Abstract
This chapter begins with an overview of digital and analog semiconductor technology. Following this, tradeoffs between various device designs are discussed for Si FETs. Analog (RF) applications require a low access resistance and small mobility degradation from dielectrics—the former is discussed in detail in this chapter, while the latter is the topic of Chap. 9. Digital FETs need certain criteria to be met—foremost amongst them being bandgap opening and complementary operation. Both these topics are discussed in detail in this chapter. Geometrical scaling of graphene FETs—including width and length scaling—is discussed along with implications for edge-scattering and methods to reduce it. Circuit implementations of graphene FETs are looked into including mixers, frequency multipliers, and inverters. A few non-FET structures are also looked at such as the Klein tunneling transistor.
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K. S. Novoselov, et al., “Two-dimensional gas of massless Dirac fermions in graphene,” Nature vol. 438, pp. 197–200 (2005).
K. S. Novoselov, et al., “Electric field effect in atomically thin carbon films,” Science vol. 306, pp. 666–669 (2004).
C. Berger, et al., “Electronic confinement and coherence in patterned epitaxial graphene,” Science vol. 312, pp. 1191–1196 (2006).
F. N. Xia, D. B. Farmer, Y. M. Lin, and P. Avouris, “Graphene Field-Effect Transistors with High On/Off Current Ratio and Large Transport Band Gap at Room Temperature,” Nano Letters vol. 10, pp. 715–718 (2010).
T. Fang, A. Konar, H. L. Xing, and D. Jena, “Carrier statistics and quantum capacitance of graphene sheets and ribbons,” Applied Physics Letters vol. 91, 092109 (2007).
W. Zhu, V. Perebeinos, M. Freitag, and P. Avouris, “Carrier scattering, mobilities, and electrostatic potential in monolayer, bilayer, and trilayer graphene,” Physical Review B vol. 80, 235402 (2009).
G. Baccarani, M. R. Wordeman, and R. H. Dennard, “Generalized Scaling Theory and Its Application to a 1/4 Micrometer Mosfet Design,” IEEE Transactions on Electron Devices vol. 31, pp. 452–462 (1984).
S. I. Association, “International Technology Roadmap for Semiconductors,” (2007).
S. W. Keckler, et al., “A wire-delay scalable microprocessor architecture for high performance systems,” 2003 IEEE International Solid-State Circuits Conference vol. 46, pp. 168–169 (2003).
D. Geer, “Chip makers turn to multicore processors,” Computer vol. 38, pp. 11–13 (2005).
D. Hisamoto, et al., “FinFET - A self-aligned double-gate MOSFET scalable to 20 nm,” IEEE Transactions on Electron Devices vol. 47, pp. 2320–2325 (2000).
K. Boucart and A. M. Ionescu, “Double-gate tunnel FET with high-K gate dielectric,” IEEE Transactions on Electron Devices vol. 54, pp. 1725–1733 (2007).
K. Gopalakrishnan, P. B. Griffin, and J. D. Plummer, “Impact ionization MOS (I-MOS) - Part I: Device and circuit simulations,” IEEE Transactions on Electron Devices vol. 52, pp. 69–76 (2005).
S. Salahuddin and S. Datta, “Use of Negative Capacitance to Provide Voltage Amplification for Low Power Nanoscale Devices,” Nano Letters vol. 8, pp. 405–410 (2007).
R. Murali, et al., “Breakdown current density of graphene nanoribbons,” Applied Physics Letters vol. 94, (2009).
R. Murali, et al., “Resistivity of Graphene Nanoribbon Interconnects,” IEEE Electron Device Letters vol. 30, pp. 611–613 (2009).
M. Y. Han, B. Ozyilmaz, Y. B. Zhang, and P. Kim, “Energy band-gap engineering of graphene nanoribbons,” Physical Review Letters vol. 98, 206805 (2007).
S. Y. Zhou, et al., “Substrate-induced bandgap opening in epitaxial graphene,” Nature Materials vol. 6, pp. 770–775 (2007).
M. Sprinkle, et al., “Scalable templated growth of graphene nanoribbons on SiC,” Nature Nanotechnology vol. 5, pp. 727–731 (2010).
J. W. Bai, et al., “Graphene nanomesh,” Nature Nanotechnology vol. 5, pp. 190–194 (2010).
E. Rotenberg, et al., “Origin of the energy bandgap in epitaxial graphene,” Nature Materials vol. 7, pp. 258–259 (2008).
F. Schwierz, “Graphene transistors,” Nature Nanotechnology vol. 5, pp. 487–496 (2010).
J. S. Moon, et al., “Top-Gated Epitaxial Graphene FETs on Si-Face SiC Wafers With a Peak Transconductance of 600 mS/mm,” IEEE Electron Device Letters vol. 31, pp. 260–262 (2010).
