1. Application of wavelet neural network in signal processing of MEMS accelerometers

   • Dake Chen
   • Jiuqiang Han

   Technical Paper 20 November 2010 Pages: 1 - 5

   

2. A dry release of polyimide electrodes using Kapton film and application to EEG signal measurements

   • Dong-Hyun Baek
   • Jin-hee Moon
   • Sang-Hoon Lee

   Technical Paper 28 October 2010 Pages: 7 - 14

   

3. Reliability of Pt ohmic contact on an undoped 3C-SiC micro-electrothermal device

   • Musaab Hassan

   Technical Paper 27 November 2010 Pages: 15 - 18

   

4. Wide range electrostatic MEMS Fabry Perot optical tunable filter: modelling an electrostatic and mechanic beam deflection

   • Nor Hafizah Ngajikin
   • Norazan Mohd Kassim
   • Mohd Haniff Ibrahim

   Technical Paper 31 December 2010 Pages: 19 - 25

   

5. MEMS based humidity sensor using Si cantilever beam for harsh environmental conditions

   • N. J. R. Muniraj

   Technical Paper 25 November 2010 Pages: 27 - 29

   

6. Design of wide range MEMS tunable capacitor for RF applications

   • N. J. R. Muniraj

   Technical Paper 09 December 2010 Pages: 31 - 33

   

7. Closed-form empirical relations to predict the static pull-in parameters of electrostatically actuated microcantilevers having linear width variation

   • M. M. Joglekar
   • D. N. Pawaskar

   Technical Paper 28 October 2010 Pages: 35 - 45

   

8. New system for real time study of in vivo migration and differentiation of stem cells

   • Siddiqul Haque
   • Günter R. Fuhr

   Technical Paper Open access 15 September 2010 Pages: 47 - 58

   

9. Electromagnetic levitation micromotor with stator embedded (ELMSE): levitation and lateral stability characteristics analysis

   • Xiaosheng Wu
   • Teng Deng
   • Weiping Zhang

   Technical Paper 19 November 2010 Pages: 59 - 69

   

10. Theoretical and experimental study of capacitance considering fabrication process and edge effect for MEMS comb actuator

    • Guo Zhanshe
    • Feng Zhou
    • Fan Shangchun

    Technical Paper 13 November 2010 Pages: 71 - 76

    

11. Microstructures for characterization of seebeck coefficient of doped polysilicon films

    • Jin Xie
    • Chengkuo Lee
    • Julius Minglin Tsai

    Technical Paper 17 December 2010 Pages: 77 - 83

    

12. Morphology and magnetic properties of electroplated Co-rich Co-Zn thin films

    • Tzu-Shun Yang
    • Naigang Wang
    • David P. Arnold

    Technical Paper 19 September 2010 Pages: 85 - 91

    

13. Study on the bimodal filler influence on the effective thermal conductivity of thermal conductive adhesive

    • Yan Zhang
    • Jing-yu Fan
    • Masahiro Inoue

    Technical Paper 17 September 2010 Pages: 93 - 99

    

14. A method of gap control based on the principle of equal thickness interference for HARNS fabrication

    • Jie Zhou
    • Gang Liu
    • Yangchao Tian

    Technical Paper 12 November 2010 Pages: 101 - 107

    

15. Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications

    • M. Wakui
    • H. Sameshima
    • K. Hane

    Technical Paper 06 October 2010 Pages: 109 - 114

    

16. Integrated micro Pirani gauge based hermetical package monitoring for uncooled VO _x bolometer FPAs

    • Bin Xiao
    • Tao Dong
    • Henrik Jakobsen

    Technical Paper 29 December 2010 Pages: 115 - 125

    

17. Active magnetic inertia latch for hard disk drives

    • Bu Hyun Shin
    • Kyung-Ho Kim
    • Seung-Yop Lee

    Technical Paper 21 November 2010 Pages: 127 - 132

    

18. Surface micromachining of unfired ceramic sheets

    • Jonathan M. Rheaume
    • Albert P. Pisano

    Technical Paper Open access 28 November 2010 Pages: 133 - 142

    

19. A MEMS guide plate for a high temperature testing of a wafer level packaged die wafer

    • Woo-Chang Choi
    • Jee-Youl Ryu

    Technical Paper 18 November 2010 Pages: 143 - 148

    

20. A hybrid capacitive pressure and temperature sensor fabricated by adhesive bonding technique for harsh environment of kraft pulp digesters

    • Abdolreza R. Mohammadi
    • Chad P. J. Bennington
    • Mu Chiao

    Technical Paper 30 December 2010 Pages: 149 - 160

    

21. Design of MEMS switch for RF applications

    • N. J. R. Muniraj
    • K. Sathesh

    Technical Paper 01 January 2011 Pages: 161 - 163

    

22. Design of high stroke electrostatic micropumps: a charge control approach with ring electrodes

    • Emanuele Bertarelli
    • Alberto Corigliano
    • Jan G. Korvink

    Technical Paper 04 January 2011 Pages: 165 - 173