Abstract
Multiple sensors are applied in haptic devices designs. Even if they are not closed-loop controlled in a narrow sense of force or torque generation, they are used to detect movement ranges and limits or the detection of the presence of a user and its type of interaction with an object or human–machine interface (HMI). Almost any type of technical sensor had been applied in the context of haptic devices. Especially, the emerging market of gesture-based user interaction and integration of haptics due to ergonomic reasons extends the range of sensors potentially relevant for haptic devices. This chapter gives an introduction in technologies and design principles for force/torque sensors and addresses common types of positioning, velocity, and acceleration sensors. Further, sensors for touch and imaging sensors are addressed briefly in this section.
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Notes
- 1.
For substrate material mainly (layer-) ceramics are used. Less frequent is the use of metals, as isolating layers have to be provided then.
- 2.
Also single semiconducting elements without organic substrate are available. They are highly miniaturized (width of about \(230\,\upmu \text {m}\), length of about \(400\,\upmu \text {m}\)), but has to be insulated from the deformation element.
- 3.
Face centered cubic.
- 4.
By isolating arrays instead of single sensors in the last processing step.
- 5.
The force can be calculated taking the contact area into account.
- 6.
Due to the small electrodes a small basic capacitance is achieved, comp. equation in Fig. 10.20.
- 7.
With respect to “force” component.
- 8.
In vacuum it is equal to speed of light \(c_0 = 2.99792458\times 10^8\)m/s.
- 9.
Both versions are possible: Measuring the transmitted and the reflected radiation.
- 10.
This crystal is especially applicable for high temperature requirements.
- 11.
A semiconducting material.
- 12.
The examples presented here are discussed either for translatory and rotatory applications. But all principles may be applied to both, as a translation is just a rotation on a circle with infinite diameter.
References
Amor A, Budde T, Gatzen H (2006) A magnetoelastic microtransformer-based microstrain gauge. Sens Actuators A Phys 129(1–2):41–44. doi:10.1016/j.sna.2005.09.043
Arshak K, McDonagh D, Durcan M (2000) Development of new capacitive strain sensors based on thick film polymer and cermet technologies. Sens Actuat A Phys 79(2):102–114. doi:10.1016/S0924-4247(99)00275-7
Arshak K et al (2006) Development of high sensitivity oxide based strain gauges and pressure sensors. J Mater Sci Mater Electron 17(9):767–778. doi:10.1007/s10854-006-0013-4
Ballas R (2007) Piezoelectric multilayer beam bending actuators: static and dynamic behavior and aspects of sensor integration. Springer, Berlin, pp XIV, 358. ISBN: 978-3-540-32641-0
Bao M-H (2004) Micro mechanical transducers: pressure sensors, accelerometers and gyroscopes, vol 8, 2nd edn. Handbook of sensors and actuators 8. Elsevier, Amsterdam, pp XIV, 378. ISBN: 9780080524030
Barlian A et al (2009) Review: semiconductor piezoresistance for microsystems. Proc IEEE 97(3):513–552. doi:10.1109/JPROC.2009.2013612
Berkelman P et al (2003) A miniature microsurgical instrument tip force sensor for enhanced force feedback during robot-assisted manipulation. IEEE Trans Rob Autom 19(5):917–921. doi:10.1109/TRA.2003.817526
Beyeler F et al (2007) Design and calibration of a MEMS sensor for measuring the force and torque acting on a magnetic microrobot. J Micromech Microeng IOP 18:025004 (2007). doi:10.1088/0960-1317/18/2/025004
