Skip to main content
SpringerLink
Log in

Management Suggestions for Process Control of Semiconductor Manufacturing: An Operations Research and Data Science Perspective

  • Chapter
  • First Online:
Computational Intelligence and Optimization Methods for Control Engineering

Part of the book series: Springer Optimization and Its Applications ((SOIA,volume 150))

Abstract

With advances in information and telecommunication technologies and data-enabled decision-making, smart manufacturing can be an essential component of sustainable development. In the era of the smart world, semiconductor industry is one of the few global industries that are in a growth mode to smartness, due to worldwide demand. The promising significant opportunities to reduce cost, boost productivity, and improve quality in wafer manufacturing is based on the integration or combination of simulated replicas of actual equipment, Cyber-Physical Systems (CPS) and regionalized or decentralized decision-making into a smart factory. However, this integration also presents the industry with novel unique challenges. The stream of the data from sensors, robots, and CPS can aid to make the manufacturing smart. Therefore, it would be an increased need for modeling, optimization, and simulation to the value delivery from manufacturing data. This paper aims to review the success story of smart manufacturing in semiconductor industry with the focus on data-enabled decision-making and optimization applications based on “Operations Research” (OR) and “Data Science” (DS) perspective. In addition, we will discuss future research directions and new challenges to this industry.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 59.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 79.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 79.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Advanced manufacturing partnership. https://www.manufacturing.gov

  2. Kagermann, H., Lukas, W.-D., Wahlster, W.: VDI nachrichten. 13, 11 (2011)

    Google Scholar 

  3. la nouvelle france industrielle. https://www.economie.gouv.fr/entreprises/nouvelle-france-industrielle

  4. Future of manufacturing. https://www.gov.uk/government/collections/future-of-manufacturing

  5. Ersson, C., Sagström, E.: Made in Sweden 2030 (2013)

    Google Scholar 

  6. Factories of the future. http://ec.europa.eu/research/industrial_technologies/factories-of-the-future_en.html

  7. Kang, H.S., Lee, J.Y., Choi, S., Kim, H., Park, J.H., Son, J.Y., Kim, B.H., Do Noh, S.: Int. J. Precis. Eng. Manuf. Green Technol. 3(1), 111–128 (2016)

    Google Scholar 

  8. Industria conectada 4.0. http://www.industriaconectada40.gob.es/

  9. Smart Industry Netherlands. https://www.smartindustry.nl/english/

  10. Industry 4.1j. http://www8.cao.go.jp/cstp/english/basic/

  11. Made in China. https://www.csis.org/analysis/made-china-2025

  12. Fabbrica Intelligente of Italy. http://www.fabbricaintelligente.it/en/

  13. Innovation and enterprise Singapore. https://www.nrf.gov.sg/rie2020

  14. Baheti, R., Gill, H.: Impact Control Technol. 12, 161–166 (2011)

    Google Scholar 

  15. Gershenfeld, N., Krikorian, R., Cohen, D.: Sci. Am. 291(4), 76–81 (2004)

    Google Scholar 

  16. Modha, D.S., Ananthanarayanan, R., Esser, S.K., Ndirango, A., Sherbondy, A.J., Singh, R.: Commun. ACM 54(8), 62–71 (2011)

    Article  Google Scholar 

  17. Hayes, B.: Commun. ACM 51(7), 9–11 (2008)

    Article  Google Scholar 

  18. Kusiak, A., et al.: Nature 544(7648), 23–25 (2017)

    Article  Google Scholar 

  19. Lasi, H., Fettke, P., Kemper, H.-G., Feld, T., Hoffmann, M.: Bus. Inf. Syst. Eng. 6(4), 239–242 (2014)

    Google Scholar 

  20. Fathi, M., Khakifirooz, M., Pardalos, P.M.: Optimization in Large Scale Problems: Industry 4.0 and Society 5.0 Applications, vol. 152. Springer Optimization and Its Applications (2019)

    Google Scholar 

  21. Schaller, R.R.: IEEE Spectr. 34(6), 52–59 (1997)

    Article  Google Scholar 

  22. Arden, W., Brillouët, M., Cogez, P., Graef, M., Huizing, B., Mahnkopf, R.: Version 2, 14 (2010)

    Google Scholar 

  23. International technology roadmap for semiconductors. http://www.itrs2.net

  24. International technology roadmap for semiconductor 2.0 edition 2015: more Moore. https://www.semiconductors.org/clientuploads/research_technology/itrs/2015/5_2015%20itrs%202.0_more%20moore.pdf

  25. International technology roadmap for semiconductors 2.0 edition 2015: factory integration. https://www.semiconductors.org/clientuploads/research_technology/itrs/2015/7_2015%20itrs%202.0%20factory%20integration.pdf

  26. Khakifirooz, M., Fathi, M., Wu, K.: Development of smart semiconductor manufacturing: operations research and data science perspectives. In: IEEE Access, vol. 7, pp. 108419–108430 (2019). https://doi.org/10.1109/ACCESS.2019.2933167

    Article  Google Scholar 

  27. Mönch, L., Fowler, J.W., Mason, S.J.: Production Planning and Control for Semiconductor Wafer Fabrication Facilities: Modeling, Analysis, and Systems, vol. 52. Springer Science & Business Media (2012)

    Google Scholar 

  28. Hall, B.H., Ziedonis, R.H.: Rand J. Econ. 101–128 (2001)

    Google Scholar 

  29. Noguchi, J.: The Science Review Article: An Opportune Genre in the Construction of Science, vol. 17. Peter Lang (2006)

    Google Scholar 

  30. Wieringa, R., Maiden, N., Mead, N., Rolland, C.: Requir. Eng. 11(1), 102–107 (2006)

    Google Scholar 

  31. Meziane, F., Vadera, S., Kobbacy, K., Proudlove, N.: Integr. Manuf. Syst. 11(4), 218–238 (2000)

    Google Scholar 

  32. Petersen, K., Feldt, R., Mujtaba, S., Mattsson, M.: In: EASE, vol. 8, pp. 68–77 (2008)

    Google Scholar 

  33. Delen, D., Demirkan, H.: Data, Information and Analytics as Services. Elsevier (2013)

    Google Scholar 

  34. Chien, C.-F., Wang, W.-C., Cheng, J.-C.: Expert Syst. Appl. 33(1), 192–198 (2007)

    Google Scholar 

  35. Hsu, S.-C., Chien, C.-F.: Int. J. Prod. Econ. 107(1), 88–103 (2007)

    Google Scholar 

  36. Chien, C.-F., Chen, L.-F.: Expert Syst. Appl. 34(1), 280–290 (2008)

    Google Scholar 

  37. Chien, C.-F., Hsiao, C.-W., Meng, C., Hong, K.-T., Wang, S.-T.: In: IEEE International Symposium on Semiconductor Manufacturing, 2005, ISSM 2005, pp. 327–330. IEEE (2005)

