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History of Early Research on MEMS in Russia (U.S.S.R.)

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Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

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Abstract

An overview of early MEMS research and developments made in Russia (U.S.S.R.) from 1971 to 1985, which are not widely published and described in the western technical literature, is presented in this paper. Moscow Physics Engineering Institute was the first Russian organization, where MEMS research was initiated. The number of world pioneering developments was made there. Many other institutions in the former Soviet Union participated in early MEMS works. Among them were “Giredmet”, “NiiTeplopribor”, “Electronpribor”, “Nii Physical Measurements”, Bauman Technical University, Novisibirsk University, MIET, Kaunas Polytechnical Institute, Lvov Polytechnical Institute, Leningrad State University and other organizations.

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References

  1. Simon Middelhoek, Celebration of the tenth transducers conference, Sensors and Actuators, 82 (2000) 2–23

    Article  Google Scholar 

  2. Stanford News Service, News Release February 28, 2006

    Google Scholar 

  3. Kensall D. Wise, James B. Angell, Arnold Starr, An Integrated-Circuit Approach to Extracellular Microelectrodes, Biomed. Engineering, IEEE Trans. on. 08/1970; BME-17(3)

    Google Scholar 

  4. Dr. Kensall D. Wise, William Gould Dow Distinguished University Prof. of Electrical Engineering & Computer Science, www.nae.edu/nae/naepub.nsf/Members

  5. USSR Pat. 458720. Diaphragms fabrication technique of miniature planar epitaxial pressure sensors (V.I.Vaganov,K.M.Ponomarev), B.I. 1974 #46

    Google Scholar 

  6. Vaganov V.I., Ponomarev K.M., Silicon strain gage component for IC pressure sensors, Physical Electronics, Kaunas, KPI, 1972, v.1, 125–130. (in Russian)

    Google Scholar 

  7. Vaganov V.I., Polivanov P.P., Ponomarev K.M., IC pressure sensor for biomedical applications, Tenzometriya-72, Digest of All-Union Conf. Methods and Means in Strain Gauge Measuremens, Sverdlovsk, 1972, M., IMASH AN USSR, 1972, (in Russian)

    Google Scholar 

  8. Vaganov V.I., Polivanov P.P., Ponomarev K.M., IC pressure sensor for biomedical applications, Izvestia Vuzov, ser. Radioelectronics, v.XVII, 1974, 107–109 (in Russian)

    Google Scholar 

  9. Development and Research of ICs based on new semiconductor devices, Annual Report on Government Project “Mayak”, v 2, State Reg. # 75026315, MPhEI, 1974 (in Russian)

    Google Scholar 

  10. V.Vaganov, Suggested Improvements on Accelerometer, Office memorandum to Professor J. Angel and Professor J. Meindl, Stanford University, April 30, 1975

    Google Scholar 

  11. V.I. Vaganov, N.I.Goncharova, IC cantilever beam sensor of mechanical parameters, Electronic Instrumentation Technique, Atomizdat, Moscow, 1978, #1, (in Russian)

    Google Scholar 

  12. James B. Angell, Stephen C. Terry, Phillip W. Barth, Silicon Micromechanical Devices, Scientific American, April, 1983, 44–55

    Google Scholar 

  13. Vaganov V., Micromachining is Trend for Sensors, Components and Systems in Instrumentation, Energoatomizdat, Moscow, 1983, pp. 3–9. (in Russian)

    Google Scholar 

  14. K. Yamada, K. Higuchi, H. Tanigawa, A novel silicon accelerometer with a surrounding mass structure, Sensors and Actuators, A21–A23, 1990 308–311

    Google Scholar 

  15. US Pat. 5,894300, Silicon bulk micromachined, symmetric, degenerate vibratory gyroscope, accelerometer and sensor and method of using the same, Tony K. Tang et al, 1999