Y.-M. Lin, et al., “100-GHz Transistors from Wafer-Scale Epitaxial Graphene,” Science vol. 327, 662 (2010).
K. A. Jenkins, et al., “Graphene RF Transistor Performance,” ECS Transactions vol. 28, pp. 3–13 (2010).
G. C. Liang, N. Neophytou, D. E. Nikonov, and M. S. Lundstrom, “Performance projections for ballistic graphene nanoribbon field-effect transistors,” IEEE Transactions on Electron Devices vol. 54, pp. 677–682 (2007).
A. C. Ford, et al., “Diameter-Dependent Electron Mobility of InAs Nanowires,” Nano Letters vol. 9, pp. 360–365 (2009).
D. A. Areshkin, D. Gunlycke, and C. T. White, “Ballistic transport in graphene nanostrips in the presence of disorder: Importance of edge effects,” Nano Letters vol. 7, pp. 204–210 (2007).
D. Gunlycke, D. A. Areshkin, and C. T. White, “Semiconducting graphene nanostrips with edge disorder,” Applied Physics Letters vol. 90, 142104 (2007).
T. Fang, A. Konar, H. Xing, and D. Jena, “Mobility in semiconducting graphene nanoribbons: Phonon, impurity, and edge roughness scattering,” Physical Review B vol. 78, 205403 (2008).
Y. X. Yang and R. Murali, “Impact of Size Effect on Graphene Nanoribbon Transport,” IEEE Electron Device Letters vol. 31, pp. 237–239 (2010).
K. I. Bolotin, et al., “Ultrahigh electron mobility in suspended graphene,” Solid State Communications vol. 146, pp. 351–355 (2008).
J. H. Chen, et al., “Intrinsic and extrinsic performance limits of graphene devices on SiO2,” Nature Nanotechnology vol. 3, pp. 206–209 (2008).
Y. W. Tan, et al., “Measurement of scattering rate and minimum conductivity in graphene,” Physical Review Letters vol. 99, 246803 (2007).
A. A. Balandin, et al., “Superior thermal conductivity of single-layer graphene,” Nano Letters vol. 8, pp. 902–907 (2008).
X. R. Wang, et al., “Room-temperature all-semiconducting sub-10-nm graphene nanoribbon field-effect transistors,” Physical Review Letters vol. 100, 206803 (2008).
D. V. Kosynkin, et al., “Longitudinal unzipping of carbon nanotubes to form graphene nanoribbons,” Nature vol. 458, pp. 872–876 (2009).
L. Jiao, et al., “Narrow graphene nanoribbons from carbon nanotubes,” Nature vol. 458, pp. 877–880 (2009).
J. Cai, et al., “Atomically precise bottom-up fabrication of graphene nanoribbons,” Nature vol. 466, pp. 470–473 (2010).
H. Xiang, et al., “”Narrow” Graphene Nanoribbons Made Easier by Partial Hydrogenation,” Nano Letters vol. 9, pp. 4025–4030 (2009).
D. C. Elias, et al., “Control of Graphene’s Properties by Reversible Hydrogenation: Evidence for Graphane,” Science vol. 323, pp. 610–613 (2009).
R. Balog, et al., “Bandgap opening in graphene induced by patterned hydrogen adsorption,” Nature Materials vol. 9, pp. 315–319 (2010).
J. R. Williams, T. Low, M. S. Lundstrom, and C. M. Marcus, “Gate-controlled guiding of electrons in graphene,” Nature Nanotechnology vol. 6, pp. 222–225 (2011).
X. Wang and H. Dai, “Etching and narrowing of graphene from the edges,” Nature Chemistry vol. 2, pp. 661–665 (2010).
L. C. Campos, et al., “Anisotropic Etching and Nanoribbon Formation in Single-Layer Graphene,” Nano Letters vol. 9, pp. 2600–2604 (2009).
S. S. Datta, D. R. Strachan, S. M. Khamis, and A. T. C. Johnson, “Crystallographic Etching of Few-Layer Graphene,” Nano Letters vol. 8, pp. 1912–1915 (2008).
Z. Chen and J. Appenzeller, “Mobility Extraction and Quantum Capacitance Impact in High Performance Graphene Field-effect Transistor Devices,” IEEE International Electron Devices Meeting pp. 509–512 (2008).
I. Meric, et al., “Channel Length Scaling in Graphene Field-Effect Transistors Studied with Pulsed Current–voltage Measurements,” Nano Letters vol. 11, pp. 1093–1097 (2011).
Y. Ouyang, H. Dai, and J. Guo, “Projected performance advantage of multilayer graphene nanoribbons as a transistor channel material,” Nano Research vol. 3, pp. 8–15 (2010).
Y. Sui and J. Appenzeller, “Screening and Interlayer Coupling in Multilayer Graphene Field-Effect Transistors,” Nano Letters vol. 9, pp. 2973–2977 (2009).
J. Hass, et al., “Why multilayer graphene on 4 H-SiC(000(1)over-bar) behaves like a single sheet of graphene,” Physical Review Letters vol. 100, 125504 (2008).
J. Martin, et al., “Observation of electron–hole puddles in graphene using a scanning single-electron transistor,” Nature Physics vol. 4, pp. 144–148 (2008).
S. M. Sze, Physics of Semiconductor Devices: Wiley-Interscience, 1981.
F. Schedin, et al., “Detection of individual gas molecules adsorbed on graphene,” Nature Materials vol. 6, pp. 652–655 (2007).
P. L. Levesque, et al., “Probing Charge Transfer at Surfaces Using Graphene Transistors,” Nano Letters vol. 11, pp. 132–137 (2010).
Y. Dan, et al., “Intrinsic Response of Graphene Vapor Sensors,” Nano Letters vol. 9, pp. 1472–1475 (2009).
M. Ishigami, et al., “Atomic structure of graphene on SiO2,” Nano Letters vol. 7, pp. 1643–1648 (2007).
M. Lafkioti, et al., “Graphene on a Hydrophobic Substrate: Doping Reduction and Hysteresis Suppression under Ambient Conditions,” Nano Letters vol. 10, pp. 1149–1153 (2010).
Z. Liu, A. A. Bol, and W. Haensch, “Large-Scale Graphene Transistors with Enhanced Performance and Reliability Based on Interface Engineering by Phenylsilane Self-Assembled Monolayers,” Nano Letters vol. 11, pp. 523–528 (2010).
C. R. Dean, et al., “Boron nitride substrates for high-quality graphene electronics,” Nature Nanotechnology vol. 5, pp. 722–726 (2010).
X. Hong, et al., “High-Mobility Few-Layer Graphene Field Effect Transistors Fabricated on Epitaxial Ferroelectric Gate Oxides,” Physical Review Letters vol. 102, 136808 (2009).
F. Chen, J. L. Xia, and N. J. Tao, “Ionic Screening of Charged-Impurity Scattering in Graphene,” Nano Letters vol. 9, pp. 1621–1625 (2009).
F. Chen, J. Xia, and N. Tao, “Ionic Screening of Charged-Impurity Scattering in Graphene,” Nano Letters vol. 9, pp. 1621–1625 (2009).
B. Guo, et al., “Controllable N-Doping of Graphene,” Nano Letters vol. 10, pp. 4975–4980 (2010).
D. B. Farmer, et al., “Chemical Doping and Electron–hole Conduction Asymmetry in Graphene Devices,” Nano Letters vol. 9, pp. 388–392 (2009).
A. Kasry, et al., “Chemical Doping of Large-Area Stacked Graphene Films for Use as Transparent, Conducting Electrodes,” ACS Nano vol. 4, pp. 3839–3844 (2010).
Y. Shi, et al., “Work Function Engineering of Graphene Electrode via Chemical Doping,” ACS Nano vol. 4, pp. 2689–2694 (2010).
F. Gunes, et al., “Layer-by-Layer Doping of Few-Layer Graphene Film,” ACS Nano vol. 4, pp. 4595–4600 (2010).
C. Coletti, et al., “Charge neutrality and band-gap tuning of epitaxial graphene on SiC by molecular doping,” Physical Review B vol. 81, 235401 (2010).
W. Chen, et al., “Surface Transfer p-Type Doping of Epitaxial Graphene,” Journal of the American Chemical Society vol. 129, pp. 10418–10422 (2007).
I. Gierz, et al., “Atomic Hole Doping of Graphene,” Nano Letters vol. 8, pp. 4603–4607 (2008).
X. R. Wang, et al., “N-Doping of Graphene Through Electrothermal Reactions with Ammonia,” Science vol. 324, pp. 768–771 (2009).
S. Ryu, et al., “Reversible Basal Plane Hydrogenation of Graphene,” Nano Letters vol. 8, pp. 4597–4602 (2008).
M. J. Loboda, C. M. Grove, and R. F. Schneider, “Properties of a-SiOx : H thin films deposited from hydrogen silsesquioxane resins,” Journal of the Electrochemical Society vol. 145, pp. 2861–2866 (1998).
K. Brenner and R. Murali, “Single step, complementary doping of graphene,” Applied Physics Letters vol. 96, 063104 (2010).
H. J. Lee, et al., “Structural comparison of hydrogen silsesquioxane based porous low-k thin films prepared with varying process conditions,” Chemistry of Materials vol. 14, pp. 1845–1852 (2002).