Botsis J et al (2004) Embedded fiber Bragg grating sensor for internal strain measurements in polymeric materials. Opt Lasers Eng 43. doi:10.1016/j.optlaseng.2004.04.009
Brand U, Büttgenbach S (2002) Taktile dimensionelle Messtechnik für Komponenten der Mikrosystemtechnik. In: tm-Technisches Messen/Plattform für Methoden. Systeme und Anwendungen der Messtechnik 12. doi:10.1524/teme.2002.69.12.542
Bray A, Barbato G, Levi R (1990) Theory and practice of force measurement. Monographs in physical measurement. Academic Press Inc., Waltham. ISBN: 978-0121284534
Burdea GC (1996) Force and touch feedback for virtual reality. Wiley-Interscience, New York
Caldwell DG, Lawther S, Wardle A (1996) Multi-modal cutaneous tactile feedback. In: Proceedings of the IEEE international conference on intelligent robots and systems. Diss, pp 465–472. doi:10.1109/IROS.1996.570820
Calvert P et al (2007) Piezoresistive sensors for smart textiles. Electroact Polym Actuators Devices (EAPAD) 2007:65241i-8. doi:10.1117/12.715740
Chase T, Luo R (1995) A thin-film flexible capacitive tactile normal/shear force array sensor. In: Proceedings of the 1995 IEEE IECON 21st international conference on industrial electronics, control, and instrumentation, vol 2. Orlando, FL, pp 1196–1201. doi:10.1109/IECON.1995.483967
Cochrane C et al (2007) Design and development of a flexible strain sensor for textile structures based on a conductive polymer composite. Sensors 7(4):473–492. doi:10.3390/s7040473
Colgate J, Brown J (1994) Factors affecting the Z-Width of a haptic display. In: Proceedings of IEEE international conference on robotics and automation, vol 4, pp 3205–3210. doi:10.1109/ROBOT.1994.351077
Cranny A et al (2005) Thick-film force, slip and temperature sensors for a prosthetic hand. Measur Sci Technol IOP 16:931–941. doi:10.1016/j.sna.2005.02.015
Dahiya RS, Valle M (2013) Robotic Tactile Sensing. Springer, Berlin. doi:10.1007/978-94-007-0579-1
Kurtz AD (1962) Adjusting crystal characteristics to minimaze temperature dependency. In: Dean M, Douglas RD (eds) Semiconductor and conventional strain gages. Academic Press Inc. New York, ISBN: 978-1114789906
Dölle M (2006) Field effect transistor based CMOS stress sensors. PhD thesis. IMTEK, University of Freiburg. ISBN: 978-3899594584
Ferdinand P et al (1997) Applications of bragg grating sensors in Europe. In: International conference on optical fiber sensors OFS. Wiliamsburg, Virginia. ISBN: 1-55752-485-8
First Sensor Technology GmbH (2009) T-Brücke. Technical report. First Sensor Technology GmbH. http://www.first-sensor.com/
Fung Y-C (1993) Biomechanics: mechanical properties of living tissues, 2nd edn. Springer, New York, pp XVIII, 568. ISBN: 0-387-97947-6; 3-540-97947-6
Gall M, Thielicke B, Poizat C (2005) Experimentelle Untersuchungen und FE-Simulation zum Sensor-und Aktuatoreinsatz von flächigen PZT-Funktionsmodulen. In: Deutsche Gesellschaft fürMaterialkunde e.V. http://publica.fraunhofer.de/dokumente/N-28844.html
Gehin C, Barthod C, Teissyre Y (2000) Design and characterization of new force resonant sensor. Sens Actuat A Phys 84: 65–69. doi: 10.1016/S0924-4247(99)00359-3
Goethals P (2008) Tactile feedback for robot assisted minimally invasive surgery: an overview. Technical report workshop, Eurohaptics conference. Department of Mechanical Engineering, K.U. Leuven
Gross D et al (2009) Technische Mechanik: Band 2: Elastostatik. Springer, Berlin. ISBN: 978- 3540243120
Hagedorn P et al (1998) The importance of rotor flexibility inultrasonic traveling wave motors. Smart MaterStruct 7:352–368. doi:10.1088/0964-1726/7/3/010
Hasegawa Y, Shikida M et al (2006) An active tactile sensor for detecting mechanical characteristics of contacted objects. J Micromech Microeng IOP 16:1625–1632. doi:10.1088/0960-1317/16/8/026
