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X-Ray Optics

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Springer Handbook of Lasers and Optics

Part of the book series: Springer Handbooks ((SHB))

Abstract

Due to the weak interaction of hard X rays with matter it is generally difficult to manipulate X rays by optical components. As a result, there have been many complementary approaches to making X-ray optics, exploiting refraction, reflection, and diffraction of X-rays by matter. In this chapter, we describe the physics that underly X-ray optics and explain the work principles and performances of a variety of X-ray optics, including refractive X-ray lenses, reflective optics, such as mirrors and waveguides, and diffractive optics, such as multilayer and crystal optics and Fresnel zone plates.

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Abbreviations

ESRF:

European Synchrotron Radiation Facility

EUV:

extreme ultraviolet

KB:

Kirkpatrick–Baez

NA:

numerical aperture

NFL:

nanofocusing lenses

SEM:

scanning electron microscope

References

  1. C. T. Chantler: Theoretical form factor, attenuation and scattering tabulation for Z = 1–92 from E = 1–10 eV to E = 0.4–10.0 MeV, Journal of Physical and Chemical Reference Data 24, 71 (1995)

    Article  ADS  Google Scholar 

  2. R. W. James: The Optical Principles of the Diffraction of X-rays (Cornell Univ. Press, Ithaca 1967)

    Google Scholar 

  3. E. Hecht: Optics (Addison–Wesley, Reading 1987)

    Google Scholar 

  4. W. C. Röntgen: Über eine neue Art von Strahlen, Sitzungsberichte der phys.-med. Ges. (Physikalisch-medizinische Gesellschaft, Würzburg 1895)

    Google Scholar 

  5. S. Suehiro, H. Miyaji, H. Hayashi: Refractive lens for X-ray focus, Nature 352, 385–386 (1991)

    Article  ADS  Google Scholar 

  6. A. Michette: No X-ray lens, Nature 353, 510 (1991)

    ADS  Google Scholar 

  7. B. Yang: Fresnel and refractive lenses for X-rays, Nucl. Instrum. Methods A 328, 578–587 (1993)

    Article  ADS  Google Scholar 

  8. A. Snigirev, V. Kohn, I. Snigireva, B. Lengeler: A compound refractive lens for focusing high energy X-rays, Nature 384, 49 (1996)

    Article  ADS  Google Scholar 

  9. B. Lengeler, C. G. Schroer, M. Richwin, M. Drakopoulos, A. Snigirev, I. Snigireva: A microscope for hard X-rays based on parabolic compound refractive lenses, Appl. Phys. Lett. 74(26), 3924–3926 (1999)

    Article  ADS  Google Scholar 

  10. B. Lengeler, C. Schroer, B. Benner, M. Richwin, A. Snigirev, I. Snigireva, M. Drakopoulos: Imaging by parabolic refractive lenses in the hard X-ray range, J. Synchrotron Rad. 6, 1153–1167 (1999)

    Article  Google Scholar 

  11. V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, E. Voges: X-ray refractive planar lens with minimized absorption, Appl. Phys. Lett. 77(24), 4058–4060 (2000)

    Article  ADS  Google Scholar 

  12. M. A. Piestrup, J. T. Cremer, H. R. Beguiristain, C. K. Gary, R. H. Pantell: Two-dimensional X-ray focusing from compound lenses made of plastic, Rev. Sci. Instrum. 71(12), 4375–4379 (2000)

    Article  ADS  Google Scholar 

  13. R. N. Cahn, M. Danielsson, M. Lundqvist, D. R. Nygren: Focusing hard X-rays with old LPʼs, Nature 404, 951 (2000)

    ADS  Google Scholar 

  14. E. M. Dufresne, D. A. Arms, R. Clarke, N. R. Pereira, S. B. Dierker, D. Foster: Lithium metal for X-ray refractive optics, Appl. Phys. Lett. 79(25), 4085–4087 (2001)

    Article  ADS  Google Scholar 

  15. B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, M. Kuhlmann, J. Meyer, C. Zimprich: Parabolic refractive X-ray lenses, J. Synchrotron Rad. 9, 119–124 (2002)

    Article  Google Scholar 

  16. H. R. Beguiristain, J. T. Cremer, M. A. Piestrup, C. K. Gary, R. H. Pantell: X-ray focusing with compound refractive lenses made from beryllium, Opt. Lett. 27(9), 778–780 (2002)

