Volume 19, Issue 3, March 2013

Special Issue of the 9th High-Aspect-Ratio Micro-Structure Technology Workshop, HARMST 2011, in Hsinchu, Taiwan, June 12-18, 2011

ISSN: 0946-7076 (Print) 1432-1858 (Online)

In this issue (25 articles)

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  1. Editorial

    Special issue of the 9th high-aspect-ratio micro-structure technology workshop, HARMST 2011, in Hsinchu, Taiwan, June 12–18, 2011

    Chien-Chung Fu, Bernd Michel Page 299
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    Technical Paper

    Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron radiation to LIGA

    Hideki Kido, Tomoyuki Kuroki, Masaaki Okubo, Yuichi Utsumi Pages 301-307
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    Technical Paper

    Fabrication of high precision microstructure using ICP etching for capacitive inclination sensor

    Daiji Noda, Yuu Kuboyama, Tadashi Hattori Pages 309-313
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    Technical Paper

    Fabrication of glass-like carbon molds to imprint on glass materials by MEMS processing technologies

    Harutaka Mekaru, Chieko Okuyama, Akihisa Ueno Pages 315-323
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    Technical Paper

    Effect of buffer materials on thermal imprint on plastic optical fiber

    Harutaka Mekaru, Akihiro Ohtomo, Hideki Takagi Pages 325-333
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    Technical Paper

    3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer

    Sascha P. Heussler, Herbert O. Moser, S. M. P. Kalaiselvi Pages 335-341
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    Technical Paper

    Manufacture of a micro-sized piezoelectric ceramic structure using a sacrificial polymer mold insert

    Jong Hyun Kim, Si-Young Choi, Jae-Ho Jeon, Geunbae Lim… Pages 343-349
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    Technical Paper

    Fabrication of 3-D PTFE microstructures utilising change of etching rate with respect to exposure time

    Mitsuhiro Horade, Susumu Sugiyama Pages 351-356
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    Technical Paper

    Influence of developer temperature on the shape of structures fabricated by deep X-ray lithography

    Mitsuhiro Horade, Susumu Sugiyama Pages 357-362
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    Technical Paper

    Deposition property investigation of a focused ion beam for a high-aspect-ratio metal tip

    Dae Keun Choi, Sang Hoon Lee Pages 363-370
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    Technical Paper

    Obstacles for cognitive analogy in analysis and synthesis in microsystems development

    Albert Albers, Peter Börsting, Sven Matthiesen Pages 371-378
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    Technical Paper

    Numerical simulation of the capillary flow in the meander microchannel

    C. C. Lai, C. K. Chung Pages 379-386
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    Technical Paper

    On characteristics of pore size distribution in hybrid pulse anodized high-aspect-ratio aluminum oxide with Taguchi method

    C. K. Chung, M. W. Liao, H. C. Chang, W. T. Chang, T. Y. Liu Pages 387-393
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    Technical Paper

    Ensuring functional reliability of molded micro components

    Albert Albers, Tarak Turki, Philipp Hoppen Pages 395-402
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    Technical Paper

    A novel fast and low cost replication technology for high-aspect-ratio magnetic microstructures

    Xuhan Dai, Xiaodan Miao, Guocheng Shao, Wanjun Wang Pages 403-407
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    Technical Paper

    A magnetic nano-composite soft polymeric membrane

    Akanksha Singh, Mandar Shirolkar, Mukta V. Limaye… Pages 409-418
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    Technical Paper

    BPN a new thick negative photoresist with high aspect ratio for MEMS applications

    D. Bourrier, M. Dilhan, A. Ghannam, L. Ourak, H. Granier Pages 419-423
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    Technical Paper

    High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension

    Felix Greiner, Helmut F. Schlaak Pages 425-431
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    Technical Paper

    Vertical Si nanowire with ultra-high-aspect-ratio by combined top-down processing technique

    Jun Nakamura, Kohei Higuchi, Kazusuke Maenaka Pages 433-438
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    Technical Paper

    Fabrication of flexible light guide plate using CO2 laser LIGA-like technology

    C. K. Chung, Y. J. Syu, H. Y. Wang, C. C. Cheng, S. L. Lin… Pages 439-443
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