Hasser CJ, Daniels MW (1996) Tactile feedback with adaptive controller for a force-reflecting haptic display—Part I: design. In: Proceedings of the fifteenth southern biomedical engineering conference, pp 526–529. doi:10.1109/SBEC.1996.493294
Hoffmann K (1985) Eine Einführung in die Technik des Messens mit Dehnungsmessstreifen. Hottinger Baldwin Messtechnik GmbH (HBM)
Hou L (1999) Erfassung und Kompensation von Fehlereffekten bei der statischen Kraftmessung mit monolithischen Nd:YAG-Laserkristallen. PhD thesis, Universität Kassel. https://kobra.bibliothek.uni-kassel.de/handle/urn:nbn:de:hebis:34-159?mode=full
Inaudi D (2004) SOFO sensors for static and dynamic measurements. In: 1st FIG international symposium on engineering surveys for construction works and structural engineering. Nottingham. http://cordis.europa.eu/result/report/rcn/41123_en.html
Keil S (1995) Beanspruchungsermittlung mit Dehnungsmessstreifen. Cuneus Verlag. ISBN: 978- 3980418805
Kerdok A (2006) Characterizing the nonlinear mechanical response of liver to surgical manipulation. PhD thesis, Harvard University, Cambridge. URL: http://biorobotics.harvard.edu/pubs/akthesis.pdf
Kern T (2006) Haptisches Assistenzsystem für diagnostische und therapeutische Katheterisierungen. PhD thesis, Techische Universität Darmstadt, Institut für Elektromechanische Konstruktionen. http://tuprints.ulb.tu-darmstadt.de/761/
Kersey A et al. (1997) Fiber grating sensors. J Lightwave Technol 15(8). doi:10.1109/50.618377
Kim K et al (2007) Calibration of multi-axis MEMS force sensors using the shape-from-motion method. IEEE Sens J 7(3):344–351. doi:10.1109/JSEN.2006.890141
Kizilirmak G (2007) Frei applizierbare MOSFET-Sensorfolie zur Dehnungsmessung". PhD thesis, RWTH Aachen. http://darwin.bth.rwth-aachen.de/opus3/volltexte/2007/1973/pdf/Kizilirmak_Goekhan.pdf
Klages S (2004) Neue Sensorkonzepte zur Zungendruckmessung. Diplomarbeit, Darmstadt: Technische Universität Darmstadt, Institut für Elektromechanische Konstruktionen. http://tubiblio.ulb.tu-darmstadt.de/53658/
Kon S, Oldham K, Horowitz R (2007) Piezoresistive and piezoelectric MEMS strain sensors for vibration detection. In: Proceedings of SPIE, vol 6529, p 65292V-1. doi:10.1117/12.715814
Kunadt A et al (2010) Messtechnische Eigenschaften von Dehnungssensoren aus Kohlenstoff-Filamentgarn in einem Verbundwerkstoff. In: tm-TechnischesMessen/Plattform fürMethoden, Systeme und Anwendungen der Messtechnik 77(2):113–120. doi:10.1524/teme.2010.0014
Lang U et al (2009) Piezoresistive properties of PEDOT: PSS. Microelectron Eng 86(3):330–334. doi:10.1016/j.mee.2008.10.024
LaserComponents Group (2008) Faseroptische Sensoren. http://www.lasercomponents.com/de/1134.html
Latessa G et al (2009) Piezoresistive behaviour of flexible PEDOT.PSS based sensors. Sens Actuat B Chem 139(2):304–309. DOI:http://dx.doi.org/10.1016/j.snb.2009.03.063
Lenk A et al (ed) (2011) Electromechanical systems in microtechnology and mechatronics: electrical, mechanical and acoustic networks, their interactions and applications. Springer, Heidelberg
Luo F et al (1999) A fiber optic microbend sensor for distributed sensing application in the structural strain monitoring". Sens Actuat A Phys 75:41–44. doi:10.1016/S0924-4247(99)00043-6
Maiwald M et al (2010) INKtelligent printed strain gauges. Sens Actuat A Phys 162(2):198–201. doi:10.1016/j.sna.2010.02.019
Matsuzaki R, Todoroki A (2007) Wireless flexible capacitive sensor based on ultra-flexible epoxy resin for strain measurement of automobile tires. Sens Actuat A Phys 140(1):32–42. doi:10.1016/j.sna.2007.06.014
