Volume 19, Issue 2, February 2013

ISSN: 0946-7076 (Print) 1432-1858 (Online)

In this issue (19 articles)

  1. Technical Paper

    CO2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars

    Tsung-Fu Yao, Sen-Yeu Yang Pages 151-157
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    Technical Paper

    Metal-ceramic-composite casting of complex micro components

    D. Buqezi-Ahmeti, J. Maisenbacher, J. Gibmeier, T. Hanemann Pages 159-165
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    Technical Paper

    Improved micro fluxgate sensor with double-layer Fe-based amorphous core

    Chong Lei, Jian Lei, Zhen Yang, Yong Zhou Pages 167-172
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    Technical Paper

    In-plane spectroscopy of microfluidic systems made in photosensitive glass

    Khalid Hasan Tantawi, William Gaillard, Jake Helton… Pages 173-177
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    Technical Paper

    Ultra high aspect ratio penetrating metal microelectrodes for biomedical applications

    Abishek B. Kamaraj, Murali M. Sundaram, Ronnie Mathew Pages 179-186
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    Technical Paper

    A novel high sensitive MEMS intraocular capacitive pressure sensor

    Bahram Azizollah Ganji, M. Shahiri-Tabarestani Pages 187-194
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    Technical Paper

    The monolithic integration system of bulk-Si sensors and actuators based on the Au–Au bonding technology

    Chunhua Cai, Ming Qin Pages 195-201
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    Technical Paper

    Silicon isotropic and anisotropic etching for MEMS applications

    S. Negi, R. Bhandari Pages 203-210
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    Technical Paper

    Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films

    Junhong Li, Chenghao Wang, Jun Ma, Mengwei Liu Pages 211-218
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    Technical Paper

    Electromagnetically force balanced polymer accelerometer

    Ji Li, Werner K. Schomburg Pages 219-226
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    Technical Paper

    Analysis and design process of a bi-membrane structure for micro-flow regulators

    Francisco Perdigones, Antonio Luque, Alfonso M. Gañán-Calvo… Pages 227-236
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    Technical Paper

    A new design of multi-bit RF MEMS distributed phase shifters for phase error reduction

    Y. J. Du, J. F. Bao, J. W. Jiang Pages 237-244
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    Technical Paper

    Light-actuated water droplet motions on ZnO nanorods

    Chien-Wei Liu, Chen-Pin Hsu, J. Andrew Yeh, Yuh-Chang Sun… Pages 245-251
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    Technical Paper

    Silver (Ag) as a novel masking material in glass etching for microfluidics applications

    Hing Wah Lee, Daniel C. S. Bien, Siti Aishah Mohamad Badaruddin… Pages 253-259
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    Technical Paper

    A micro gearing system based on a ratchet mechanism and electrostatic actuation

    Phuc Hong Pham, Dzung Viet Dao Pages 261-267
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    Technical Paper

    A MEMS-based pyramid micro-needle electrode for long-term EEG measurement

    Long-Fei Wang, Jing-Quan Liu, Xiao-Xiao Yan, Bin Yang… Pages 269-276
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    Technical Paper

    A new inertial piezoelectric rotary actuator based on changing the normal pressure

    Jianming Wen, Jijie Ma, Ping Zeng, Guangming Cheng… Pages 277-283
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    Technical Paper

    Fabrication of cantilever with self-sharpening nano-silicon-tip for AFM applications

    Jia-dong Li, Jie Xie, Wei Xue, Dong-min Wu Pages 285-290
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    Technical Paper

    Experimental study of lubricant depletion in heat assisted magnetic recording: effects of laser heating duration and temperature

    Yansheng Ma, Xiuying Chen, Bo Liu Pages 291-297
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