M. Cheli, P. Michetti, and G. Iannaccone, “Model and Performance Evaluation of Field-Effect Transistors Based on Epitaxial Graphene on SiC,” IEEE Transactions on Electron Devices vol. 57, pp. 1936–1941 (2010).
H. Wang, et al., “Compact Virtual-Source Current–voltage Model for Top- and Back-Gated Graphene Field-Effect Transistors,” IEEE Transactions on Electron Devices vol. 58, pp. 1523–1533 (2011).
Y. Ouyang, Y. Yoon, and J. Guo, “Scaling behaviors of graphene nanoribbon FETs: A three-dimensional quantum simulation study,” IEEE Transactions on Electron Devices vol. 54, pp. 2223–2231 (2007).
K. Nagashio and A. Toriumi, “DOS-limited contact resistance in graphene FETs,” arxiv 1104.1818 (2011).
B. Huard, N. Stander, J. A. Sulpizio, and D. Goldhaber-Gordon, “Evidence of the role of contacts on the observed electron–hole asymmetry in graphene,” Physical Review B vol. 78, 121402 (2008).
S. Russo, et al., “Contact resistance in graphene-based devices,” Physica E: Low-dimensional Systems and Nanostructures vol. 42, pp. 677–679 (2010).
A. Venugopal, L. Colombo, and E. M. Vogel, “Contact resistance in few and multilayer graphene devices,” Applied Physics Letters vol. 96, pp. 013512–3 (2010).
K. Nagashio, T. Nishimura, K. Kita, and A. Toriumi, “Contact resistivity and current flow path at metal/graphene contact,” Applied Physics Letters vol. 97, pp. - (2010).
P. Blake, et al., “Influence of metal contacts and charge inhomogeneity on transport properties of graphene near the neutrality point,” Solid State Communications vol. 149, pp. 1068–1071 (2009).
K. L. Grosse, et al., “Nanoscale Joule heating, Peltier cooling and current crowding at graphene-metal contacts,” Nature Nanotechnology vol. 6, pp. 287–290 (2011).
J. A. Robinson, et al., “Contacting graphene,” Applied Physics Letters vol. 98, pp. 053103–3 (2011).
F. Xia, et al., “The origins and limits of metal-graphene junction resistance,” Nature Nanotechnology vol. 6, pp. 179–184 (2011).
E. J. H. Lee, et al., “Contact and edge effects in graphene devices,” Nature Nanotechnology vol. 3, pp. 486–490 (2008).
F. N. Xia, et al., “Photocurrent Imaging and Efficient Photon Detection in a Graphene Transistor,” Nano Letters vol. 9, pp. 1039–1044 (2009).
H. Wang, D. Nezich, J. Kong, and T. Palacios, “Graphene Frequency Multipliers,” IEEE Electron Device Letters vol. 30, pp. 547–549 (2009).
F. Traversi, V. Russo, and R. Sordan, “Integrated complementary graphene inverter,” Applied Physics Letters vol. 94, 223312 (2009).
S. L. Li, et al., “Low Operating Bias and Matched Input–output Characteristics in Graphene Logic Inverters,” Nano Letters vol. 10, pp. 2357–2362 (2010).
S. L. Li, et al., “Enhanced Logic Performance with Semiconducting Bilayer Graphene Channels,” ACS Nano vol. 5, pp. 500–506 (2011).
H. Wang, et al., “Graphene-Based Ambipolar RF Mixers,” IEEE Electron Device Letters vol. 31, pp. 906–908 (2010).
Y. M. Lin, et al., “Wafer-Scale Graphene Integrated Circuit,” Science vol. 332, pp. 1294–1297 (2011).
M. I. Katsnelson, K. S. Novoselov, and A. K. Geim, “Chiral tunnelling and the Klein paradox in graphene,” Nature Physics vol. 2, pp. 620–625 (2006).
V. V. Cheianov, V. Fal’ko, and B. L. Altshuler, “The Focusing of Electron Flow and a Veselago Lens in Graphene p-n Junctions,” Science vol. 315, pp. 1252–1255 (2007).
S. Tanachutiwat, J. U. Lee, W. Wang, and C. Y. Sung, “Reconfigurable multi-function logic based on graphene P-N junctions,” presented at the Proceedings of the 47th Design Automation Conference, Anaheim, California, 2010.
A. C. Seabaugh and Q. Zhang, “Low-Voltage Tunnel Transistors for Beyond CMOS Logic,” Proceedings of the IEEE vol. 98, pp. 2095–2110 (2010).
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Murali, R. (2012). Graphene Transistors. In: Murali, R. (eds) Graphene Nanoelectronics. Springer, Boston, MA. https://doi.org/10.1007/978-1-4614-0548-1_3
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