1. Recent progress in low temperature nanoimprint lithography

   • Hongwen Sun

   Review Paper 19 November 2014 Pages: 1 - 7

   

2. RETRACTED ARTICLE: A MEMS packaged capacitive pressure sensor employing 3C-SiC with operating temperature of 500 °C

   • Noraini Marsi
   • Burhanuddin Yeop Majlis
   • Faisal Mohd-Yasin

   Review Paper 04 October 2014 Pages: 9 - 20

   

3. Development research of thermocouple-based microwave power sensors using AC/DC substitution method

   • De-bo Wang
   • Wen-juan Bai
   • Jing Chen

   Technical Paper 18 November 2014 Pages: 21 - 28

   

4. Experimental study of a low-g micromachined electrostatically suspended accelerometer for space applications

   • G. Y. Ma
   • F. T. Han
   • X. J. Yan

   Technical Paper 19 October 2013 Pages: 29 - 39

   

5. Multichannel oscillatory-flow PCR micro-fluidic chip with controllable temperature gradient

   • Jinquan Nie
   • Yulong Zhao
   • Niancai Peng

   Technical Paper 22 January 2014 Pages: 41 - 48

   

6. Improvement of measurement sensitivity near contact in intensity-interferometry flying height testers

   • Korakoch Phetdee
   • Alongkorn Pimpin
   • Werayut Srituravanich

   Technical Paper 08 April 2014 Pages: 49 - 53

   

7. Design, fabrication and characterization of high performance SOI MEMS piezoresistive accelerometers

   • Anindya Lal Roy
   • Tarun Kanti Bhattacharyya

   Technical Paper 06 September 2013 Pages: 55 - 63

   

8. Hydrodynamic focusing micropump module with PDMS/nickel-particle composite diaphragms for microfluidic systems

   • Jeonghwan Kim
   • Kyung-Nam Kang
   • Pratul K. Ajmera

   Technical Paper 28 January 2014 Pages: 65 - 73

   

9. A new validation method for clinical grade micro-encapsulation: quantitative high speed video analysis of alginate capsule

   • Ina Meiser
   • Sabine C. Müller
   • Heiko Zimmermann

   Technical Paper Open access 17 October 2013 Pages: 75 - 84

   

10. Design optimization of linearly DC controlled staggered vertical comb drive actuators

    • Alaa Elhady
    • Diaa Khalil
    • M. A. E. Mahmoud

    Technical Paper 29 October 2013 Pages: 85 - 90

    

11. Design and characterization of miniature fluid dynamic bearing using novel multi-step elliptical grooves

    • Chien-Yu Chen
    • Chien-Sheng Liu
    • Yu-Cheng Li

    Technical Paper 14 December 2013 Pages: 91 - 100

    

12. Optimal design of piezoelectric micromachined modal gyroscope (PMMG) with modes matched: modal analysis

    • Xiaosheng Wu
    • Wenyuan Chen
    • Abdolvand Reza

    Technical Paper 21 April 2014 Pages: 101 - 108

    

13. A new silicon biaxial decoupled resonant micro-accelerometer

    • Bo Yang
    • Hui Zhao
    • Xiaojun Liu

    Technical Paper 11 February 2014 Pages: 109 - 115

    

14. Graphene diaphragm analysis for pressure or acoustic sensor applications

    • Dongxue Wang
    • Shangchun Fan
    • Wei Jin

    Technical Paper 19 October 2013 Pages: 117 - 122

    

15. Biomimetic superhydrophobic polymer surfaces by replication of hierarchical structures fabricated using precision tooling machine and anodized aluminum oxidation

    • Donghui Chu
    • Akihiko Nemoto
    • Hiroshi Ito

    Technical Paper 22 April 2014 Pages: 123 - 130

    

16. A near zero skew actuation mechanism for hard disk drives

    • Zhimin He
    • Jianqiang Mou
    • Wuzhong Lin

    Technical Paper 17 November 2013 Pages: 131 - 137

    

17. Implantable electrode array with platinum black coating for brain stimulation in fish

    • Chuan Zhang
    • Jing-Quan Liu
    • Chun-Sheng Yang

    Technical Paper 12 December 2013 Pages: 139 - 145

    

18. Development of a simple and reliable PDMS interconnect for high throughput microfluidic applications

    • C. J. Mu
    • Z. Y. Zhang
    • X. C. Cao

    Technical Paper 17 December 2013 Pages: 147 - 154

    

19. Integration method of silicon sensors on SU-8-based microfluidic platforms

    • Francisco Perdigones
    • Carmen Aracil
    • Pablo Giménez

    Technical Paper 01 February 2014 Pages: 155 - 161

    

