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Cross sections and transport coefficients for H3 + ions in water vapour

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Abstract

Scattering cross sections for positive H3 + ions in water vapour were calculated by a simple but quite general theory and then assessed by using the available data. Transport coefficients for H3 + ions in water vapour in DC fields were calculated by using a Monte Carlo simulation from low to moderate reduced electric fields E/N (E is electric field and N is gas number density) where the non-conservative collisions are also taken into account.

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References

  1. M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, 2nd ed. (Wiley, 2005)

  2. T. Makabe, Z. Petrović, Plasma Electronics: Applications in Microelectronic Device Fabrication (Taylor and Francis, CRC Press, New York, 2006)

  3. Z.Lj. Petrović, P. Maguire, M. Radmilović-Radjenović, M. Radetić, N. Puač, D. Marić, C. Mahony, G. Malović, in Nanotechnology for Electronics, Photonics and Renewable Energy, edited by A. Korkin et al. (Springer, 2010), Vol. 85

  4. S. Samukawa, M. Hori, S. Rauf, K. Tachibana, P. Bruggeman, G. Kroesen, J.C. Whitehead, A.B. Murphy, A.F. Gutsol, S. Starikovskaia, U. Kortshagen, J.-P. Boeuf, T.J. Sommerer, M.J. Kushner, U. Czarnetzki, N. Mason, J. Phys. D: Appl. Phys. 45, 253001 (2012)

    Article  ADS  Google Scholar 

  5. I. Adamovich, S. Baalrud, A. Bogaerts, P.J. Bruggeman, M. Cappelli, V. Colombo, U. Czarnetzki, U. Ebert, J.G. Eden, P. Favia, D.B. Graves, S. Hamaguchi, G. Hieftje, M. Hori, I.D. Kaganovich, U. Kortshagen, M.J. Kushner, N.J. Mason, S. Mazouffre, S. Mededovic Thagard, H.-R. Metelmann, A. Mizuno, E. Moreau, A.B. Murphy, B.A. Niemira, G.S. Oehrlein, Z. Lj. Petrović, L.C. Pitchford, Y.-K. Pu, S. Rauf, O. Sakai, S. Samukawa, S. Starikovskaia, J. Tennyson, K. Terashima, M.M. Turner, M.C.M. van de Sanden, A. Vardelle, J. Phys. D: Appl. Phys. 50, 323001 (2017)

    Article  Google Scholar 

  6. http://mail.ipb.ac.rs/cep/ipb-cnp/ionsweb/database.htm; www.lxcat.net, see for example Phelps or Viehland database, retrieved on: 2017/04/05

  7. K. Denpoh, K. Nanbu, J. Vac. Sci. Technol. A 16, 1201 (1998)

    Article  ADS  Google Scholar 

  8. J. Tennyson, S. Rahimi, C. Hill, L. Tse, A. Vibhakar, D. Akello-Egwel, D.B. Brown, A. Dzarasova, J.R. Hamilton, D. Jaksch, S. Mohr, K. Wren-Little, J. Bruckmeier, A. Agarwal, K. Bartschat, A. Bogaerts, J.-P. Booth, M.J. Goeckner, K. Hassouni, Y. Itikawa, B.J. Braams, E. Krishnakumar, A. Laricchiuta, N.J. Mason, S. Pandey, Z.Lj. Petrovic, Y.-K. Pu, A. Ranjan, S. Rauf, J. Schulze, M.M. Turner, P. Ventzek, J.C. Whitehead, J.-S. Yoon, Plasma Sources Sci. Technol. 26, 055014 (2017)

    Article  ADS  Google Scholar 

  9. Z. Ristivojević, Z.Lj. Petrović, Plasma Sources Sci. Technol. 21, 035001 (2012)

    Article  ADS  Google Scholar 

  10. Z.Lj. Petrović, Z.M. Raspopović, V.D. Stojanović, J.V. Jovanović, G. Malović, T. Makabe, J. de Urquijo, Appl. Surf. Sci. 253, 6619 (2007)

