Reference Work Entry

Encyclopedia of Microfluidics and Nanofluidics

pp 1791-1791

RIE Lag

Synonyms

Feature size dependent etching

Definition

RIE lag is the phenomenon of the etching rate related to the feature size. The larger the feature size, the higher the etching rate. As the larger feature size results in the lower etching rate, it is called inverse RIE lag.

Cross References

Aspect Ratio Dependent Etching

Anisotropic Etching

Reactive Ion Etching (RIE)

Plasma Etching

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