Mehner J (2000) Entwurf in der Mikrosystemtechnik, vol 9. Dresdner Beiträge zur Sensorik. Dresden University Press. ISBN 9783931828479
Meiss T et al (2007) Fertigung eines Miniaturkraftsensors mit asymmetrischem Grundkrper zur Anwendung bei Katheterisierungen. In: MikroSystemTechnik. https://www.vde-verlag.de/proceedings-de/563061014.html
Meiss T (2012) Silizium-Mikro-Kraftsensoren für haptische Katheterisierungen: Entwurf, Musterbau und Signalverarbeitung sowie erste Validierung des Assistenzsystems HapCath. PhD thesis, Technische Universität Darmstadt, Institut für Elektromechanische Konstruktionen. http://tuprints.ulb.tu-darmstadt.de/2952/
Meißner P (2007) Optische Nachrichtentechnik I—Skriptum zur Vorlesung. Skriptum
Meißner P (2006) Seminar zu speziellen Themen der optischen Nachrichtentechnik—Simulatorische und experimentelle Untersuchungen optischer WDM Übertragungssysteme. Skriptum
Meschede D (2007) Optics, light and lasers: the practical approach to modern aspects of photonics and laser physics. 2nd edn. Optik, Licht und Laser engl. Weinheim: Wiley-VCH-Verlag, pp IX, 560. ISBN: 978-3-527-40628-9
Michel J (1995) Drehmomentmessung auf Basis funkabfragbarer Oberflächenwellen-Resonatoren. PhD thesis, Technische Universität München. http://www.mst.ei.tum.de/forschung/veroeffentlichungen/abgeschlossene-dissertationen.html
Micron Instruments (2012) U-shaped semiconductor gage. http://www.microninstruments.com/
Müller M (2009) Untersuchungen zu Kraft-Momenten-Sensoren auf Basis von Faser-Bragg-Gittern. PhD thesis, Technische Universität München. https://mediatum.ub.tum.de/doc/956469/956469.pdf
Nakatani M, Howe R, Tacji S (2006) The fishbone tactile illusion. In: Eurohaptics. IEEE. Paris. http://lsc.univ-evry.fr/eurohaptics/upload/cd/papers/f46.pdf
Nührmann D (1998) Das große Werkbuch Elektronik, vol 7. Franzis’ Verlag, Poing. ISBN: 3772365477
Oddo C et al (2007) Investigation on calibration methods for multi-axis, linear and redundant force sensors. Measur Sci Technol 18:623. doi:10.1088/0957-0233/18/3/011
Palais JC (2005) Fiber optic communications, 5th edn. Pearson Prentice-Hall, Upper Saddle River, pp XIII, 441. ISBN: 0130085103
Pandey N, Yadav B (2006) Embedded fibre optic microbend sensor for measurement of high pressure and crack detection. Sens Actuat A Phys 128:33–36. doi:10.1016/j.sna.2006.01.010
Partsch U (2002) LTCC-kompatible Sensorschichten und deren Applikation in LTCC-Drucksensoren, 1st edn, vol 9. Elektronik-Technologie in Forschung und Praxis 9. Templin/Uckermark: Detert, pp III, 163. ISBN: 3934142117
Pasquale M (2003) Mechanical sensors and actuators. Sens Actuat A Phys 106(1–3):142–148. doi:10.1016/S0924-4247(03)00153-5
Peirs J et al (2004) A micro optical force sensor for force feedback during minimally invasive robotic surgery. Sens Actuat A Phys 115(2–3):447–455. doi:10.1016/j.sna.2004.04.057
Pfeifer G, Werthschützky R (1989) Drucksensoren. Verlag Technik. ISBN: 978-3341006603
Physik Instrumente (PI) GmbH (2010) Flächenwandlermodul. http://www.physikinstrumente.de/de/produkte/prdetail.php?sortnr=101790
Ping L, Yumei W (1996) An arbitrarily distributed tactile sensor array using piezoelectric resonator. In: Instrumentation and measurement technology conference IMTC-96. IEEE conference proceedings, vol 1. Brussels, pp 502–505. doi:10.1109/IMTC.1996.507433
Puers R (1993) Capacitive sensors: when and how to use them. Sens Actuat A Phys 37–38:93–105. doi:10.1016/0924-4247(93)80019-D
Rausch J (2012) Entwicklung und Anwendung miniaturisierter piezoresistiver Dehnungsmesselemente. Dissertation, Technische Universität Darmstadt. http://tuprints.ulb.tudarmstadt.de/3003/1/Dissertation-Rausch-online.pdf
