Abstract
An electron detector for the measurement of backscattering and secondary electron coefficients based on that of Reimer and Tollkamp has been devised and built. The detector is used in ultra high vacuum and allows one to use in-situ ion bombardment of the sample to remove surface contaminants before data collection. New experimental measurements of the backscattering and secondary electron coefficients in the energy range 0.5-6keV are reported for C, Al, Si, Cu, Ge, Mo, Ag and Au. These are collected from both argon ion cleaned and as-inserted surfaces. The back- scattering coefficients of the argon ion cleaned surfaces monotonically increases for elements of atomic number Z (graterthan) 28 whilst it decreases for elements of Z (lessthan) 28 for all energies used. This is in contrast to the as-inserted surfaces that show a more complex pattern below 1 keV incident energies.
Key words
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
D. Venables, D. M. Maher, J. Vac. Sci. Tech. B 1996, 14 (1), 421.
K. Ogura, JEOL News 1991, 29E (2), 1.
K. Ogura, M. M. Kersker, 46 th Annual EMSA Meeting, San Francisco Press, San Francisco, 1988, 204.
D. D. Perovic, M. R. Castell, A. Howie, C. Lavoie, J. S. W. Cole, Ultra Microsc. 1995, 58, 104.
H. Bishop, J. Phys. D, 1967 18, 703.
I. M. Bronshtein, B. S. Faiman, Secondary Electron Emission, Nauka-Press, Moscow, 1969.
S. Thomas, E. B. Pattinson, J. Phys. D: Appi. Phys. 1970, 3, 349.
E. H. Darlington, V. E. Cosslett, 1972, J. Phys. D, 5, 1969.
H. J. Fitting, Phys. Stat. Sol. (a), 1974, 26, 525.
J. Shou, H. Sorensen, J. Appl. Phys. 1978, 49, 816.
L. Reimer, C. Tollkamp, Scanning, 1980, Vol. 3, 35–39.
R. Bongeler, U. Golia, M. Kassens, L. Reimer, B. Schindeler, R. Senkel, M. Spranck, Scanning, 1993, 15, 1.
M. Kotera, K. Murata, K. Nagami, J. Appl. Phys. 1981, 52, 997, 7403.
S. Ichimura, R. Shimizu, Surf. Sci. 1981, 112, 386.
D. Joy, J. Microsc. 1987, 147, 51.
H. J. Fitting, C. H. Hinkforth, H. Glafeke, J. Ch. Kühr, Phys. Stat. Soli, (a), 1991, 126, 85.
K. Janssen, A. Walker, Surf. Sci. 1993, 292, 83.
R. Browning, T. Z. Li, B. Chui, Jun Ye, R. F. W. Pease, Z. Czyzewski, D. Joy, Scanning, 1995, 17, 250.
GRAPHIT 33, Kontakt Chemie, D-7557, Iffezheim, Germany.
T. El Bakush, D Phil Thesis, The University of York, 1995.
A. M. D Assa’d, D Phil Thesis, The University of York, 1995.
A. M. D Assa’d, M. M. El Gomati, Scanning Microsc. 1998, in press.
J. A. D. Matthew, A. R. Jackson, M. M. El Gomati, J. Electron Spect. Relat. 1997, Phen. 85, 205–219.
P. Cumpson, Surf. Interface Anal., 1997, 25, 277.
I. S. Tilinin, W. S. M. Werner, Mikrochimica Acta. 1994, 485.
R. Mayol, F. Salvat, Atomic Data Nucl. Data Tab., 1997, 65, 55.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1998 Springer-Verlag Wien
About this paper
Cite this paper
El-Gomati, M.M., Assa’d, A.M.D. (1998). On the Measurement of the Backscattering Coefficient for Low Energy Electrons. In: Love, G., Nicholson, W.A.P., Armigliato, A. (eds) Modern Developments and Applications in Microbeam Analysis. Mikrochimica Acta Supplement, vol 15. Springer, Vienna. https://doi.org/10.1007/978-3-7091-7506-4_44
Download citation
DOI: https://doi.org/10.1007/978-3-7091-7506-4_44
Publisher Name: Springer, Vienna
Print ISBN: 978-3-211-83106-9
Online ISBN: 978-3-7091-7506-4
eBook Packages: Springer Book Archive