    Google Scholar 

  38. Chien, C.-F., Lin, T.-H., Peng, C.-Y., Hsu, S.-C.: J. Chin. Inst. Ind. Eng. 18(4), 37–48 (2001)

    Google Scholar 

  39. Chien, C.-F., Hsiao, A., Wang, I.: J. Chin. Inst. Ind. Eng. 21(4), 313–327 (2004)

    Google Scholar 

  40. Chien, C.-F., Li, H.-C., Jeang, A.: Intell. Syst. Account. Financ. Manag. 14(1–2), 43–57 (2006)

    Google Scholar 

  41. Hsu, C.-Y., Chien, C.-F., Lin, K.-Y., Chien, C.-Y.: J. Chin. Inst. Ind. Eng. 27(2), 140–156 (2010)

    Google Scholar 

  42. Chien, C.-F., Lin, T.-H., Liu, Q.-W., Peng, C.-Y., Hsu, S.-C., Huang, C.-C.: J. Chin. Inst. Ind. Eng. 19(2), 23–38 (2002)

    Google Scholar 

  43. Wang, K.-J., Chien, C.-F.: Robot. Comput. Integr. Manuf. 19(1–2), 65–77 (2003)

    Google Scholar 

  44. Chien, C.-F., Chen, C.-H.: OR Spectr. 29(3), 391–419 (2007)

    Google Scholar 

  45. Chien, C.-F., Hsu, S.-C., Peng, S., Wu, C.-H.: In: Semiconductor Manufacturing Technology Workshop, 2000, pp. 217–229. IEEE (2000)

    Google Scholar 

  46. Chen-Fu, C., Chien-Hung, C.: OR Spectr. 29(3), 391 (2007)

    Google Scholar 

  47. Chien, C.-F., Chen, L.-F.: IEEE Trans. Semicond. Manuf. 20(4), 528–541 (2007)

    Google Scholar 

  48. Lin, K.-S., Chien, C.-F.: Expert Syst. Appl. 36(2), 3327–3335 (2009)

    Google Scholar 

  49. Leachman, R.C., Ding, S., Chien, C.-F.: IEEE Trans. Autom. Sci. Eng. 4(4), 501–512 (2007)

    Google Scholar 

  50. Lin, W.-L., Chien, C.-F., Chen, W.-C., Wu, W.-C., Wang, H.-Y., Kuo, R.-T., Chou, M.-H.: In: 2008 International Symposium on Semiconductor Manufacturing (ISSM), pp. 125–128. IEEE (2008)

    Google Scholar 

  51. Wang, K.-J., Lin, Y.-S., Chien, C.-F., Chen, J.: Robot. Comput. Integr. Manuf. 25(1), 32–41 (2009)

    Google Scholar 

  52. Mashiko, K.: Semiconductor neural network including photosensitive coupling elements, US Patent 4,988,891 (1991)

    Google Scholar 

  53. Chen, F.-L., Liu, S.-F.: IEEE Trans. Semicond. Manuf. 13(3), 366–373 (2000)

    Google Scholar 

  54. Su, C.-T., Yang, T., Ke, C.-M.: IEEE Trans. Semicond. Manuf. 15(2), 260–266 (2002)

    Google Scholar 

  55. Wu, J.-Z., Chien, C.-F.: OR Spectr. 30(3), 401–430 (2008)

    Google Scholar 

  56. Peng, C.-Y., Chien, C.-F.: Int. J. Serv. Technol. Manag. 4(4–6), 365–383 (2003)

    Google Scholar 

  57. Chen, P.-N., Chien, C.-F., Wang, S.-J., Chen, C.-C., Luo, H.-J.: In: Semiconductor Manufacturing Technology Workshop Proceedings, 2004, pp. 174–177. IEEE (2004)

    Google Scholar 

  58. Grundel, D., Murphey, R., Pardalos, P., Prokopyev, O.: Cooperative Systems: Control and Optimization, vol. 588. Springer Science & Business Media (2007)

    Google Scholar 

  59. Chien, C.-F., Hsu, S.-C., Deng, J.-F.: IEEE Trans. Semicond. Manuf. 14(2), 157–162 (2001)

    Google Scholar 

  60. Zheng, J.-N., Chang, K.-H., Chien, C.-F.: In: 40th International Conference on Computers and Industrial Engineering (CIE), 2010, pp. 1–6. IEEE (2010)

    Google Scholar 

  61. Chien, C.-F., Chen, Y.-J., Peng, J.-T.: In: Winter Simulation Conference, 2008, WSC 2008, pp. 2313–2322. IEEE (2008)

    Google Scholar 

  62. Wu, J.-Z., Chien, C.-F., Huang, Y.-S., Huang, H.-Y.: In: 40th International Conference on Computers and Industrial Engineering (CIE), 2010, pp. 1–6. IEEE (2010)

    Google Scholar 

  63. Chien, C.-F., Chang, K.-H., Chen, C.-P.: In: Metrology, Inspection, and Process Control for Microlithography XV, vol. 4344, pp. 245–257. International Society for Optics and Photonics (2001)

    Google Scholar 

  64. Chien, C.-F., Liu, C.-C., Hsu, C.-Y., Chou, H.-S., Lin, C.-W.: In: International Symposium on Semiconductor Manufacturing, 2007, ISSM 2007, pp. 1–4. IEEE (2007)

    Google Scholar 

  65. Chien, C.-F., Deng, J.-F.: Int. Trans. Oper. Res. 8(5), 535–545 (2001)

    Google Scholar 

  66. Wang, H.-J., Chien, C.-F., Kuo, C.-J.: Analyzing alternative strategies of semiconductor final testing. In: Multi-objective Programming and Goal Programming. Springer (2003)

    Google Scholar 

  67. Chien, C.-F., Chang, K.-H., Chen, C.-P.: J. Chin. Inst. Ind. Eng. 18(3), 95–103 (2001)

    Google Scholar 

  68. Nijs, J.F., Szlufcik, J., Poortmans, J., Sivoththaman, S., Mertens, R.P.: IEEE Trans. Electron Devices 46(10), 1948–1969 (1999)