Rausch J et al (2006) INKOMAN-Analysis of mechanical behaviour of liver tissue during intracorporal interaction. In: Gemeinsame Jahrestagung der Deutschen, Österreichischen und Schweizerischen Gesellschaften für Biomedizinische Technik 6(9)
Reindl L et al (2001) Passive funkauslesbare sensoren (wireless passive radio sensors). In: TM—Technisches messen/plattform für methoden, Systeme und anwendungen der Messtechnik 68(5):240. doi:10.1524/teme.2001.68.5.240
Rey P, Charvet P et al (1997) A high density capacitive pressure sensor array for fingerprint sensor application. In: International conference on solid-state sensors and actuators, IEEE. Chicago. doi:10.1109/SENSOR.1997.635738
Rosen J, Solazzo M, Hannaford M (2002) Task decomposition of laparoscopic surgery for objective evaluation of surgical residents learning curve using hidden markov model. In: computer aided surgery 7. http://www.ncbi.nlm.nih.gov/pubmed/12173880
Roths J, Kratzer P (2008) Vergleich zwischen optischen Faser-Bragg-Gitter-Dehnungssensoren und elektrischen Dehnungsmessstreifen. In: TM-Technisches Messen 75(12), pp 647–654. doi:10.1524/teme.2008.0903
Russell R (1992) A tactile sensory skin for measuring surface contours. In: Tencon 1992 region 10 conference. IEEE, Melbourne. doi:10.1109/TENCON.1992.271943
Saraf R, Maheshwari V (2006) High-resolution thin-film device to sense texture by touch. Technical report 5779, pp 1501–1504. http://www.sciencemag.org/content/312/5779/1501.full
Sato M, Poupyrev I, Harrison C (2012) Touché: enhancing touch interaction on humans, screens, liquids, and everyday objects. In: Proceedings of the 2012 ACMannual conference on human factors in computing systems, pp 483–492. doi:10.1145/2207676.2207743
Schaumburg H (1992) Sensoren, vol 3. Werkstoffe und Bauelemente der Elektrotechnik 3. Stuttgart: Teubner Verlag, p 517. ISBN: 3519061252
Schlüter V (2010) Entwicklung eines experimentell gestützten Bewertungsverfahrens zur Optimierung und Charakterisierung der Dehnungsübertragung oberflächenapplizierter Faser-Bragg-Gitter- Sensoren. PhD thesis, Bundesanstalt für Materialforschung und -prüfung - BAM. http://www.bam.de/de/service/publikationen/publikationen_medien/dissertationen/diss_56_vt.pdf
Schreier-Alt T (2006) Polymerverkapselung mechatronischer Systeme—Charakterisierung durch eingebettete Faser Bragg Gitter Sensoren". PhD thesis, Technische Universität Berlin, Fakultät IV - Elektrotechnik und Informatik. http://opus4.kobv.de/opus4-tuberlin/frontdoor/index/index/docId/1494
Sektion für UT (1999) Minimal Invasive Chirurgie Tübingen. Verbundprojekt TAMIC—Entwicklung eines taktilen Mikrosensors für die Minimal Invasive Chirurgie - Schlussbericht. Technical report. https://www.yumpu.com/de/document/view/6617211/verbundprojekttamic-entwicklung-eines-taktilen-experimentelle-
Sergio M et al (2003) A dynamically reconfigurable monolithic CMOS pressure sensor for smart fabric. IEEE J Solid-State Circ 38(6):966–968. doi:10.1109/JSSC.2003.811977
Simone C (2002) Modelling of neddle insertion forces of percutaneous therapies. Johns Hopkins University, Diplomarbeit. Baltimore. doi:10.1109/ROBOT.2002.1014848, http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1014848&tag=1
Sirohi J, Chopra I (2000) Fundamental understanding of piezoelectric strain sensors. J Int Mater Syst Struct 11(4):246–257. doi:10.1106/8BFB-GC8P-XQ47-YCQ0
Silicon Microstructures Incooperated (SMI) (2008) Pressure Sensors Products. http://www.si-micro.com/pressure-sensor-products.html
Smith C (1954) Piezoresistance effect in germanium and silicon. Phys. Rev. Am Phys Soc 94(1):42–49. doi:10.1103/PhysRev.94.42