    Article  ADS  Google Scholar 

  17. B. Cederström, M. Lundqvist, C. Ribbing: Multi-prism X-ray lens, Appl. Phys. Lett. 81(8), 1399–1401 (2002)

    Article  ADS  Google Scholar 

  18. B. Nöhammer, J. Hoszowska, A. K. Freund, C. David: Diamond planar refractive lenses for third- and forth-generation X-ray sources, J. Synchrotron Rad. 10, 168–171 (2003)

    Article  Google Scholar 

  19. B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, I. Snigireva: Refractive X-ray lenses, J. Phys. D 38, A218–A222 (2005)

    Article  ADS  Google Scholar 

  20. C. G. Schroer, M. Kuhlmann, B. Lengeler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, I. Snigireva: Beryllium parabolic refractive X-ray lenses in Design and Microfabrication of Novel X-Ray Optics, Proc. SPIE, Vol. 4783, ed. by D. C. Mancini (SPIE, Bellingham 2002) pp. 10–18

    Google Scholar 

  21. C. G. Schroer, M. Kuhlmann, B. Lengeler, M. Richwin, B. Griesebock, R. Frahm, E. Ziegler, A. Mashayekhi, D. Haeffner, J.-D. Grunwaldt, A. Baiker: Mapping the chemical states of an element inside a sample using tomographic X-ray absorption spectroscopy, Appl. Phys. Lett. 82(19), 3360–3362 (2003)

    Article  ADS  Google Scholar 

  22. C. G. Schroer, M. Kuhlmann, U. T. Hunger, O. Kurapova, S. Feste, F. Frehse, B. Lengeler, M. Drakopoulos, A. Somogyi, A. S. Simionovici, A. Snigirev, I. Snigireva, C. Schug: Nanofocusing parabolic refractive X-ray lenses, Appl. Phys. Lett. 82(9), 1485–1487 (2003)

    Article  ADS  Google Scholar 

  23. C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, M. Küchler: Hard X-ray nanoprobe based on refractive X-ray lenses, Appl. Phys. Lett. 87(12), 124103 (2005)

    Article  ADS  Google Scholar 

  24. C. G. Schroer, B. Lengeler: Focusing hard X-rays to nanometer dimensions by adiabatically focusing lenses, Phys. Rev. Lett. 94, 054802 (2005)

    Article  ADS  Google Scholar 

  25. P. Kirkpatrick, A. Baez: Formation of optical images by X-rays, J. Opt. Soc. Am. 38(9), 766–774 (1948)

    Article  ADS  Google Scholar 

  26. G. E. Ice, B. C. Larson: Three-dimensional X-ray structural microscopy using polychromatic microbeams, MRS Bull. 29(3), 170–176 (2004)

    Article  Google Scholar 

  27. H. Mimura, S. Matsuyama, H. Yumoto, H. Harea, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi: Hard X-ray diffraction-limited nanofocusing with unprecedentedly accurate mirrors in X-Ray Microscopy, Vol. 7, ed. by Y. Kagoshima (IPAP Conf. Ser., Tokyo 2006) pp. 100–102

    Google Scholar 

  28. Y. P. Feng, S. K. Sinha, H. W. Deckman, J. B. Hastings, D. S. Siddons: X-ray flux enhancement in thin-film waveguides using resonant beam couplers, Phys. Rev. Lett. 71(4), 537–540 (1998)

    Article  ADS  Google Scholar 

  29. A. Jarre, C. Fuhse, C. Ollinger, J. Seeger, R. Tucoulou, T. Salditt: Two-dimensional hard X-ray beam compression by combined focusing and waveguide optics, Phys. Rev. Lett. 94, 074801 (2005)

    Article  ADS  Google Scholar 

  30. M. J. Zwanenburg, H. G. Ficke, H. Neerings: A planar X-ray waveguide with a tunable air gap for the structural investigation of confined fluids, Rev. Sci. Instrum. 71(4), 1723–1732 (2000)

    Article  ADS  Google Scholar 

  31. C. Bergemann, H. Keymeulen: Focusing X-ray beams to nanometer dimensions, Phys. Rev. Lett. 91(20), 204801 (2003)

    Article  ADS  Google Scholar 

  32. J. Underwood: Layered synthetic microstructures as bragg diffractors for X-rays and extreme ultraviolet theory and predicted performance, Appl. Opt. 20(17), 3027–3034 (1981)

    Article  ADS  Google Scholar 

  33. M. Schuster: Parallel-beam coupling into channel-cut monochromators using curved graded multilayers, J. Phys. D: Appl. Phys. 28, A270–A275 (1995)