    Article  Google Scholar 

  69. Chien, C.-F., Chen, Y.-J., Peng, J.-T.: Int. J. Prod. Econ. 128(2), 496–509 (2010)

    Google Scholar 

  70. Wei, C.-C., Chien, C.-F., Wang, M.-J.J.: Int. J. Prod. Econ. 96(1), 47–62 (2005)

    Google Scholar 

  71. Chien, C.-F., Chen, H.-K., Wu, J.-Z., Hu, C.-H.: Int. J. Prod. Res. 45(3), 509–524 (2007)

    Google Scholar 

  72. Chien, C.-F., Hsu, C.-Y., Chou, H.-S., Lin, C.-W.: In: IEEE International Symposium on Semiconductor Manufacturing, 2006, ISSM 2006, pp. 317–320. IEEE (2006)

    Google Scholar 

  73. Chien, C.-F., Wu, J.-Z.: IEEE Trans. Semicond. Manuf. 16(4), 704–711 (2003)

    Google Scholar 

  74. Chien, C.-F., Chen, W.-C., Hsu, S.-C.: Int. J. Prod. Res. 48(23), 6959–6976 (2010)

    Google Scholar 

  75. Chien, C.-F., Hu, C.-H., Lin, C.-Y.: Int. J. Manuf. Technol. Manag. 14(1–2), 130–144 (2008)

    Google Scholar 

  76. Chien, C.-F., Wu, J.-Z., Weng, Y.-D.: Flex. Serv. Manuf. J. 22(1–2), 109–139 (2010)

    Google Scholar 

  77. Wu, H.-H., Chien, C.-F., Huang, Y.-L., Huang, D.-S., Tsai, S.-D., Huang, M.-P.: In: Proceedings of 6th Electronics Packaging Technology Conference, 2004. EPTC 2004, pp. 81–86. IEEE (2004)

    Google Scholar 

  78. Chen, C.-C., Chiang, Y.-S., Chien, C.-F.: In: International Symposium on Semiconductor Manufacturing, 2007, ISSM 2007, pp. 1–3. IEEE (2007)

    Google Scholar 

  79. Chien, C.-F., Chen, W.-C., Hsu, S.-C.: In: Winter Simulation Conference, 2008, WSC 2008, pp. 2201–2208. IEEE (2008)

    Google Scholar 

  80. Chien, C.-F., Wu, J.-Z.: In: IEEE International Conference on Automation Science and Engineering, 2007, CASE 2007, pp. 265–269. IEEE (2007)

    Google Scholar 

  81. Chang, P.-L., Chien, C.-F.: Int. J. Serv. Technol. Manag. 4(4–6), 323–330 (2003)

    Google Scholar 

  82. Chien, C.-F., Shi, Y.: Int. J. Bus. 9(4), 327 (2004)

    Google Scholar 

  83. Chien, C.-F., Hu, C.-H.: In: IEEE International Symposium on Semiconductor Manufacturing, 2006, ISSM 2006, pp. 265–268. IEEE (2006)

    Google Scholar 

  84. Chien, C.-F., Wang, J., Chang, T.-C., Wu, W.-C.: In: International Symposium on Semiconductor Manufacturing, 2007, ISSM 2007, pp. 1–4. IEEE (2007)

    Google Scholar 

  85. Chien, C.-F., Hsu, S.-C., Hsu, C.-Y.: Recent Adv. Data Min. Enterp. Data: Algorithms Appl. 6, 367 (2008)

    Google Scholar 

  86. Chien, C.-F.: In: 2010 40th International Conference on Computers and Industrial Engineering (CIE), pp. 1–2. IEEE (2010)

    Google Scholar 

  87. Morse, J.: NNN Newslett. 4(11) (2011)

    Google Scholar 

  88. In: International Symposium on Semiconductor Manufacturing Intelligence. https://ismi2018.decisions.org.tw

  89. Assaf, S., Babu, V., Flores, R.D., Hickey, B., Kuttannair, K., Park, S.J., Rhee, A., Wang, C.C.: Method and system for managing process jobs in a semiconductor fabrication facility, US Patent 8,527,080 (2013)

    Google Scholar 

  90. Chen, T., Wang, Y.-C.: Int. J. Manuf. Res. 8(2), 150–170 (2013)

    Google Scholar 

  91. Bloem, J., Van Doorn, M., Duivestein, S., Excoffier, D., Maas, R., Van Ommeren, E.: Things to Tighten the Link Between IT and OT (2014)

    Google Scholar 

  92. Fowler, J.W., Mönch, L., Ponsignon, T.: Int. J. Ind. Eng. 22(5) (2015)

    Google Scholar 

  93. Semicon Europa (2015). http://www.semiconeuropa.org/bestof2015

  94. Dequeant, K., Vialletelle, P., Lemaire, P., Espinouse, M.-L.: In: Proceedings of the 2016 Winter Simulation Conference, pp. 2598–2609. IEEE Press (2016)

    Google Scholar 

  95. Waschneck, B., Altenmüller, T., Bauernhansl, T., Kyek, A.: In: SAMI iKNOW (2016)

    Google Scholar 

  96. Moyne, J., Samantaray, J., Armacost, M.: IEEE Trans. Semicond. Manuf. 29(4), 283–291 (2016)

    Google Scholar 

  97. Tang, T.J., Chung, A., Zhao, A., Kang, R., Zhang, M., Chien, K., Yang, J., Zhang, J.: In: 2016 2nd International Conference on Cloud Computing and Internet of Things (CCIOT), pp. 111–114. IEEE (2016)

    Google Scholar 

  98. Weber, A.: In: e-Manufacturing and Design Collaboration Symposium (eMDC), 2016, pp. 1–3. IEEE (2016)

    Google Scholar 

  99. Herding, R., Mönch, L.: In: OTM Confederated International Conferences on the Move to Meaningful Internet Systems, pp. 65–75. Springer (2016)

    Google Scholar 

  100. Intelligent Systems Laboratory, The University of Iowa. https://research.engineering.uiowa.edu/kusiak/

  101. System Integration and Modeling Lab., Korea Advanced Institute of Science and Technology. http://simlab.kaist.ac.kr/

  102. The William M. Keck Virtual Factory Lab—Georgia Tech. https://factory.isye.gatech.edu

  103. System Design & Management Lab-Korea Advanced Institute of Science and Technology. http://sdm.kaist.ac.kr/wordpress/korean/

  104. Chamnanlor, C., Sethanan, K., Chien, C.-F., Gen, M.: Ind. Eng. Manag. Syst. 12(4), 306–316 (2013)

    Google Scholar 

  105. Zheng, J.-N., Chien, C.-F.: In: 2013 IEEE International Conference on Automation Science and Engineering (CASE), pp. 1034–1039. IEEE (2013)