20. Design and fabrication of a novel tri-axis gyroscope with sensing diagonal-pendulums

    • M. C. Wang
    • J. W. Jiao
    • W. J. Liu

    Technical Paper 11 December 2014 Pages: 163 - 168

    

21. Piezoelectric micro power harvester using flow-induced vibration for intrastructure health monitoring applications

    • Young Ho Seo
    • Byeong-Hee Kim
    • Doo-Sun Choi

    Technical Paper 22 October 2013 Pages: 169 - 172

    

22. Ultra-small micro pressure sensor chip design and fabrication featuring high-sensitivity and good-linearity

    • B. R. Zheng
    • C. Zhou
    • W. Xue

    Technical Paper 21 January 2014 Pages: 173 - 179

    

23. Electromagnetic modeling and parameter extraction of RF-MEMS switch

    • Ashish Kumar Sharma
    • Navneet Gupta

    Technical Paper 01 November 2013 Pages: 181 - 185

    

24. Numerical study of the effect of microchannel geometry on temperature gradient focusing using the Joule heating effect

    • Taeheon Han
    • Sungjin Park
    • Sun Min Kim

    Technical Paper 31 May 2014 Pages: 187 - 194

    

25. Electrothermal modeling, fabrication and analysis of low-power consumption thermal actuator with buckling arm

    • Hongyun So
    • Albert P. Pisano

    Technical Paper 31 October 2013 Pages: 195 - 202

    

26. Fabrication of through substrate grooves on GaAs by deep wet etching and its application in GaAs CCD wafer level packaging

    • S. F. Wang
    • M. Han
    • L. Luo

    Technical Paper 06 November 2013 Pages: 203 - 207

    

27. High temperature characteristic for wireless pressure LTCC-based sensor

    • Tan Qiulin
    • Kang Hao
    • Luo Tao

    Technical Paper 19 February 2014 Pages: 209 - 214

    

28. Suspended high Q integrated inductor by wafer level packaging technology

    • M. Han
    • S. F. Wang
    • Le Luo

    Technical Paper 12 December 2013 Pages: 215 - 219

    

29. Study on effects of the damping ratio on output performance of micro electromagnetic vibration energy harvesters

    • YiMing Lei
    • Zhiyu Wen

    Technical Paper 20 February 2014 Pages: 221 - 226

    

30. A high sensitive and robust controllable MEMS gyroscope with inherently linear control force using a high performance 2-DOF oscillator

    • Zahra Deyhim
    • Zeinab Yousefi
    • Esmaeil Najafi Aghdam

    Technical Paper 01 December 2013 Pages: 227 - 237

    

31. Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer

    • Jeong Il Lee
    • Mitsuhiro Shikida
    • Kazuo Sato

    Technical Paper 02 November 2013 Pages: 239 - 246

    

32. Design and simulation of bidirectional impact sensors array with optimized air damped response

    • Saeid Hematian Dehkordi
    • Reza Askari Moghadam
    • Javad Koohsorkhi

    Technical Paper 07 November 2013 Pages: 247 - 254

    

33. Microfluidic chip for rapid and automatic extraction of plasma from whole human blood

    • Ju-Nan Kuo
    • Yu-Hui Zhan

    Technical Paper 25 December 2013 Pages: 255 - 261

    

34. Design of experiments based factorial design and response surface methodology for MEMS optimization

    • M. M. Saleem
    • A. Somá

    Technical Paper 13 May 2014 Pages: 263 - 276

    

35. Analysis of spring-back deformation of head-mounting-block after ball-swaging in hard disk drives

    • Shinji Koganezawa

    Technical Paper 31 December 2013 Pages: 277 - 287

    

36. Field effect transistor with integrated microfluidic channel as pH sensor

    • I. Bouhadda
    • O. De Sagazan
    • F. Le Bihan

    Technical Paper 20 March 2014 Pages: 289 - 294

    

37. Application of vertically aligned carbon nanotubes on burnishing slider in cleaning process of magnetic disk surfaces

    • Hiroshi Tani
    • Keisuke Konishi
    • Norio Tagawa

    Technical Paper 29 March 2014 Pages: 295 - 300

    

38. Temperature dependence of the electromechanical characteristics of superconducting RF-MEMS switches

    • N. Alcheikh
    • P. Xavier
    • X. Mescot

    Technical Paper 01 February 2014 Pages: 301 - 307

    

39. Modeling and simulation of metal organic halide vapor phase epitaxy (MOHVPE) growth chamber

    • N. Zieyana Mohamed Annuar
    • Mohd Faizul Mohd Sabri
    • A. Shuhaimi Abu Bakar

    Technical Paper 14 January 2014 Pages: 309 - 318