Overview
- Comprehensive survey of existing semiconductor-based devices followed by a detailed description of the benefits of using CMOS-technology
Part of the book series: Microtechnology and MEMS (MEMS)
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Table of contents (6 chapters)
Keywords
About this book
This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all important issues related to the realization of chemical microsensors in CMOS technology, it also addresses experts well familiar with the field.
After a brief introduction, the fundamentals of chemical sensing are presented. Fabrication and processing steps that are commonly used in the semiconductor industry are then detailed followed by a short description of the microfabrication techniques, and of the CMOS substrate and materials. Thereafter, a comprehensive overview of semiconductor-based and CMOS-based transducer structures for chemical sensors is given. CMOS-technology is then introduced as platform technology, which enables the integration of these microtransducers with the necessary driving and signal conditioning circuitry on the same chip. In a next section, the development of monolithic multisensor arrays and fully developed microsystems with on-chip sensor control and standard interfaces is described. A short section on packaging shows that techniques from the semiconductor industry can be applied to chemical microsensor packaging. The book concludes with a brief outlook on future developments, such as the realization of more complex integrated microsensor systems and methods to interface biological materials, such as cells, with CMOS microelectronics.
Authors, Editors and Affiliations
Bibliographic Information
Book Title: Integrated Chemical Microsensor Systems in CMOS Technology
Authors: Andreas Hierlemann
Editors: H. Baltes, Hiroyuki Fujita, Dorian Liepmann
Series Title: Microtechnology and MEMS
DOI: https://doi.org/10.1007/b138987
Publisher: Springer Berlin, Heidelberg
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2005
Hardcover ISBN: 978-3-540-23782-2Published: 21 February 2005
Softcover ISBN: 978-3-642-06274-2Published: 22 October 2010
eBook ISBN: 978-3-540-27372-1Published: 29 August 2005
Series ISSN: 1615-8326
Series E-ISSN: 2365-0680
Edition Number: 1
Number of Pages: X, 230
Number of Illustrations: 120 b/w illustrations, 5 illustrations in colour
Topics: Nanotechnology, Analytical Chemistry, Optical and Electronic Materials, Surfaces and Interfaces, Thin Films, Measurement Science and Instrumentation, Electronics and Microelectronics, Instrumentation