Stavroulis S (2004) Rechnergestützter Entwurf von piezoresistiven Silizium-Drucksensoren mit realem mechanischem Wandler. Dissertation, Technische Universität Darmstadt, Institut für Elektromechanische Konstruktionen. http://tuprints.ulb.tu-darmstadt.de/473/
Stockmann M (2000) Mikromechanische Analyse der Wirkungsmechanismen elektrischer Dehnungsmessstreifen. Institut für Mechanik der technischen Universiät Chemnitz. http://www.qucosa.de/recherche/frontdoor/?tx_slubopus4frontend[id]=urn:nbn:de:bsz:ch1-200000494
Su L, Chiang K, Lu C (2005) Microbend-induced mode coupling in a graded-index multimode fiber. Appl Opt 44(34). doi:10.1364/AO.44.007394
Sun Y et al (2002) A bulkmicrofabricated multi-axis capacitive cellular force sensor using transverse comb drives. J Micromech Microeng IOP 12:832–840. doi:10.1088/0960-1317/12/6/314
Suster M et al (2006) A high-performance MEMS capacitive strain sensing system. J Microelectromech Syst 15:1069–1077. doi:10.1109/JMEMS.2006.881489
Tegin J, Wikander J (2005) Tactile sensing in intelligent robotic manipulation—a Review. Ind Rob 32(1):64–70. doi:10.1108/01439910510573318
Tietze U, Schenk C (2002) Halbleiter-Schaltungstechnik, 12th edn. Springer, Berlin, pp XXV, 1606. ISBN: 3-540-42849-6
Toda K (1994) Characteristics of interdigital transducers for mechanical sensing and nondestructive testing. Sens Actuat A Phys 44(3):241–247. doi:10.1016/0924-4247(94)00809-4
Tränkler H, Obermeier E (1998) Sensortechnik: Handbuch für Praxis undWissenschaft. Springer, Berlin. ISBN: 978-3-642-29941-4
Unterhofer K et al (2009) CMOS Stressmesssystem zur Charakterisierung von Belastungen auf MEMS Bauteile. In: MikroSystemTechnik KONGRESS 2009. VDE VERLAG GmbH. https://www.vde-verlag.de/proceedings-en/453183009.html
Valdastri P et al (2005) Characterization of a novel hybrid silicon three-axial force sensor. Sens Actuat A Phys 123–124. In: Eurosensors XVIII 2004—The 18th European conference on Solid-State Transducers, pp 249–257. doi:10.1016/j.sna.2005.01.006
Vasarhelyi G, Adama M et al (2006) Effects of the elastic cover on tactile sensor arrays. Sens Actuat A Phys 132:245–251. doi:10.1016/j.sna.2006.01.009
Vasarhelyi G, Fodor B, Roska T (2007) Tactile sensing-processing—interface-cover geometry and the inverse-elastic problem. Sens Actuat A Phys 140:8–18. doi:10.1016/j.sna.2007.05.028
Vazsonyi E et al (2005) Three-dimensional force sensor by novel alkaline etching technique. Sens Actuat A Phys 123–124:620–626. doi:10.1016/j.sna.2005.04.035
Voyles R, Morrow J, Khosla P (1997) The shape from motion approach to rapid and precise force/- torque sensor calibration. Trans ASME-G-J Dyn Syst Measur Control 119(2):229–235. doi:10.1115/1.2801238
Werthschützky R (2007) Mess- und Sensortechnik - Band II: Sensorprinzipien. Vorlesungsskriptum
Werthschützky R, Zahout C (2003) Angepasste Signalverarbeitung für piezoresistive Drucksensoren. In: tm-Technisches Messen/Plattform für Methoden, Systeme und Anwendungen der Messtechnik, pp 258–264. doi:10.1524/teme.70.5.258.20043
Young W, Budynas R (2002) Roark’s formulas for stress and strain, vol 6. McGraw-Hill, New York. ISBN: 007072542X
Ziemann O (2007) POF-Handbuch: optische Kurzstrecken-Übertragungssysteme, 2nd edn. Springer, Berlin, pp XXX, 884. ISBN: 978-3540490937
Zwicker TU ((1989) Strain sensor with commercial SAWR. Sens Actuat A Phys 17(1–2):235–239. doi:10.1016/0250-6874(89)80085-X
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Rausch, J., Kern, T.A., Hatzfeld, C. (2014). Sensor Design. In: Hatzfeld, C., Kern, T. (eds) Engineering Haptic Devices. Springer Series on Touch and Haptic Systems. Springer, London. https://doi.org/10.1007/978-1-4471-6518-7_10
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