Analysis of pattern height development in hot embossing process Yong HeJian-Zhong FuZi-Chen Chen Technical Paper 01 May 2009 Pages: 963 - 968
MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coils Chong LeiRen WangZhimin Zhou Technical Paper 29 April 2009 Pages: 969 - 972
Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme In-Hyouk SongYves-Alain PeterMichel Meunier Technical Paper 31 March 2009 Pages: 973 - 979
Single-wafer die-level fusion bonding process for multi-layer devices Haifeng Dong Technical Paper 31 March 2009 Pages: 981 - 984
A nodal analysis method for electromechanical behavior simulation of bow-tie shaped microbeams Min LiQing-An HuangWei-Hua Li Technical Paper 26 March 2009 Pages: 985 - 991
A study of PZT valveless micropump with asymmetric obstacles Ching-Jiun LeeHorn-Jiunn SheenCheng-Ying Yang Technical Paper 08 April 2009 Pages: 993 - 1000
A miniature spindle motor with fluid dynamic bearings for portable storage device applications Chien-Sheng LiuPsang-Dain LinMeng-Che Tsai Technical Paper 29 March 2009 Pages: 1001 - 1007
Design of a relaying electroosmosis pump driven by low-voltage DC Qiuquan GuoYu LiuJun Yang Technical Paper 08 April 2009 Pages: 1009 - 1015
A novel active vibration isolator applied for micro-gyro by array of deposited electrodes Nan-Chyuan TsaiChung-Yang SueBing-Hong Liou Technical Paper 16 April 2009 Pages: 1017 - 1026
Fabrication and characterization of a polymethyl methacrylate continuous-flow PCR microfluidic chip using CO2 laser ablation Heng QiXiansong WangTiechuan Zuo Technical Paper 12 April 2009 Pages: 1027 - 1030
Effect of micro tensile sample’s cross section shape on the strength of weld line in micro injection molding process Lei XieGerhard ZiegmannRonald Wittmer Technical Paper 15 May 2009 Pages: 1031 - 1037
A cross-junction channel valveless-micropump with PZT actuation Van Thanh DauThien Xuan DinhSugiyama Susumu Technical Paper 26 May 2009 Pages: 1039 - 1044
Femtosecond laser-induced silicon surface morphology in water confinement Yukun HanCheng-Hsiang LinHai-Lung Tsai Technical Paper 15 May 2009 Pages: 1045 - 1049
Localised laser joining of glass to silicon with BCB intermediate layer Qiang WuN. LorenzD. P. Hand Technical Paper 20 May 2009 Pages: 1051 - 1057
Numerical study of particle focusing through improved Lab-on-a-Chip device by positive dielectrophoresis K. H. ChoiM. A. A. RehmaniYoung-Ho Cho Technical Paper 21 May 2009 Pages: 1059 - 1065
Micro-structures fabrication on glasses for micro-fluidics by imprinting technique Qiuping ChenQiuling ChenMonica Ferraris Technical Paper 26 May 2009 Pages: 1067 - 1071
Design and fabrication of MEMS-based microneedle arrays for medical applications Peiyu ZhangColin DaltonGraham A. Jullien Technical Paper Open access 20 May 2009 Pages: 1073 - 1082
Structural modelling and integrative analysis of microelectromechanical systems product using graph theoretic approach A. Amalin PrinceV. P. Agrawal Technical Paper 20 May 2009 Pages: 1083 - 1096
Plane strain sliding contact of multilayer magnetic storage thin-films using the finite element method Raja R. KattaEmerson Escobar NunezSung-Chang Lee Technical Paper 28 April 2009 Pages: 1097 - 1110
Bonding of Cu-based high aspect ratio microscale structures with Sn intermediate layers Fanghua MeiKe ChenWen Jin Meng Technical Paper 26 April 2009 Pages: 1111 - 1118