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Conformal coating by liquid route on three-dimensional topology

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Abstract

We demonstrated a new approach to the production of three-dimensional-coated patterns using the liquid route. Metallic perovskite oxides were coated onto three-dimensional (3D) micro-structured substrates with different aspect ratios. The method’s success relies on the solution viscosity being adjusted by adding viscous liquid. The process of oxide thin films follows three stages: preparing the precursor solution, coating the solution by spin-coating process onto three-dimensional-Si substrates, and post-annealing. Chemical solution 3D-coating is conformal.

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  • 26 August 2022

    The given names and family names of the authors were inadvertently reversed.

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Acknowledgements

This research project was supported through funding from the ANR (French National Research Agency).

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Authors and Affiliations

  1. GREMAN-IUT de Blois, 15 rue de la Chocolaterie, 41000, Blois Cedex, France

    Nathalie Poirot

  2. GREMI, CNRS/Université d’Orléans, 14 rue d’Issoudun, 45067, Orléans, France

    Thomas Tillocher

  3. Plateforme IBiSA de Microscopie Electronique, Université de Tours, 10 bd Tonnellé, BP 3223, 37032, Tours Cedex, France

    Pierre-Ivan Raynal

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  1. Nathalie Poirot
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Correspondence to Nathalie Poirot.

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Poirot, N., Tillocher, T. & Raynal, PI. Conformal coating by liquid route on three-dimensional topology. Eur. Phys. J. Spec. Top. 231, 4245–4253 (2022). https://doi.org/10.1140/epjs/s11734-022-00579-6

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