Editors:
- Covers a wide range of emerging nanofabrication techniques
- Approximately 200 figures and tables to explain the topic
- Content provided by leading researchers in the field
- Includes supplementary material: sn.pub/extras
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Table of contents (13 chapters)
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Front Matter
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Introduction
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Front Matter
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About this book
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Editors and Affiliations
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, National Research Council of Canada, National Institute for Nanotechnology, Edmonton, Canada
Maria Stepanova
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, Electrical and Computer Engineering, University of Alberta, Edmonton, Canada
Steven Dew
Bibliographic Information
Book Title: Nanofabrication
Book Subtitle: Techniques and Principles
Editors: Maria Stepanova, Steven Dew
DOI: https://doi.org/10.1007/978-3-7091-0424-8
Publisher: Springer Vienna
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag/Wien 2012
Hardcover ISBN: 978-3-7091-0423-1Published: 09 November 2011
Softcover ISBN: 978-3-7091-1666-1Published: 28 January 2014
eBook ISBN: 978-3-7091-0424-8Published: 08 November 2011
Edition Number: 1
Number of Pages: VIII, 344
Topics: Nanotechnology, Nanochemistry, Nanotechnology and Microengineering, Optics, Lasers, Photonics, Optical Devices