    Google Scholar 

  106. Hao, X.-C., Wu, J.-Z., Chien, C.-F., Gen, M.: J. Intell. Manuf. 25(5), 867–879 (2014)

    Google Scholar 

  107. Chou, C.-W., Chien, C.-F., Gen, M.: IEEE Trans. Autom. Sci. Eng. 11(3), 692–705 (2014)

    Google Scholar 

  108. Chamnanlor, C., Sethanan, K., Chien, C.-F., Gen, M.: Int. J. Prod. Res. 52(9), 2612–2629 (2014)

    Google Scholar 

  109. Wang, H.-K., Chien, C.-F., Gen, M.: In: 2014 IEEE International Conference on Automation Science and Engineering (CASE), pp. 101–106. IEEE (2014)

    Google Scholar 

  110. Chien, C.-F., Dauzère-Pérès, S., Ehm, H., Fowler, J.W., Jiang, Z., Krishnaswamy, S., Lee, T.-E., Moench, L., Uzsoy, R.: Eur. J. Ind. Eng. 4 5(3), 254–271 (2011)

    Google Scholar 

  111. Chien, C.-C., Hsu, C.-Y., Chiou, N., Chien, C.-F., Hsin, W.-M., Lee, C.-Y., Chien, J., Wu, A.: In: 2011 International Symposium on Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), pp. 1–11. IEEE (2011)

    Google Scholar 

  112. Jamrus, T., Chien, C.-F., Gen, M., Sethanan, K.: Fuzzy Optim. Decis. Mak. 14(3), 265–287 (2015)

    Google Scholar 

  113. Chamnanlor, C., Sethanan, K., Gen, M., Chien, C.-F.: J. Intell. Manuf. 28(8), 1915–1931 (2017)

    Google Scholar 

  114. Pan, X., Li, L., Chen, Z., Jia, P.: In: The 26th Chinese Control and Decision Conference (2014 CCDC), pp. 4019–4024. IEEE (2014)

    Google Scholar 

  115. Chien, C.-F., Hsu, C.-Y., Chen, Y.-J.: Method of dispatching semiconductor batch production, US Patent 9,513,626 (2016)

    Google Scholar 

  116. Bang, J.-Y., Kim, Y.-D.: Comput. Oper. Res. 38(3), 666–673 (2011)

    Google Scholar 

  117. Yang, K., Chung, Y., Kim, D., Park, S.C.: Korean J. Comput. Des. Eng. 19(3), 214–223 (2014)

    Google Scholar 

  118. Deng, J., Cao, Z., Liu, M.: In: 2014 IEEE 11th International Conference on Networking, Sensing and Control (ICNSC), pp. 58–63. IEEE (2014)

    Google Scholar 

  119. Hildebrandt, T., Goswami, D., Freitag, M.: In: Proceedings of the 2014 Winter Simulation Conference, pp. 2580–2590. IEEE Press (2014)

    Google Scholar 

  120. Li, L., Sun, Z., Zhou, M., Qiao, F.: IEEE Trans. Autom. Sci. Eng. 10(2), 354–364 (2013)

    Google Scholar 

  121. Wang, C.-N., Chen, L.-C.: J. Intell. Manuf. 23(5), 2047–2056 (2012)

    Google Scholar 

  122. Kuo, C.-J., Chien, C.-F., Chen, J.-D.: IEEE Trans. Autom. Sci. Eng. 8(1), 103–111 (2011)

    Google Scholar 

  123. Chien, C.-F., Hsu, C.-Y., Hsiao, C.-W.: J. Intell. Manuf. 23(6), 2281–2294 (2012)

    Google Scholar 

  124. Hsieh, L.Y., Chang, K.-H., Chien, C.-F.: Int. J. Prod. Res. 52(10), 3097–3109 (2014)

    Google Scholar 

  125. Xie, Y., Chien, C.-F., Tang, R.-Z.: Comput. Ind. Eng. 99, 401–414 (2016)

    Google Scholar 

  126. Chien, C.-F., Hu, C.-H., Hu, Y.-F.: IEEE Trans. Semicond. Manuf. 29(3), 239–247 (2016)

    Google Scholar 

  127. Liu, X., Pei, J., Liu, L., Cheng, H., Zhou, M., Pardalos, P.M.: Dynamic coordinated supply chain scheduling in an IoT environment. In: Optimization and Management in Manufacturing Engineering, pp. 63–90. Springer (2017)

    Google Scholar 

  128. Chien, C.-F., Ehm, H., Fowler, J., Mönch, L.: In: Dagstuhl reports, vol. 6-2. Schloss Dagstuhl-Leibniz-Zentrum fuer Informatik (2016)

    Google Scholar 

  129. Wu, J.-Z., Yu, H.-C., Chien, C.-F.: In: Proceedings of the 2014 Winter Simulation Conference, pp. 2591–2599. IEEE Press (2014)

    Google Scholar 

  130. Wu, J.-Z., Chien, C.-F., Tsou, Y.-C.: In: 2014 IEEE International Conference on Automation Science and Engineering (CASE), pp. 613–618. IEEE (2014)

    Google Scholar 

  131. Hsu, C.-Y., Chien, C.-F.: In: Proceedings of 12th Asia Pacific Industrial Engineering & Management Systems Conference (APIEMS 2011) (2011)

    Google Scholar 

  132. Chien, C.-F., Wu, J.-Z., Wu, C.-C.: Flex. Serv. Manuf. J. 25(3), 286–309 (2013)

    Google Scholar 

  133. Chen, W.-C., Chien, C.-F.: Int. J. Prod. Res. 49(12), 3635–3652 (2011)

    Google Scholar 

  134. Chien, C.-F., Zheng, J.-N.: J. Intell. Manuf. 23(6), 2151–2159 (2012)

    Google Scholar 

  135. Chien, C.-F., Wu, C.-H., Chiang, Y.-S.: Int. J. Prod. Econ. 135(2), 860–869 (2012)

    Google Scholar 

  136. Chien, C.-F., Kuo, R.-T.: Flex. Serv. Manuf. J. 25(3), 310–342 (2013)

    Google Scholar 

  137. Lee, C.-Y., Chen, C.-H., Chien, C.-F.: Int. J. Prod. Res. 52(6), 1868–1885 (2014)

    Google Scholar 

  138. Chien, C.-F., Dou, R., Fu, W.: Appl. Soft Comput. (2017)

    Google Scholar 

  139. Wang, H.-K., Chien, C.-F., Gen, M.: IEEE Trans. Semicond. Manuf. 28(3), 353–366 (2015)

    Google Scholar 

  140. Hsu, C.-Y., Lin, S.-C., Chien, C.-F.: J. Ind. Prod. Eng. 32(3), 149–161 (2015)

    Google Scholar 

  141. Zulkifli, N., Sivalingam, S., et al.: In: 2015 International Symposium on Technology Management and Emerging Technologies (ISTMET), pp. 325–329. IEEE (2015)

