Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater Peter MeszmerKarla HillerBernhard Wunderle Review Paper 12 April 2014 Pages: 1041 - 1050
Detection principles and development of microfluidic sensors in the last decade Rahul AntonyM. S. Giri NandagopalN. Selvaraju Review Paper 24 April 2014 Pages: 1051 - 1061
Packaging of a 3-axial piezoresistive force sensor with backside contacts T. KárpátiS. KulinyiG. Battistig Technical Paper 31 March 2013 Pages: 1063 - 1068
Effect of sputtering power on friction coefficient and surface energy of co-sputtered titanium and molybdenum disulfide coatings and its performance in micro hot-embossing B. SahaM. DirckxJ. H. Chun Technical Paper Open access 03 April 2013 Pages: 1069 - 1078
Investigation on the effect of different design of SCR on the change of resistance in piezoresistive micro cantilever Khairul Anuar Abd WahidHing Wah LeeIshak Abd Azid Technical Paper 04 April 2013 Pages: 1079 - 1083
RF MEMS continuous reversible variable inductor based on a microfluidic network Issam El GmatiPierre Francois CalmonKamel Besbes Technical Paper 03 April 2013 Pages: 1085 - 1091
Capillary-based water removal cathode for an air-breathing micro direct methanol fuel cell Xiaohong WangYan’an ZhouLitian Liu Technical Paper 28 March 2013 Pages: 1093 - 1101
Formation of metal nanostructures by high-temperature imprinting Harutaka Mekaru Technical Paper 31 March 2013 Pages: 1103 - 1109
Design and fabrication of a valveless micropump based on low temperature co-fired ceramic tape technology Chi-Mo HuangYi-Chun Wang Technical Paper 22 September 2013 Pages: 1111 - 1123
A novel MEMS elastic-based dry electrode for electroencephalography measurement Tao YuanDi ChenBaoliang Lu Technical Paper 10 April 2013 Pages: 1125 - 1129
Smart metal sheets by direct functional integration of piezoceramic fibers in microformed structures A. SchubertV. WittstockM. Müller Technical Paper 06 June 2013 Pages: 1131 - 1140
Theory and FEM simulation study of the double-clamped resonant beam with slit-structure Huichao ShiShangchun FanJinhao Sun Technical Paper 01 March 2014 Pages: 1141 - 1152
Low cost anodic bonding for MEMS packaging applications Robin JoyceKulwant SinghJ. Akhtar Technical Paper 11 June 2013 Pages: 1153 - 1158
Performance-optimized design of electromagnetic micro-actuator for Probe recording storage device Narayanan RamakrishnanMark D. BedillionPatrick B. Chu Technical Paper 03 April 2014 Pages: 1159 - 1168
A novel microneedle array for the treatment of hydrocephalus Jonghyun OhKewei LiuHongseok (Moses) Noh Technical Paper 29 November 2013 Pages: 1169 - 1179
Effects of ITO film annealing temperature on hybrid solar cell performance Shi-Hao WangYu-Jen HsiaoShao-Hui Kang Technical Paper 17 September 2013 Pages: 1181 - 1185
Polymerase chain reaction compatibility of adhesive transfer tape based microfluidic platforms Pulak NathTuhin S. MaityNicolas Castano Technical Paper 28 August 2013 Pages: 1187 - 1193
Calculating capacitance and analyzing nonlinearity of micro-accelerometers by Schwarz–Christoffel mapping Jiangbo HeJin XieLibin Wang Technical Paper 29 October 2013 Pages: 1195 - 1203
Electrothermal-driven gap adjustable MEMS comb structure: modeling and simulation of the equivalent circuit macromodel Xuan PuWeihua LiZaifa Zhou Technical Paper 21 August 2013 Pages: 1205 - 1212