Skip to main content

Novel Interconnection and Channel Technologies for Microfluidics

  • Conference paper

Abstract

The growth of microfluidic applications for medical diagnostics and biological and chemical assays has created a need for fundamental building blocks from which fluidic systems can be constructed. This work discusses two of these building blocks: 1) interconnects for interfacing monolithic microfluidic systems to standard capillary tubing, and 2) conformal coating procedures for microfluidic channels using plasma enhanced chemical vapor deposited (PECVD) silicon carbide (SiC).

This is a preview of subscription content, log in via an institution.

Buying options

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. P. Bergveld, The Challenge of Developing μTA8, Proc. of the Micro Total Analysis Systems Workshop, Twente, Netherlands, Nov. 21–22, 1994, Kluwer Academic Publishers, (1995) 1–4.

    Google Scholar 

  2. R. J. Reay, et al., Microfabricated Electrochemical Detector for Capillary Electrophoresis, Proc. of the Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 13–16, (1994) 61–64.

    Google Scholar 

  3. V. L. Spiering, et al., Novel Microstructures and Technologies Applied in Chemical Analysis Techniques, Proc. of Transducers’ 97, the 1997 Int. Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16–19, 1(1997) 511–514.

    Google Scholar 

  4. D. Jaeggi, et al., Novel Interconnection Technologies for Integrated Microfluidic Systems, Proc. of the Solid-State Sensor and Actuator Workshop 98, Hilton Head, SC, (1998) 112–115.

    Google Scholar 

  5. A.F. Flannery, et al., PECVD Silicon Carbide for Micromachined Transducers, Proc. of Transducers’ 97, the 1997 Int. Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16–19, 1 (1997) 217–220.

    Google Scholar 

  6. T.S.J. Lammerink, et al., Micromachined Hydraulic Astable Multivibrator, Proceedings of the 1995 IEEE Micro Electro Mechanical Systems Workshop (MEMS’ 95), Amsterdam, Netherlands, Jan. 29–Feb. 2, (1995) 13–18.

    Google Scholar 

  7. S. Hannoe, et al., Enhanced Chromatographic Performance of Silicon-Micromachined Capillary Column with Clean Structure and Interactive Plasma Organic Films, Proc. of Transducers’ 97, the 1997 Int. Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16–19, 1 (1997) 515–518.

    Google Scholar 

  8. J.L. Hunt-Holmes, et al., “Integrated Microchannels with Metallic and Polymeric Channel Sections,” Proc. of Transducers’ 97, the 1997 Int. Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16–19, 1 (1997) 519–522.

    Google Scholar 

  9. J.R. Webster, et al., Large-Volume Integrated Capillary Electrophoresis Stage Fabricated Using Micromachining of Plastics on Silicon Substrates, Proc. of Transducers’ 97, the 1997 Int. Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16–19, 1 (1997) 503–506.

    Google Scholar 

  10. R.W. Tjerkstra, et al., Etching Technology for Microchannels, Proceedings of the 1997 IEEE Micro Electro Mechanical Systems Workshop (MEMS’ 97), (1997) 147–151

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 1998 Springer Science+Business Media Dordrecht

About this paper

Cite this paper

Mourlas, N.J. et al. (1998). Novel Interconnection and Channel Technologies for Microfluidics. In: Harrison, D.J., van den Berg, A. (eds) Micro Total Analysis Systems ’98. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5286-0_6

Download citation

  • DOI: https://doi.org/10.1007/978-94-011-5286-0_6

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6225-1

  • Online ISBN: 978-94-011-5286-0

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics