Abstract.
This paper reports the effect of helium percentage variation in a capacitive RF helium-nitrogen mixture plasma on various plasma parameters and concentration of nitrogen active species (N2(C3Π u) and N2 +(B2Σ u +)). Langmuir probe is used for determination of electron energy distribution functions, effective electron temperature, plasma potential and electron density. Optical emission spectroscopy is used for determination of electron temperature from Boltzmann's plot of He–I lines and the relative changes in the concentration of active species by measuring the emission intensities of nitrogen (0-0) bands of the second positive and the first negative systems. The results demonstrate that electron temperature, electron density and concentration of active species increase significantly with increase in helium percentage in the mixture and RF power.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
T. Hino, I. Fujita, M. Nishikawa, Plasma Sources Sci. Technol. 5, 424 (1996)
A. Qayyum, R. Ahamad, A. Waheed, M. Zakaullah, Eur. Phys. J. Appl. Phys. 32, 45 (2005)
K.H. Bai, S.J. You, H.Y. Chang , H.S. Uhm, Phys. Plasmas 9, 2831 (2002)
I. Sugimto, S. Nakano, H. Kuwano, J. Appl. Phys. 75, 7710 (1994)
K. Wagatsuma, Spectrochim. Acta B 56, 465 (2001)
A. Bogaerts, A. Quentmeier, N. Jakubowski, R. Gijbels, Spectrochim. Acta B 50, 1337 (1995)
M.A. Naveed, A. Qayyum, Shujaat Ali, M. Zakaullah, Phys. Lett. A 359, 499 (2006)
V.A. Godyak, R.B. Piejak , B.M. Alexandrovich, Plasma Sources Sci. Technol. 1, 36 (1992)
V.A. Godyak, R.B. Piejak , B.M. Alexandrovich, J. Appl. Phys. 73, 3657 (1993)
M.J. Druyvesteyn, Z. Phys. 64, 781(1930)
C. Gorse, S.D. Benedictis, G. Dilecce, M. Capitelli, Spectrochim. Acta B 45, 521 (1990)
I. Sugimoto, S. Nakano, Appl. Phys. Lett. 62, 2116 (1993)
N.K. Bibinov, A.A. Fateev, K. Wiesemann, J. Phys. D 34, 1819 (2001)
C.M. Deegan, J.P. Goss, D. Vender, M.B. Hopkins, Appl. Phys. Lett. 74, 1969 (1999)
A. Bogaerts, J. Anal. At. Spectrom. 14, 1375 (1999)
A.Qayyum, S. Zeb, M.A. Naveed, S.A. Ghauri, M. Zakaullah, J. Appl. Phys. 98, 103303 (2005)
S.D. Popa, J. Phys. D 29, 416 (1996)
C. Biloiu, H. Ehrich, G. Musa, J. Vac. Sci. Technol. A 19, 757 (2001)
R.D. Cowan, G.H. Dieke, Rev. Mod. Phys. 20, 418 (1948)
R.F. Boivin, J.L. Kline, E.E. Scime, Phys. Plasmas 8, 5303 (2001)
http://physics.nist.gov/ASD
L. Petitjean, A. Ricard, J. Phys. D 17, 919 (1984)
H. Nassar, S. Pellerin, K. Musio, O. Martinie, N. Pellerin, J.M. Cormier, J. Phys. D 37, 1904 (2004)
A.E. Belikov, Chem. Phys. 215, 97 (1997)
D.A.O. Hope, T.I. Cox, V.G.I. Deshmukh, Vacuum 37, 275 (1987)
R. Apetrei, D. Alexandroaei, D. Luca, P. Balan, C. Ionita, R. Schrittwieser, G. Popa, Jpn J. Appl. Phys. 45, 8128 (2006)
R. Apetrei, D. Alexandroaei, D. Luca, P. Balan, C. Ionita, R. Schrittwieser, G. Popa, Jpn J. Appl. Phys. 45, 8132 (2006)
N.C.M. Fuller, M.V. Malyshev, V.M. Donnelly, I.P. Herman, Plasma Sources Sci. Technol. 9, 116 (2000)
M.V. Malyshev, V.M. Donnelly, Phys. Rev. E 60, 6016 (1999)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Naveed, M., Rehman, N., Zeb, S. et al. Langmuir probe and spectroscopic studies of RF generated helium-nitrogen mixture plasma . Eur. Phys. J. D 47, 395–402 (2008). https://doi.org/10.1140/epjd/e2008-00055-9
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1140/epjd/e2008-00055-9