    Google Scholar 

  142. Chien, C.-F., Chu, P.-C., Zhao, L.: Int. J. Ind. Eng. 22 (5) (2015)

    Google Scholar 

  143. Chien, C.-F., Chou, C.-W., Yu, H.-C.: IEEE Trans. Autom. Sci. Eng. 13(4), 1567–1580 (2016)

    Google Scholar 

  144. Zhou, Z., Liu, X., Pei, J., Pardalos, P.M., Cheng, H.: J. Ind. Manag. Optim. 13(5), 1–16 (2017)

    Google Scholar 

  145. Chen-fu, C., Ren-tsun, K.: Ind. Eng. J. 2, 000 (2013)

    Google Scholar 

  146. Moyne, J., Iskandar, J.: Processes 5(3), 39 (2017)

    Google Scholar 

  147. Yu, H.-C., Lin, K.-Y., Chien, C.-F.: J. Intell. Manuf. 25(5), 933–943 (2014)

    Google Scholar 

  148. Pardalos, P.M.: Optimization and Management in Manufacturing Engineering, vol. 126. Springer (2017)

    Google Scholar 

  149. Chien, C.-F., Gen, M., Shi, Y., Hsu, C.-Y.: J. Intell. Manuf. 25(5), 845–847 (2014)

    Google Scholar 

  150. Chien, C.-F., Chen, Y.-J., Hsu, C.-Y., Wang, H.-K.: IEEE Trans. Autom. Sci. Eng. 11(2), 473–484 (2014)

    Google Scholar 

  151. Chien, C.-F., Hsu, C.-Y., Chang, K.-H.: Comput. Ind. Eng. 65(1), 117–127 (2013)

    Google Scholar 

  152. Chien, C.-F., Lin, K.-Y., Yu, A.P.-I.: Comput. Ind. Eng. 73, 75–84 (2014)

    Google Scholar 

  153. Kerh, R., Chien, C.-F., Lin, K.-Y.: Int. J. Mech. Aerosp. Ind. Mechatron. Eng. 8(4), 661–666 (2014)

    Google Scholar 

  154. Chen, C.-P., Chien, C.-F., Lai, C.-T.: Innovation 15(4), 416–436 (2013)

    Article  Google Scholar 

  155. Chien, C.-F., Zheng, J.-N., Lin, Y.-J.: J. Intell. Manuf. 25(5), 899–911 (2014)

    Google Scholar 

  156. Chien, C.-F., Kerh, R., Lin, K.-Y., Yu, A.P.-I.: Comput. Ind. Eng. 99, 162–173 (2016)

    Google Scholar 

  157. Lin, K.-Y., Chien, C.-F., Kerh, R.: Comput. Ind. Eng. 99, 487–502 (2016)

    Google Scholar 

  158. Lin, K.-Y., Yu, A.P.-I., Chu, P.-C., Chien, C.-F.: J. Ind. Prod. Eng. 34(7), 504–519 (2017)

    Google Scholar 

  159. Chien, C.-F., Hsu, C.-Y., Lin, S.-C.: Manufacturing intelligence to forecast the customer order behavior for vendor managed inventory. In: Intelligent Decision Technologies, pp. 51–60. Springer (2012)

    Google Scholar 

  160. Chen, W.-C., Chien, C.-F.: J. Intell. Manuf. 22(3), 447–457 (2011)

    Google Scholar 

  161. Lee, C.-Y., Chien, C.-F.: OR Spectr. 36(3), 761–797 (2014)

    Google Scholar 

  162. Chien, C.-F., Hsu, C.-Y.: J. Intell. Manuf. 22(3), 399–412 (2011)

    Google Scholar 

  163. Chien, C.-F., Chen, J.-H., Wei, C.-C. (2011) 18(4), 333–349

    Google Scholar 

  164. Chien, C.-F., Kim, K.H., Liu, B., Gen, M.: J. Intell. Manufact. 1–3 (2012)

    Google Scholar 

  165. Velásquez-Bermúdez, J.M., Khakifirooz, M., Fathi, M.: Large Scale Optimization in Supply Chains and Smart Manufacturing: Theory and Applications, vol. 149. Springer Optimization and Its Applications (2019)

    Google Scholar 

  166. Chien, C.-F., Peng, J.-T., Yu, H.-C.: Comput. Ind. Eng. 99, 448–457 (2016)

    Google Scholar 

  167. Chien, C.-F., Chen, Y.-J., Hsu, C.-Y., Yeh, Y.-H.: In: Proceedings of the Winter Simulation Conference Winter Simulation Conference, pp. 1898–1907 (2011)

    Google Scholar 

  168. Chen, Y.-J., Hsu, C.-Y., Chien, C.-F.: In: Proceedings of 12th Asia Pacific Industrial Engineering & Management Systems Conference (APIEMS 2011) (2011)

    Google Scholar 

  169. Hsu, C.-Y., Chien, C.-F., Lai, Y.-C.: Main branch decision tree algorithm for yield enhancement with class imbalance. In: Intelligent Decision Technologies, pp. 235–244. Springer (2012)

    Google Scholar 

  170. Chien, C.-F., Chang, K.-H., Wang, W.-C.: J. Intell. Manuf. 25(5), 961–972 (2014)

    Google Scholar 

  171. Chien, C.-F., Chen, Y.-J., Hsu, C.-Y.: Comput. Oper. Res. 53, 309–318 (2015)

    Google Scholar 

  172. Chu, P.-C., Chien, C.-F., Chen, C.-C.: Int. J. Ind. Eng. 23(5) (2016)

    Google Scholar 

  173. Chien, C.-F., Chen, Y.-J., Wu, J.-Z.: In: Winter Simulation Conference (WSC), 2016, pp. 2512–2522. IEEE (2016)

    Google Scholar 

  174. Chien, C.-F., Hsu, C.-Y., Chen, P.-N.: Flex. Serv. Manuf. J. 25(3), 367–388 (2013)

    Google Scholar 

  175. Liu, C.-W., Chien, C.-F.: Eng. Appl. Artif. Intell. 26(5–6), 1479–1486 (2013)

    Google Scholar 

  176. Liao, C.-S., Hsieh, T.-J., Huang, Y.-S., Chien, C.-F.: IEEE Trans. Autom. Sci. Eng. 11(3), 953–960 (2014)

    Google Scholar 

  177. Hsieh, T.-J., Liao, C.-S., Huang, Y.-S., Chien, C.-F.: In: 2012 IEEE 16th International Conference on Computer Supported Cooperative Work in Design (CSCWD), pp. 869–874. IEEE (2012)

