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The Influences of Post-annealing Temperature on the Properties of Sr0.6Ba0.4Nb2O6 Thin Films

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Intelligent Technologies and Engineering Systems

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 234))

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Abstract

In this study, Sr0.6Ba0.4Nb2O6 (SBN) thin films were prepared by radio-frequency (RF) magnetron sputtering. After finding the optimal deposition parameters, the deposited SBN thin films were annealed in a conventional furnace. In comparisons of XRD patterns, the annealing process had improved the crystallization and also had large effects on the crystalline orientation of SBN thin films. As the annealing temperature was risen from 600 to 700 °C, the diffraction intensities of (410) and (001) peaks really increased. Annealed at 800 °C, SBN thin films showed a highly c-axis crystalline orientation in (001) peak. Effects of annealing temperature on the electrical characteristics were recorded and analyzed, including the polarization-applied electric field curves, the capacitance-voltage curves, and the leakage current density-electric field curves. As the annealing process was used to treat on the as-deposited SBN thin films, the Pr, Ps, and Ec values were really improved. The theorems to cause the drastic variations in the capacitances, the memory windows, and the flat-band shift voltages of SBN thin films were also discussed.

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Author information

Authors and Affiliations

  1. Department of Industrial Education, National Taiwan Normal University, Taipei, Taiwan, R.O.C.

    Chin-Guo Kuo

  2. Department of Electronic Engineering, Kao Yuan University, Kaohsiung, Taiwan, R.O.C.

    Chien-Chen Diao

  3. Department of Avionic Engineering, Chinese Air Force Academy, Kaohsiung, Taiwan, R.O.C.

    Chien-Hung Chen

  4. Department of Electro-Optical Engineering, Southern Taiwan University, Tainan, Taiwan, R.O.C.

    Wen-Cheng Tzou

  5. Department of Chemical and Materials Engineering, National University of Kaohsiung, Kaohsiung, Taiwan, R.O.C.

    Cheng-Fu Yang

Authors
  1. Chin-Guo Kuo
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  2. Chien-Chen Diao
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  3. Chien-Hung Chen
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  4. Wen-Cheng Tzou
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  5. Cheng-Fu Yang
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Corresponding author

Correspondence to Cheng-Fu Yang .

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Editors and Affiliations

  1. School of Engineering, Mercer University, 151 Brookefield Drive, Macon, 31210, Georgia, USA

    Jengnan Juang

  2. National Changhua University of Educatio, No. 1, Jin De Road, Changhua City, 500, Taiwan R.O.C.

    Yi-Cheng Huang

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Kuo, CG., Diao, CC., Chen, CH., Tzou, WC., Yang, CF. (2013). The Influences of Post-annealing Temperature on the Properties of Sr0.6Ba0.4Nb2O6 Thin Films. In: Juang, J., Huang, YC. (eds) Intelligent Technologies and Engineering Systems. Lecture Notes in Electrical Engineering, vol 234. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-6747-2_91

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  • DOI: https://doi.org/10.1007/978-1-4614-6747-2_91

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  • Publisher Name: Springer, New York, NY

  • Print ISBN: 978-1-4614-6746-5

  • Online ISBN: 978-1-4614-6747-2

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