    Article  ADS  Google Scholar 

  11. J. de Urquijo, J.V. Jovanović, A. Bekstein, V. Stojanović, Z.Lj. Petrović, Plasma Sources Sci. Technol. 22, 025004 (2013)

    Article  ADS  Google Scholar 

  12. C.L. Liao, C.X. Liao, C.Y. Ng, J. Chem. Phys. 81, 5672 (1984)

    Article  ADS  Google Scholar 

  13. Y. Xu, B. Xiong, Y.C. Chang, C.Y. Ng, J. Chem. Phys. 139, 024203 (2013)

    Article  ADS  Google Scholar 

  14. D.K. Bohme, D.B. Dunkin, F.C. Fehsenfeld, E.E. Ferguson, J. Chem. Phys. 51, 863 (1969)

    Article  ADS  Google Scholar 

  15. H.F. Davis, H.U. Stauffer, in Encyclopedia of Physical Science and Technology, 3rd ed., edited by R.A. Meyers (Academic Press, 2000), Vol. 4, p. 697

  16. R.A. Marcus, J. Chem. Phys. 20, 359 (1952)

    Article  ADS  Google Scholar 

  17. H.O. Pritchard, The Quantum Theory of Unimolecular Reactions (Cambridge University Press, 1984)

  18. D.W. Placzek, B.S. Rabinovitch, G.Z. Whitten, E. Tschuikow-Roux, J. Chem. Phys. 43, 4071 (1965)

    Article  ADS  Google Scholar 

  19. E.W. McDaniel, V. C̀ermak, A. Dalgarno, E.E. Ferguson, L. Friedman, Ion-Molecule Reactions (Wiley-Interscience, 1970)

  20. J.V. Dugan, J.L. Magee, J. Chem. Phys. 47, 3103 (1967)

    Article  ADS  Google Scholar 

  21. Z.Lj. Petrović, V.D. Stojanović, J. Vac. Sci. Technol. A 16, 329 (1998)

    Article  ADS  Google Scholar 

  22. D.W. Placzek, B.S. Rabinovitch, G.Z. Whitten, J. Chem. Phys. 43, 4071 (1965)

    Article  ADS  Google Scholar 

  23. G.B. Skinner, B.S. Rabinovitch, J. Phys. Chem. 76, 2418 (1972)

    Article  Google Scholar 

  24. H.W. Schranz, S. Nordholm, N.D. Hamer, Int. J. Chem. Kinet. 14, 543 (1982)

    Article  Google Scholar 

  25. S.G. Lias, J.E. Bartmess, J.F. Xebman, J.L. Holmes, R.D. Levin, W.G. Mallard, J. Phys. Chem. Ref. Data 17, 1 (1988)

    Article  Google Scholar 

  26. V. Stojanović, Z. Raspopović, D. Marić, Z.Lj. Petrović, Eur. Phys. J. D 69, 6 (2015)

    Article  Google Scholar 

  27. J.A. deGouw, M. Krishnamurthy, S.R. Leone, J. Chem. Phys. 106, 5937 (1997)

    Article  ADS  Google Scholar 

  28. A.V. Phelps, Phys. Rev. E 79, 066401 (2009)

    Article  ADS  Google Scholar 

  29. J.K. Kim, I.P. Theard, W.T. Huntress, Int. J. Mass Spectrosc. Ion Phys. 15, 223 (1974)

    Article  ADS  Google Scholar 

  30. D.C. Clary, Chem. Phys. Lett. 232, 267 (1995)

    Article  ADS  Google Scholar 

  31. D. Betowski, J.D. Payzant, G.I. Mackay, D.K. Bohme, Chem. Phys. Lett. 31, 321 (1975)

    Article  ADS  Google Scholar 

  32. G.H. Wannier, Bell Syst. Tech. J. 32, 170 (1953)

    Article  Google Scholar 

  33. Z.Lj. Petrović, S. Dujko, D. Marić, G. Malović, Ž.D. Nikitović, O. Šašić, J. Jovanović, V. Stojanović, M. Radmilović-Rađenović, J. Phys. D: Appl. Phys. 42, 194002 (2009)