    Article  ADS  Google Scholar 

  34. M. Schuster, H. Göbel, L. Brügemann, D. Bahr, F. Burgäzy, C. Michaelsen, M. Störmer, P. Ricardo, R. Dietsch, T. Holz, H. Mai: Laterallygraded multilayer opticsfor x-ray analysis, Proc. SPIE, Vol. 3767, ed. by C. A. MacDonald (SPIE, Bellingham 1999) pp. 183–198

    Google Scholar 

  35. O. Hignette, G. Rostaing, P. Cloetens, A. Rommeveaux, W. Ludwig, A. Freund: Submicron focusing of hard X-rays with reflecting surfaces at the ESRF, in X-Ray Micro- and Nano-Focusing: Applications and Techniques II, Proc. SPIE, Vol. 4499, ed. by I. McNulty (SPIE, Bellingham 2001) pp. 105–116

    Google Scholar 

  36. O. Hignette, P. Cloetens, G. Rostaing, P. Bernard, C. Morawe: Efficient sub 100 nm focusing of hard X-rays, Rev. Sci. Instrum. 76, 063709 (2005)

    Article  ADS  Google Scholar 

  37. M. Born, E. Wolf: Principles of Optics (Cambridge Univ. Press, Cambridge 1999)

    Google Scholar 

  38. V. Aristov, A. Erko, V. Martynov: Principles of Bragg–Fresnel multilayer optics, Rev. Phys. Appl. 23, 1623–1630 (1988)

    Google Scholar 

  39. W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, D. T. Attwood: Soft X-ray microscopy at a spatial resolution better than 15 nm, Nature 435(30), 1210–1213 (2005)

    Article  ADS  Google Scholar 

  40. Y. Suzuki, A. Takeuchi, H. Takano, H. Takenaka: Performance test of fresnel zone plate with 50 nm outermost zone width in hard X-ray region, Jap. J. Appl. Phys. 44, 1994–1998 (2005)

    Article  ADS  Google Scholar 

  41. Xradia, concord; www.xradia.com. (Nov. 15, 2006)

  42. J. Maser: Theoretical description of the diffraction properties of zone plates with small outermost zone width in X-Ray Microscopy IV, ed. by V. V. Aristov, A. I. Erko (Institute of Microelectronics Technology, Russian Academy of Sciences, Institute Microelectronics Technology, Chernogolovka 1994) pp. 523–530

    Google Scholar 

  43. C. G. Schroer: Focusing hard X-rays to nanometer dimensions using Fresnel zone plates, Phys. Rev. B 74, 033405 (2006)

    Article  ADS  Google Scholar 

  44. C. Liu, R. Conley, A. T. Macrander, J. Maser, H. C. Kang, M. A. Zurbuchen, G. B. Stephenson: Depth-graded multilayers for application in transmission geometry as linear zone plates, J. Appl. Phys. 98, 113519 (2005)

    Article  ADS  Google Scholar 

  45. H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, J. Maser, S. Bajt, H. N. Chapman: High-efficiency diffractive X-ray optics from sectioned multilayers, Appl. Phys. Lett. 86, 151109 (2005)

    Article  ADS  Google Scholar 

  46. H. C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, S. Vogt: Nanometer linear focusing of hard X-rays by a multilayer Laue lens, Phys. Rev. Lett. 96, 127401 (2006)

    Article  ADS  Google Scholar 

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Author information

Authors and Affiliations

  1. Institute of Structural Physics, Dresden University of Technology, Zellescher Weg 16, 01062, Dresden, Germany

    Christian Schroer Prof.

  2. II. Physikalisches Institut, Aachen University (RWTH), Templergraben 55, 52056, Aachen, Germany

    Bruno Lengeler Prof.

Authors
  1. Christian Schroer Prof.
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  2. Bruno Lengeler Prof.
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Corresponding authors

Correspondence to Christian Schroer Prof. or Bruno Lengeler Prof. .

Editor information

Editors and Affiliations

  1. Department of Physics, University of Kassel, Heinrich-Plett-Str. 40, 34132, Kassel, Germany

    Frank Träger Prof.

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Schroer, C., Lengeler, B. (2007). X-Ray Optics. In: Träger, F. (eds) Springer Handbook of Lasers and Optics. Springer Handbooks. Springer, New York, NY. https://doi.org/10.1007/978-0-387-30420-5_18

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