    Google Scholar 

  178. Chien, C.-F., Hsu, S.-C., Chen, Y.-J.: Int. J. Prod. Res. 51(8), 2324–2338 (2013)

    Google Scholar 

  179. Chen, Y.-J., Lin, T.-H., Chang, K.-H., Chien, C.-F.: J. Ind. Prod. Eng. 30(8), 510–517 (2013)

    Google Scholar 

  180. Chien, C.-F., Liu, C.-W., Chuang, S.-C.: Int. J. Prod. Res. 55(17), 5095–5107 (2017)

    Google Scholar 

  181. Chien, C.-F., Diaz, A.C., Lan, Y.-B.: Int. J. Comput. Intell. Syst. 7(sup2), 52–65 (2014)

    Google Scholar 

  182. Chien, C.-F., Chen, Y.-J.: In: 2016 International Symposium on VLSI Design, Automation and Test (VLSI-DAT), pp. 1–4. IEEE (2016)

    Google Scholar 

  183. Chen, L.-F., Chien, C.-F.: Flex. Serv. Manuf. J. 23(3), 263–289 (2011)

    Google Scholar 

  184. Chien, C.-F., Hu, C.-H.: Factor analysis system and analysis method thereof, US Patent 8,200,528 (2012)

    Google Scholar 

  185. Tamer, M., van derLans, M., Sadeghian, H.: In: Metrology, Inspection, and Process Control for Microlithography XXXII, vol. 10585, p. 105850O. International Society for Optics and Photonics (2018)

    Google Scholar 

  186. Park, J., Shin, C., Kim, M., Kim, J., Park, J., Kim, J., Jun, C., Yim, Y., Lee, J.: J. Micro/Nanolithography MEMS MOEMS 13(4), 041409 (2014)

    Google Scholar 

  187. Kuo, H.-F., Faricha, A.: IEEE Access 4, 7479–7486 (2016)

    Article  Google Scholar 

  188. He, F., Zhang, Z.: RSC Adv. 5(126), 103901–103906 (2015)

    Article  Google Scholar 

  189. Xie, Q., Venkatachalam, P., Lee, J., Chen, Z., Zafar, K.: In: Metrology, Inspection, and Process Control for Microlithography XXXI, vol. 10145, p. 101452W. International Society for Optics and Photonics (2017)

    Google Scholar 

  190. Hong, T.-Y., Chien, C.-F., Wang, H.-K., Guo, H.-Z.: Comput. Ind. Eng. 125, 200–211 (2018)

    Google Scholar 

  191. Jamrus, T., Chien, C.-F., Gen, M., Sethanan, K.: IEEE Trans. Semicond. Manuf. 31(1), 32–41 (2018)

    Google Scholar 

  192. Chien, C.-F., Huynh, N.-T.: IEEE Trans. Semicond. Manuf. 31(1), 76–86 (2018)

    Google Scholar 

  193. Wu, J.-Z., Hao, X.-C., Chien, C.-F., Gen, M.: J. Intell. Manuf. 23(6), 2255–2270 (2012)

    Google Scholar 

  194. Hao, X., Lin, L., Gen, M., Chien, C.-F.: In: 2014 IEEE International Conference on Automation Science and Engineering (CASE), pp. 131–136. IEEE (2014)

    Google Scholar 

  195. Li, L., Min, Z.: Int. J. Adv. Manuf. Technol. 84(1–4), 315–325 (2016)

    Google Scholar 

  196. Zhang, J., Wang, X.: Int. J. Prod. Res. 54(23), 7043–7059 (2016)

    Google Scholar 

  197. Wang, S., Wang, L.: Knowl.-Based Syst. 84, 1–9 (2015)

    Google Scholar 

  198. Kim, J., Chung, S.Y., Yoon, H.J.: Proc. Inst. Mech. Eng. Part B: J. Eng. Manuf. 228(12), 1701–1712 (2014)

    Google Scholar 

  199. Cao, Z., Lin, C., Zhou, M., Huang, R.: IEEE Trans. Autom. Sci. Eng. (99), 1–13 (2018)

    Google Scholar 

  200. Waschneck, B., Reichstaller, A., Belzner, L., Altenmüller, T., Bauernhansl, T., Knapp, A., Kyek, A.: In 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), pp. 301–306. IEEE (2018)

    Google Scholar 

  201. Cao, Z., Lin, C., Zhou, M., Huang, R.: In: 2017 13th IEEE Conference on Automation Science and Engineering (CASE), pp. 1040–1045. IEEE (2017)

    Google Scholar 

  202. Waschneck, B., Reichstaller, A., Belzner, L., Altenmüller, T., Bauernhansl, T., Knapp, A., Kyek, A.: Procedia CIRP 72, 1264–1269 (2018)

    Article  Google Scholar 

  203. Ma, Y., Qiao, F., Lu, J.: In: 2016 IEEE International Conference on Automation Science and Engineering (CASE), pp. 1394–1399. IEEE (2016)

    Google Scholar 

  204. Chen, Y.-T., Wu, C.-H., Tien, Y.-J., Yu, C.-J.: Int. J. Ind. Eng. 23(5) (2016)

    Google Scholar 

  205. Hsu, C.-Y., Chien, C.-F., Chen, P.-N.: J. Chin. Inst. Ind. Eng. 29(5), 303–313 (2012)

    Google Scholar 

  206. Tan, F., Pan, T., Li, Z., Chen, S.: IEEE Trans. Ind. Inform. 11(6), 1435–1444 (2015)

    Google Scholar 

  207. Wang, Y., Zheng, Y., Gu, X.-G., Huang, L.: In: 2015 International Conference on Industrial Informatics-Computing Technology, Intelligent Technology, Industrial Information Integration (ICIICII), pp. 152–155. IEEE (2015)

    Google Scholar 

  208. Wan, L., Pan, T.: In: 2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER), pp. 394–397. IEEE (2015)

    Google Scholar 

  209. Bian, J., Pan, T.: In: 2014 11th World Congress on Intelligent Control and Automation (WCICA), pp. 4356–4360. IEEE (2014)

    Google Scholar 

  210. Wan, J., McLoone, S.: IEEE Trans. Semicond. Manuf. 31(1), 12–21 (2018)

    Google Scholar 

  211. Korabi, T.E., Graton, G., Ouladsine, M., Pinaton, J., et al.: In: 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), pp. 340–345. IEEE (2018)