    Article  ADS  Google Scholar 

  34. R.E. Robson, Aust. J. Phys. 44, 685 (1991)

    Article  ADS  Google Scholar 

  35. Z. Raspopović, V. Stojanović, Ž. Nikitović, EPL 111, 45001 (2015)

    Article  ADS  Google Scholar 

  36. P.J. Bruggeman, M.J. Kushner, B.R. Locke, J.G.E. Gardeniers, W.G. Graham, D.B. Graves, R.C.H.M. Hofman-Caris, D. Marić, J.P. Reid, E. Ceriani, D. Fernandez Rivas, J.E. Foster, S.C. Garrick, Y. Gorbanev, S. Hamaguchi, F. Iza, H. Jablonowski, E. Klimova, J. Kolb, F. Krcma, P. Lukes, Z. Machala, I. Marinov, D. Mariotti, S. Mededovic Thagard, D. Minakata, E.C. Neyts, J. Pawlat, Z.Lj. Petrović, R. Pflieger, S. Reuter, D.C. Schram, S. Schröter, M. Shiraiwa, B. Tarabová, P.A. Tsai, J.R.R. Verlet, T. von Woedtke, K.R. Wilson, K. Yasui, G. Zvereva, Plasma Sources Sci. Technol. 25, 053002 (2016)

    Article  ADS  Google Scholar 

  37. S.A. Norberg, E. Johnsen, M.J. Kushner, Plasma Sources Sci. Technol. 24, 035026 (2015)

    Article  ADS  Google Scholar 

  38. D.X. Liu, P. Bruggeman, F. Iza, M.Z. Rong, M.G. Kong, Plasma Sources Sci. Technol. 19, 025018 (2010)

    Article  ADS  Google Scholar 

  39. T. Murakami, K. Niemi, T. Gans, D. O’Connell, W.G. Graham, Plasma Sources Sci. Technol. 22, 015003 (2013)

    Article  ADS  Google Scholar 

  40. F. Taccogna, G. Dilecce, Eur. Phys. J. D 70, 251 (2016)

    Article  ADS  Google Scholar 

  41. E.R. Adhikari, S. Ptasinska, Eur. Phys. J. D 70, 180 (2016)

    Article  ADS  Google Scholar 

  42. S. Lazović, D. Maletić, A. Leskovac, J. Filipović, N. Puač, G. Malović, G. Joksić, Z.Lj. Petrović, Appl. Phys. Lett. 105, 124101 (2014)

    Article  ADS  Google Scholar 

  43. A. Hurlbatt, A.R. Gibson, S. Schroter, J. Bredin, A.P.S. Foote, P. Grondein, D. O’Connell, T. Gans, Plasma Process. Polym. 14, 1600138 (2017)

    Article  Google Scholar 

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Authors and Affiliations

  1. Centre for Non-Equilibrium Processes, Institute of Physics, University of Belgrade, POB 68, 11080, Belgrade, Serbia

    Vladimir Stojanović, Zoran Raspopović, Jasmina Jovanović, Željka Nikitović, Dragana Marić & Zoran Lj. Petrović

  2. Faculty of Mechanical Engineering, University of Belgrade, Kraljice Marije 16, 11000, Belgrade, Serbia

    Jasmina Jovanović

  3. Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000, Belgrade, Serbia

    Zoran Lj. Petrović

Authors
  1. Vladimir Stojanović
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  2. Zoran Raspopović
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  3. Jasmina Jovanović
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  4. Željka Nikitović
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  5. Dragana Marić
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  6. Zoran Lj. Petrović
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Correspondence to Vladimir Stojanović.

Additional information

Contribution to the Topical Issue “Physics of Ionized Gases (SPIG 2016)”, edited by Goran Poparic, Bratislav Obradovic, Dragana Maric and Aleksandar Milosavljevic.

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Stojanović, V., Raspopović, Z., Jovanović, J. et al. Cross sections and transport coefficients for H3 + ions in water vapour. Eur. Phys. J. D 71, 283 (2017). https://doi.org/10.1140/epjd/e2017-80295-2

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  • DOI: https://doi.org/10.1140/epjd/e2017-80295-2

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