1. Atomic scale simulation of silicon anisotropic chemical etching

   • H. Camon
   • M. Djafari-Rouhani
   • Z. Moktadir

   Technical Papers Pages: 163 - 167

2. Microsystems for independent parallel chemical and biological processing

   • A. Schober
   • A. Schwienhorst
   • M. Thürk

   Technical Papers Pages: 168 - 172

3. Model transformation for coupled electro-mechanical simulation in an electronics simulator

   • G. Pelz
   • J. Bielefeld
   • G. Zimmer

   Technical Papers Pages: 173 - 177

4. Materials development for thin film actuators

   • E. Quandt
   • H. Holleck

   Technical Papers Pages: 178 - 184

5. Static and dynamic test methods for thin mono- and polycrystalline Si-films

   • V. Lange
   • G. Higelin

   Technical Papers Pages: 185 - 190

6. Monolithic bridge-on-diaphragm structure for pressure sensor applications

   • H. -J. Wagner
   • A. Schumacher
   • B. Schmidt

   Technical Papers Pages: 191 - 195

7. Fabrication of relief-topographic surfaces with a one-step UV-lithographic process

   • H. J. Quenzer
   • W. Henke
   • B. Wagner

   Technical Papers Pages: 196 - 201

8. Micromechanical elements for detection of molecules and molecular design

   • J. M. Köhler
   • R. Pechmann
   • A. Schwienhorst

   Technical Papers Pages: 202 - 208