    Google Scholar 

  212. Han, K., Wang, K.: J. Manuf. Syst. 32(2), 372–381 (2013)

    Google Scholar 

  213. Liu, K., Chen, Y., Zhang, X.: IFAC-PapersOnLine 50(1), 8097–8102 (2017)

    Article  Google Scholar 

  214. Jou, B.-Y., Chan, Y.-T., Tseng, S.-T.: IEEE Trans. Semicond. Manuf. 25(4), 614–622 (2012)

    Google Scholar 

  215. Minakata, T., Tanamura, M., Mitamura, Y., Imashiro, M., Horiguchi, A., Sugimoto, A., Yamashita, M., Ujiiye, K., Sunahiro, S., Yada, Y., et al.: In: SID Symposium Digest of Technical Papers, vol. 46-1, pp. 219–222. Wiley Online Library (2015)

    Google Scholar 

  216. Gong, Q.-S., Lee, M.-S., Yang, G.-K., Pan, C.-C.: In: 2015 International Conference on Control, Automation and Robotics (ICCAR), pp. 177–181. IEEE (2015)

    Google Scholar 

  217. Park, C.-S., Kim, J.S., Park, S.-H., Yun, J.-J., Baek, J.-G.: Adv. Sci. Lett. 14(1), 458–463 (2012)

    Google Scholar 

  218. Kao, C.-A., Cheng, F.-T., Wu, W.-M., Kong, F.-W., Huang, H.-H.: IEEE Trans. Semicond. Manuf. 26(1), 69–81 (2013)

    Google Scholar 

  219. Wan, L., Tan, F., Pan, T.-H.: Control. Theory Appl. 1, 012 (2016)

    Google Scholar 

  220. Jebri, M., El Adel, E., Graton, G., Ouladsine, M., Pinaton, J.: IFAC-PapersOnLine 50(1), 6154–6159 (2017)

    Article  Google Scholar 

  221. Jen, C.H.: Adv. Materi. Res. (Trans Tech Publ) 630 235–240 (2013)

    Google Scholar 

  222. Huang, S.-J., Chen, H.-Y.: Int. J. Control. Autom. Syst. 12(2), 422–430 (2014)

    Article  Google Scholar 

  223. Liu, J.P., Beyca, O.F., Rao, P.K., Kong, Z.J., Bukkapatnam, S.T.: IEEE Trans. Autom. Sci. Eng. 14(1), 208–221 (2017)

    Google Scholar 

  224. Yang, H.-C., Tieng, H., Cheng, F.-T.: J. Chin. Inst. Eng. 39(2), 221–235 (2016)

    Google Scholar 

  225. Lee, H., Kim, Y., Kim, C.O.: IEEE Trans. Semicond. Manuf. 30(1), 23–31 (2017)

    Google Scholar 

  226. Pan, T.-H., Yang, Y.-L.: Control. Decis. 11, 026 (2014)

    Google Scholar 

  227. Chen, X., Tomizuka, M.: Int. J. Adapt. Control Signal Process. 29(11), 1459–1474 (2015)

    Article  MathSciNet  Google Scholar 

  228. Lynn, S.A., MacGearailt, N., Ringwood, J.V.: In: 2012 IEEE International Conference on Control Applications (CCA), pp. 1658–1663. IEEE (2012)

    Google Scholar 

  229. Vock, S., Escalona, O., Turner, C.: J. Electron. Test. 31(1), 107–117 (2015)

    Google Scholar 

  230. Eleffendi, M.A., Johnson, C.M.: IEEE Trans. Power Electron. 32(9), 7187–7198 (2017)

    Article  Google Scholar 

  231. Chen, P.-C., Chang, M., Lai, W.-C., Gabayno, J.L.: J. Chin. Inst. Eng. 39(4), 508–512 (2016)

    Google Scholar 

  232. Yoneda, Y., Nakamura, K.: FUJITSU Sci. Tech. J. 49(1), 138–144 (2013)

    Google Scholar 

  233. Tai, Y., Pearn, W.: IEEE Trans. Semicond. Manufact. 28(3), 424–430 (2015)

    Article  Google Scholar 

  234. Liebens, M., Slabbekoorn, J., Miller, A., Beyne, E., Stoerring, M., Hiebert, S., Cross, A.: In: 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference, pp. 10–17 IEEE (2018)

    Google Scholar 

  235. Park, S.H., Park, C.-S., Kim, J.S., Kim, S.-S., Baek, J.-G., An, D.: In: 2013 IEEE International Congress on Big Data (BigData Congress), pp. 363–368. IEEE (2013)

    Google Scholar 

  236. Wu, L., Wang, X., Li, W.: In: 2018 China Semiconductor Technology International Conference (CSTIC), pp. 1–4. IEEE (2018)

    Google Scholar 

  237. denBoef, A.J.: Surf. Topogr.: Metrol. Prop. 4(2), 023001 (2016)

    Google Scholar 

  238. Hsu, C.-Y., Wu, J.-Z.: Int. J. Ind. Eng. 23(5) (2016)

    Google Scholar 

  239. Tang, H., Shearer, J.C., Cheong, L.L., Saulnier, N.A., Sieg, S.A., Petrillo, K., Metz, A., Arnold, J.C.: J. Photopolym. Sci. Technol. 28(1), 13–16 (2015)

    Google Scholar 

  240. Boumerzoug, M., Promreuk, S.: In: 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), pp. 186–189. IEEE (2014)

    Google Scholar 

  241. Rizquez, M., Roussy, A., Pompier, D., Pinaton, J., Pasquet, J.: In: 2016 International Symposium on Semiconductor Manufacturing (ISSM), pp. 1–4. IEEE (2016)

    Google Scholar 

  242. Lee, H.K., Baek, K.H., Shin, K.: Jpn. J. Appl. Phys. 56(6), 066502 (2017)

    Article  Google Scholar 

  243. Kumar, P., Rosenbluth, A.E., Pusuluri, R.M., Viswanathan, R., Srinivasan, B., Mohapatra, N.R.: J. Micro/Nanolithography MEMS MOEMS 17(2), 023503 (2018)

