Abstract
Samples of pure titanium have been treated by means a plasma immersed ion implantation (PIII) process in a DC glow discharge in pure oxygen and in different nitrogen-oxygen mixtures. In contrast with conventional voltage supply based glow PIII, the present study has been conducted with a novel specifically designed high current supply which allows a high electron density to be kept constant, regardless of gas pressure variations, within the operational ranks. Thus, the acquired sample characteristics can be more clearly ascribed to the chemical composition of the mixture. One stratified TiO2 (rutile) and TiN0.26 layer was identified from XRD and Raman spectroscopy, both of these compounds reputedly being highly biocompatible. The superficial hardness of the samples was improved up to more than five times that of the untreated reference sample, namely, ∼1600 Vickers microhardness (10 g load) thanks to a 2–6 μm deep implanted layer. These optimal results have been obtained from an 80% nitrogen 20% oxygen mixture at 1×10-2 torr. Furthermore, with this gas proportion, the best roughness finishing of the sample set was accomplished, which can be relevant for biocompatible applications.
Similar content being viewed by others
References
D.R. Askeland, P.P. Phulé, The Science and Engineering of Materials, 4th edn. (Thomson-Engineering, 2002)
X. Tian, C. Gong, S. Yang, Z. Luo, R.K.-Y. Fu, P.K. Chu, IEEE Trans. Plasma Sci. 34, 1235 (2006)
X. Liu, P.K. Chu, C. Ding, Mater. Sci. Eng. 47, 49 (2004)
P.A. Lilley, G.W. Blunn, in Proceedings of the IEE Conference Publication No. 435: 5th International Conference on FACTORY 2000 (1997)
R.N. Tarrant, S. Devasahayam, D.R. McKenzie, M.M.M. Bilek, Plasma Sources Sci. Technol. 15, 384 (2006)
S. Mändl, D. Krause, G. Thorwarth, R. Sader, F. Zeilhofer, H.H. Horch, B. Rauschenbach, Surf. Coat. Technol. 142–144, 1046 (2001)
E.E. Granda-Gutiérrez, R. López-Callejas, R. Peña-Eguiluz, A. Mercado-Cabrera, R. Valencia A., S.R. Barocio, O.G. Godoy-Cabrera, A. de la Piedad-Beneitez, J.S. Benítez-Read, J.O. Pacheco-Sotelo, in Proceedings of the 25th IASTED International Conference on Modelling, Identification and Control (2006), Vol. 500, p. 255
E.E. Granda-Gutiérrez, R. López-Callejas, R. Peña-Eguiluz, J.S. Benítez-Read, J.O. Pacheco-Sotelo, R. Valencia A., A. Mercado-Cabrera, S.R. Barocio, Surf. Coat. Technol. 201, 5454 (2007)
K. Takechi, S. Otsuki, IEEE Trans. Semiconductor Manufacturing 19, 286 (2006)
Y.-K. Pu, Z.-G. Guo, Z.-D. Kang, J. Ma, Z.-C. Guan, G.-Y. Zhang, E.-G. Wang, Pure Appl. Chem. 74, 459 (2002)
L.H. Li, Y.Q. Wu, Y.H. Zhang, R.K.Y. Fu, P.K. Chu, J. Appl. Phys. 97, 113301 (2005)
R.S. Pessoa, G. Murakami, G. Petraconi, H.S. Maciel, I.C. Oliveira, K.G. Grigorov, Braz. J. Phys. 36, 332 (2006)
R. López-Callejas, R. Valencia-Alvarado, E. Muñoz-Castro, O.G. Godoy-Cabrera, J.L. Tapia Fabela, Rev. Sci. Instrum. 72, 4277 (2002)
S. Leigh, A. Lin, C.C. Berndt, J. Am. Ceram. Soc. 80, 2093 (1997)
H. Du, H. Chen, B.K. Moom, J.H. Shin, S.W. Lee, AZo J. Mat. Online 1, 1 (2005)
M. Hassan, A. Qayyum, R. Ahmad, G. Murtaza, M. Zakaullah, J. Phys. D: Appl. Phys. 40, 769 (2007)
R.T. Downs, M.Hall-Wallace, The American Mineralogist Crystal Structure Database (titanium) (2003)
R.T. Downs, M. Hall-Wallace, The American Mineralogist Crystal Structure Database (rutile) (2003)
Joint Committee on Powder Diffraction Standards (JCPDS) and International Centre for Diffraction Data (ICDD) database pdf 44-1095, 1995
Joint Committee on Powder Diffraction Standards (JCPDS) and International Centre for Diffraction Data (ICDD) database pdf 17-386, 1995
S. Mändl, B. Rauschenbach, Surf. Coat. Technol. 156, 276 (2002)
J.C. Parker, R.W. Siegel, J. Mater. Res. 5, 1246 (1990)
M. Franck, J.P. Celis, J.R. Roos, J. Mater. Res. 10, 119 (1995)
G. Thorwarth, S. Mändl, B. Rauschenbach, Surf. Coat. Technol. 136, 236 (2001)
H.C. Barshilia, K.S. Rajam, J. Mater. Res. 19, 3196 (2004)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Granda-Gutiérrez, E., López-Callejas, R., Peña-Eguiluz, R. et al. N–O mix optimisation in low energy dense DC glow surface Ti conditioning. Eur. Phys. J. D 54, 281–286 (2009). https://doi.org/10.1140/epjd/e2009-00037-5
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1140/epjd/e2009-00037-5