Abstract
A new analytical method of designing two-aspherical-mirror anastigmats was developed and applied to searching solution groups of soft X-ray microscopes of a large misalignment tolerance. The two-mirror anastigmat configurations were expressed by a practical variable related to pupil obstruction limiting the system throughput. Axial coma and other aberrations caused by a slight decenter of the system were then formulated to represent sensitivity to misalignment. These formulations enabled a global survey of solution groups as demonstrated by a designing example of soft X-ray microscopes with a magnification m = −1/50, which resulted in four solutions more insensitive to misalignment than a standard Schwarzschild optics in the soft X-ray region. Some solutions were also found to have much larger fields of view suitable for high resolution imaging as confirmed by computer ray tracing.
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Toyoda, M., Yamamoto, M. Analytical Designing of Two-Aspherical-Mirror Anastigmats Permitting Practical Misalignments in a Soft-X-Ray Optics. OPT REV 13, 149–157 (2006). https://doi.org/10.1007/s10043-006-0149-8
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DOI: https://doi.org/10.1007/s10043-006-0149-8