    Google Scholar 

  244. Susto, G.A., Pampuri, S., Schirru, A., Beghi, A., De Nicolao, G.: Comput. Oper. Res. 53, 328–337 (2015)

    Google Scholar 

  245. Chen, W., Wang, Z., Chan, F.T.: Eur. J. Oper. Res. 261(3), 929–940 (2017)

    Google Scholar 

  246. Sakai, M., Nishi, T.: Adv. Mech. Eng. 9(4), 1687814017693217 (2017)

    Google Scholar 

  247. Kim, H.-J., Lee, J.-H., Lee, T.-E.: IEEE Trans. Autom. Sci. Eng. 12(2), 690–700 (2015)

    Google Scholar 

  248. Nishi, T., Matsumoto, I.: IEEE Trans. Autom. Sci. Eng. 12(1), 281–294 (2015)

    Google Scholar 

  249. Yang, T., Shen, Y.-A., Cho, C., Lin, Y.-R.: Eur. J. Ind. Eng. 6(3), 281–300 (2012)

    Google Scholar 

  250. Manupati, V., Revanth, A., Srikanth, K., Maheedhar, A., Reddy, M.S.: Real-time rule-based scheduling system for integrated delivery in a semiconductor manufacturing using evolutionary algorithm-based simulation approach. In: Artificial Intelligence and Evolutionary Computations in Engineering Systems, pp. 981–989. Springer (2016)

    Google Scholar 

  251. Amaral, A.R.: Int. J. Prod. Res. 1–14 (2018)

    Google Scholar 

  252. Cong, P., Zhang, J., Wei, Q.: Chin. J. Mech. Eng. 30(3), 663–675 (2017)

    Article  Google Scholar 

  253. Paksoy, T., Karaoğlan, İ., Gökçen, H., Pardalos, P.M., Torğul, B.: J. Econ. Bibliogr. 3(1S), 1–20 (2016)

    Google Scholar 

  254. Fang, C., Liu, X., Pardalos, P.M., Pei, J.: Int. J. Adv. Manuf. Technol. 83(5–8), 689–710 (2016)

    Google Scholar 

  255. Liu, X., Pei, J., Liu, L., Cheng, H., Zhou, M., Pardalos, P.M.: Life cycle assessment in an IoT environment. In: Optimization and Management in Manufacturing Engineering, pp. 209–246. Springer (2017)

    Google Scholar 

  256. Frederix, F.: In: Proceedings of the Conference on Integration in Manufacturing, Galway, Ireland, pp. 107–116 (1996)

    Google Scholar 

  257. Callarman, T., Fowler, J., Gel, E., Pfund, M., Shunk, D.: Creating a research agenda framework for semiconductor supply network integration. In: Evolution of Supply Chain Management, pp. 161–187. Springer (2004)

    Google Scholar 

  258. Sun, Y., Feller, A., Shunk, D., Fowler, J., Callarman, T., Duarte, B.: In: IEEE International Conference on Automation Science and Engineering, 2007, CASE 2007, pp. 106–110. IEEE (2007)

    Google Scholar 

  259. Fordyce, K., Milne, R.J., Wang, C.-T., Zisgen, H.: Int. J. Ind. Eng.: Theory Appl. Pract. 22(5), 575–600 (2015)

    Google Scholar 

  260. Fordyce, K., Milne, R.J., Wang, C.-T., Zisgen, H.: Int. J. Ind. Eng.: Theory Appl. Pract. 22(5), 601–617 (2015)

    Google Scholar 

  261. Bahinipati, B.K., Deshmukh, S.: Logist. Res. 4(1–2), 19–38 (2012)

    Article  Google Scholar 

  262. Mönch, L., Uzsoy, R., Fowler, J.W.: Int. J. Prod. Res. 1–22 (2017)

    Google Scholar 

  263. Liu, X.P.J.L.L.C.H.Z.M.P.P. (2018) Int. J. Prod. Res. 1–19 (2018)

    Google Scholar 

  264. Uzsoy, R., Fowler, J.W., Mönch, L.: Int. J. Prod. Res. 1–19 (2018)

    Google Scholar 

  265. Teimoury, E., Fathi, M.: Int. J. Prod. Res. 51(18), 5576–5596 (2013)

    Google Scholar 

  266. Teimoury, E., Modarres, M., Khondabi, I., Fathi, M.: Int. J. Adv. Manuf. Technol. 63(1–4), 359–371 (2012)

    Google Scholar 

  267. Centobelli, P., Cerchione, R., Esposito, E.: Transp. Res. Part D: Transp. Environ. 53, 454–470 (2017)

    Google Scholar 

  268. Kwak, M., Behdad, S., Zhao, Y., Kim, H., Thurston, D.: J. Mech. Des. 133(10), 101003 (2011)

    Google Scholar 

  269. Sabbaghi, M., Behdad, S., Zhuang, J.: Int. J. Prod. Econ. 182, 545–563 (2016)

    Google Scholar 

  270. Xue, M., Yan, G., Li, J., Xu, Z.: Environ. Sci. Technol. 46(19), 10556–10563 (2012)

    Article  Google Scholar 

  271. Pardalos, P.M.: Smart/green manufacturing: data enabled decision making and optimization applications-presentation (2017). http://www.ise.ufl.edu/cao/

  272. Centobelli, P., Cerchione, R., Esposito, E.: Sustainability 9(3), 361 (2017)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Tecnológico de Monterrey, Monterrey, Mexico

    Marzieh Khakifirooz

  2. Mississippi State University, Starkville, MS, USA

    Mahdi Fathi

  3. National Tsing Hua University, Hsinchu, Taiwan

    Chen Fu Chien

  4. University of Florida, Gainesville, FL, USA

    Panos M. Pardalos

Authors
  1. Marzieh Khakifirooz
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Mahdi Fathi
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Chen Fu Chien
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Panos M. Pardalos
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Marzieh Khakifirooz .

Editor information

Editors and Affiliations

  1. Department of Mechanical and Aerospace Engineering, University of Florida, Gainesville, FL, USA

    Maude Josée Blondin

  2. Department of Industrial and Systems Engineering, University of Florida, Gainesville, FL, USA

    Panos M. Pardalos

  3. Institute of Automation and Industrial Computer, Polytechnic University of Valencia, Valencia, Spain

    Javier Sanchis Sáez

Rights and permissions

Reprints and permissions

Copyright information

© 2019 Springer Nature Switzerland AG

About this chapter

Check for updates. Verify currency and authenticity via CrossMark

Cite this chapter

Khakifirooz, M., Fathi, M., Chien, C.F., Pardalos, P.M. (2019). Management Suggestions for Process Control of Semiconductor Manufacturing: An Operations Research and Data Science Perspective. In: Blondin, M., Pardalos, P., Sanchis Sáez, J. (eds) Computational Intelligence and Optimization Methods for Control Engineering. Springer Optimization and Its Applications, vol 150. Springer, Cham. https://doi.org/10.1007/978-3-030-25446-9_11

Download citation

Publish with us

Policies and ethics

Search

Navigation