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Argon cluster impacts on layered silicon, silica, and graphite surfaces

  • Clusters and Surfaces
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Abstract.

Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

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Authors and Affiliations

  1. University of Helsinki, Accelerator Laboratory, P.O. Box 43, 00014, Helsinki, Finland

    J. Samela, K. Nordlund & J. Keinonen

  2. Department of Physics, Gothenburg University, 41296, Gothenburg, Sweden

    V. N. Popok & E. E.B. Campbell

Authors
  1. J. Samela
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  2. K. Nordlund
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  3. J. Keinonen
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  4. V. N. Popok
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  5. E. E.B. Campbell
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Correspondence to J. Samela.

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Samela, J., Nordlund, K., Keinonen, J. et al. Argon cluster impacts on layered silicon, silica, and graphite surfaces. Eur. Phys. J. D 43, 181–184 (2007). https://doi.org/10.1140/epjd/e2007-00104-y

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  • DOI: https://doi.org/10.1140/epjd/e2007-00104-y

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