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Handbook of Nanophase and Nanostructured Materials pp 442–466Cite as

Scanning Electron Microscopy

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Introduction

Scanning electron microscopy (SEM) has become one of the most versatile and useful methods for direct imaging, characterization, and studying of solid surfaces. Just a simple partial enumeration of possible modes of the scanning electron microscope operation shows its capabilities:

Secondary, backscattered, and absorb electron imaging and (SEI, BEI, and AEI, correspondingly), magnetic contrast (Type Iinteraction with secondary electrons, type IIinteraction with backscattered electrons, type IIIpolarization of secondary electrons (SEMPA, scanning electron microscopy with polarization analysis)), X-ray microanalyzer (energy-dispersive spectroscopy (EDS) and wavelength-dispersive spectroscopy (WDS)), X-ray mapping, voltage contrast, electron beam induced current (EBIC) or charge collection microscopy (CCM), cathodoluminescence (CL), scanning deep level transient spectroscopy (SDLTS), electron channeling (ECP), electron backscattered patterns (EBSP) and electron backscattered...

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Editor information

Editors and Affiliations

  1. School of Materials Science and Engineering, Center for Nanoscience and Nanotechnology, Georgia Institute of Technology, Atlanta, Georgia, USA

    Zhong Lin Wang

  2. Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan, USA

    Yi Liu

  3. Institute of Physics, BeijingLaboratory of Electron Microscopy, Chinese Academy of Science, Beijing, China

    Ze Zhang

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© 2003 Kluwer Academic Publishers/Plenum Publishers

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(2003). Scanning Electron Microscopy. In: Wang, Z., Liu, Y., Zhang, Z. (eds) Handbook of Nanophase and Nanostructured Materials. Springer, Boston, MA. https://doi.org/10.1007/0-387-23814-X_14

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  • DOI: https://doi.org/10.1007/0-387-23814-X_14

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-306-47249-7

  • Online ISBN: 978-0-387-23814-2

  • eBook Packages: Springer Book Archive

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