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On Binary Topology Design of Electro-Thermally-Compliant MEMS

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Micromechanics and Microactuators

Part of the book series: Mechanisms and Machine Science ((Mechan. Machine Science,volume 2))

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Abstract

We demonstrate a method for topology design of Electro- Thermally- Compliant Micro- Electro- Mechanical Systems (MEMS). The method ensures well connected perfectly binary solutions for which only nominal post processing is needed. The Adaptive Material Mask Overlay (AMOM) topology design algorithm is stochastic and is based on the very principle used to fabricate micro- devices and IC circuits. The method employs negative circular masks that act as local material sinks. The center coordinates, radii and the number of masks are all systematically determined to obtain the final topologies for a given computational effort. Three examples, presented elsewhere, are re- solved using the proposed scheme and the solutions are compared with those obtained using the classical gradient based methods. The proposed method shows promise in yielding multiple and large deformation solutions.

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Authors and Affiliations

  1. Indian Institute of Technology, Kanpur, UP, 208016, India

    Pranay Sharma & Anupam Saxena

Authors
  1. Pranay Sharma
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  2. Anupam Saxena
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Corresponding author

Correspondence to Pranay Sharma .

Editor information

Editors and Affiliations

  1. , Mechanical Engineering, Indian Institute of Science, Bangalore, 560012, India

    Gondi Kondaiah Ananthasuresh

  2. , University Aachen, RWTH Aachen, Eilfschornsteinstrasse 18, Aachen, 52056, Germany

    Burkhard Corves

  3. , Mechanical Engineering, University of the Basque Country, Alameda de Urquijo, Bilbao, 48013, Spain

    Victor Petuya

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Sharma, P., Saxena, A. (2012). On Binary Topology Design of Electro-Thermally-Compliant MEMS. In: Ananthasuresh, G., Corves, B., Petuya, V. (eds) Micromechanics and Microactuators. Mechanisms and Machine Science, vol 2. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-2721-2_12

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  • DOI: https://doi.org/10.1007/978-94-007-2721-2_12

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-007-2720-5

  • Online ISBN: 978-94-007-2721-2

  • eBook Packages: EngineeringEngineering (R0)

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