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Nano-tribology and Materials in MEMS

  • Book
  • © 2013

Overview

Editors:
  1. Sujeet K. Sinha

    1. Department of Mechanical Engineering, Indian Institute of Technology, Kanpur, India

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  2. N. Satyanarayana

    1. Department of Mechanical Engineering, National University of Singapore, Singapore, Singapore

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  3. Seh Chun Lim

    1. Department of Mechanical Engineering, National University of Singapore, Singapore, Singapore

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  • Brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology
  • Provides a helpful resource in the industrial growth of MEMS
  • Written by known experts
  • Includes supplementary material: sn.pub/extras

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Table of contents (11 chapters)

  1. Front Matter

    Pages i-viii
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  2. Nanotribological Phenomena, Principles and Mechanisms for MEMS

    • Biswajit Saha , Erjia Liu, Shu Beng Tor
    Pages 1-51

  3. Biomimetic Inspiration Regarding Nano-Tribology and Materials Issues in MEMS

    • Ille C. Gebeshuber
    Pages 53-79

  4. Nanotribology and Wettability of Molecularly Thin Film

    • Yufei Mo, Liping Wang
    Pages 81-110

  5. Mechanical Properties and Deformation Behavior of Ni Nanodot-Patterned Surfaces

    • Min Zou, Hengyu Wang
    Pages 111-145

  6. Biomimetic Surfaces for Tribological Applications in Micro/Nano-Devices

    • R. Arvind Singh, Eui-Sung Yoon, Kahp-Yang Suh, Deok-Ho Kim
    Pages 147-162

  7. Molecular Simulation of Polymer Nanotribology

    • Y. K. Yew, Z. C. Su, Sujeet K. Sinha, V. B. C. Tan
    Pages 163-181

  8. Atomistic Modeling of Polymeric Nanotribology

    • L. Dai, V. B. C. Tan
    Pages 183-198

  9. Probing the Complexities of Friction in Submicron Contacts Between Two Pristine Surfaces

    • Wun Chet Davy Cheong, Anna Marie Yong
    Pages 199-213

  10. Nano/Micro-Tribological Properties of MEMS/NEMS Materials

    • R. Arvind Singh, N. Satyanarayana, Sujeet K. Sinha
    Pages 215-229

  11. Friction and Wear Studies of Ultra-Thin Functionalized Polyethylene Film Chemisorbed on Si with an Intermediate Benzophenone Layer

    • Myo Minn, Sujeet K. Sinha
    Pages 231-246

  12. Localized Lubrication of Micromachines: A Novel Method of Lubrication on Micromechanical Devices

    • L. Y. Jonathan, V. Harikumar, N. Satyanarayana, Sujeet K. Sinha
    Pages 247-271

  13. Back Matter

    Pages 273-275
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Keywords

About this book

This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.

Editors and Affiliations

  • Department of Mechanical Engineering, Indian Institute of Technology, Kanpur, India

    Sujeet K. Sinha

  • Department of Mechanical Engineering, National University of Singapore, Singapore, Singapore

    N. Satyanarayana, Seh Chun Lim

Bibliographic Information

  • Book Title: Nano-tribology and Materials in MEMS

  • Editors: Sujeet K. Sinha, N. Satyanarayana, Seh Chun Lim

  • DOI: https://doi.org/10.1007/978-3-642-36935-3

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Engineering, Engineering (R0)

  • Copyright Information: Springer-Verlag Berlin Heidelberg 2013

  • Hardcover ISBN: 978-3-642-36934-6Published: 11 September 2013

  • Softcover ISBN: 978-3-662-50698-1Published: 23 August 2016

  • eBook ISBN: 978-3-642-36935-3Published: 27 August 2013

  • Edition Number: 1

  • Number of Pages: VIII, 275

  • Number of Illustrations: 68 b/w illustrations, 89 illustrations in colour

  • Topics: Nanotechnology and Microengineering, Tribology, Corrosion and Coatings, Mechatronics

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