Overview
- Only monograph describing the current state of the art
- Combines the standard techniques with the results of the author’s research
Part of the book series: Springer Series in Advanced Microelectronics (MICROELECTR., volume 19)
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Table of contents (5 chapters)
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Front Matter
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Back Matter
Keywords
About this book
Gettering Defects in Semiconductors fulfills three basic purposes:
– to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics;
– to identify new directions in research, particularly to enhance the perspective of professionals and young researchers and specialists;
– to fill a gap in the contemporary literature on the underlying semiconductor-material theory.
The authors address not only well-established gettering techniques but also describe contemporary trends in gettering technologies from an international perspective. The types and properties of structural defects in semiconductors, their generating and their transforming mechanisms during fabrication are described. The primary emphasis is placed on classifying and describing specific gettering techniques, their specificity arising from both their position in a general technological process and the regimes of their application. This book addresses both engineers and material scientists interested in semiconducting materials theory and also undergraduate and graduate students in solid–state microelectronics and nanoelectronics. A comprehensive list of references provides readers with direction for further reading.
Authors and Affiliations
Bibliographic Information
Book Title: Gettering Defects in Semiconductors
Authors: Victor A. Perevoschikov, Vladimir D. Skoupov
Series Title: Springer Series in Advanced Microelectronics
DOI: https://doi.org/10.1007/3-540-29499-6
Publisher: Springer Berlin, Heidelberg
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2005
Hardcover ISBN: 978-3-540-26244-2Published: 15 September 2005
Softcover ISBN: 978-3-642-06570-5Published: 21 October 2010
eBook ISBN: 978-3-540-29499-3Published: 12 December 2005
Series ISSN: 1437-0387
Series E-ISSN: 2197-6643
Edition Number: 1
Number of Pages: XVI, 388
Number of Illustrations: 70 b/w illustrations
Topics: Optical and Electronic Materials, Industrial Chemistry/Chemical Engineering