Abstract
With enabling of a thermal actuator, an air bearing slider can fly at sub-nanometer level spacing on a magnetic disk while the recording elements are functioning. At such spacing, the slider stability and head-disk interface reliability remains to be understood. In this study, a novel understanding on dynamics of the MEMS thermal flying-height control (TFC) slider in touchdown process is developed. By using average and variational-iteration methods, closed-form spectrum estimations of slider vibration are derived. The derived formulation offers an insight of the relationship between spectrum and interface parameters. Physics-based simulation is also conducted to quantify the spectrum of slider vibrations as a function of varied interfacial parameters. To further extend the analytical and numerical analysis, the experimental study of a TFC slider while flying on a rotating disk at sub-nanometer spacing are performed. The analysis reveals the dominance of the air bearing force among other interfacial forces at sub-nanometer spacing.
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Acknowledgments
The work described in this paper was partially supported by NSFC (Grant No. 51375195) and by NSF-Hubei (Grant No. 2013CFA080).
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Sheng, G., Xu, J. Nanoscale dynamics of MEMS TFC active slider. Microsyst Technol 20, 1767–1770 (2014). https://doi.org/10.1007/s00542-014-2244-2
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DOI: https://doi.org/10.1007/s00542-014-2244-2