Abstract
Vacuum microelectronics (VME) is a new field in micro- and nanoelectronics that has been developed during the recent few decades. VME is based on the employment of electrons in vacuum at the dimensions of active elements in tenths and hundredths of a micrometer. Practically, a field electron emitter (FEE) is used as an active element in VME systems. By employing microscopic anode-to-cathode gaps, one can build devices with a field emission (FE) cathode controlled by a voltage in tens of volts.
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© 2005 Kluwer Academic / Plenum Publishers, New York
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(2005). Advances in Applications. In: Brodie, I., Schwoebel, P. (eds) Field Emission in Vacuum Microelectronics. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/0-387-27419-7_8
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DOI: https://doi.org/10.1007/0-387-27419-7_8
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-306-47450-7
Online ISBN: 978-0-387-27419-5
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