would like to acknowledge Dr. M. Higashiwaki for introducing and continuously giving me the opportunity to work on the β-Ga2O3. The author would like to thank Dr. K. Sasaki and Dr. A. Kuramata of Novel Crystal Technology Inc. and Dr. K. Goto, Dr. T. Masui, and Dr. S. Yamakoshi of Tamura Corporation for preparation of β-Ga2O3 crystals grown by the FZ and EFG methods. The author is grateful to Dr. Y. Nakata and Dr. M. Higashiwaki for growths of the series of N-doped epitaxial films by RF-MBE. The author would like to thank Dr. T. Sato of J. A. Woollam Japan Co., Inc., for technical support on the IRSE measurements. The author is truly grateful to Prof. T. Yamaguchi, Prof. T. Honda, Prof. Y. Itoh, Prof. H. Nagai, and Prof. M. Sato of Kogakuin University for their fruitful discussion and continuous support on the experiment. The author would like to acknowledge Prof. M. Sugiyama of Tokyo University of Science and Prof. S.F. Chichibu of Tohoku University for their continuous encouragements.
This work was supported in part by Grants-in-Aid for Scientific Research Nos. 25390071, 25289093, 25420341, and 25706020 from the Ministry of Education, Culture, Sports, Science and Technology, Japan (MEXT).
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2020 Springer Nature Switzerland AG
About this chapter
Cite this chapter
Onuma, T. (2020). Optical Properties. In: Higashiwaki, M., Fujita, S. (eds) Gallium Oxide. Springer Series in Materials Science, vol 293. Springer, Cham. https://doi.org/10.1007/978-3-030-37153-1_27
Download citation
DOI: https://doi.org/10.1007/978-3-030-37153-1_27
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-37152-4
Online ISBN: 978-3-030-37153-1
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)