    Google Scholar 

  16. US Pat. 6662659, Acceleration sensor, Masakatsu Saitoh, 2003

    Google Scholar 

  17. Development and Research of ICs based on new semiconductor devices, Annual Report on Government Project “Mayak, v 3, State Reg. # 75026316, MPhEI, 1975. (in Russian)

    Google Scholar 

  18. V.I.Vaganov, V.V.Beklemishev, A.V.Sumin, IC pressure sensors on planar piezotransistors, Tenzometriya-76, Digest of All-Union Conf. “Methods and Means in Strain Gauge Measurements and their Applications”, Kishinev, 1976 (in Russian)

    Google Scholar 

  19. V.I.Vaganov, P.P.Polivanov, IC piezotransistor pressure sensor, Electronnaya Technika, 1975. ser. 11, 4, 89–92. (in Russian)

    Google Scholar 

  20. USSR Pat. 491059. Microelectronic pressure sensor, (V.I.Vaganov), B.I. 41–1975.

    Google Scholar 

  21. E.I. Makarov, et al., IC piezosencitive circuits on MOS transistors, Tenzometriya-76, Digest of All-Union Conf. “Methods and Means in Strain Gauge Measurements and their Applications”, Kishinev, 1976 (in Russian)

    Google Scholar 

  22. Development and research of pressure sensors for intraheart catheterization, Final report, MPhEI, Moscow, 1973. (in Russian)

    Google Scholar 

  23. Research and Development of IC sensors for biomedical applications, Annual Report, State Reg. 77021585, MPhEI, Moscow, 1976. (in Russian)

    Google Scholar 

  24. V.I.Vaganov, V.V.Beklemishev, S.G.Geletsyan, N.I.Goncharova, A.B.Noskin, IC pressure sensor with ion implanted piezoresistors, Sensitivity Theory in Electronic and Electrical Systems, digest, All-Union Scien.Conf., M., MIEM, 1978, 27–28. (in Russian)

    Google Scholar 

  25. V.A.Kremnev, V.B.Parshin, A.V.Sumin et al., A transducer choice for an implantable autonomous artificial heart, Modern Problems of Transplantation and Artificial Organs, MZ USSR, 1979, 146–149. (in Russian)

    Google Scholar 

  26. V.I.Vaganov, V.V.Beklemishev, V.S.Baranov, Implantable contact sensor of arterial blood pressure, Metrology of measurements in medicine, Tallin, 1983, 137. (in Russian)

    Google Scholar 

  27. V.I.Vaganov, B.V.Tkachev, IC metallic microelectrodes of comb-like structure, 7-th All-Union scien.-techn.conf. on microelectronics, digest, Lvov, 1975. (in Russian)

    Google Scholar 

  28. I.B.Baltavichus, et al., Sensors for blood pressure measurements, 7-th All-Union scien.-techn.conf. on microelectronics, digest, Lvov, 1975. (in Russian)

    Google Scholar 

  29. Aleksa A.G., Zimin V.N., et al., Electronnaya Technika Electronic technology, ser. 11, vol. 2, 43–46, 1976. (in Russian)

    Google Scholar 

  30. A.A. Tzivin, U.M. Bazgin, T.A. Motorigina, Biomedical transdusers on monosrystalline structures, 7-th All-Union scien.-techn.conf. on microelectronics, digest, Lvov, 1975

    Google Scholar 

  31. V.I.Vaganov, V.M.Khudikina, Anisotropy of piezoresistive coefficients for IC sensors of mechanical parameters, Electronic Measurement Technique M., Atomizdat, 1978

    Google Scholar 

  32. N.I.Goncharova, A.B.Noskin, Sensitivity topograms of piezoresistors of IC pressure sensors, Electronic Instrumentation Technique, M., Energoizdat, 1981, 3, 18–23

    Google Scholar 

  33. V.V.Beklemishev, V.I.Vaganov, Non linearity analysis of IC pressure sensor with a square diaphragm, “Transducers based on microelectronic technology”, Moscow, 1983

    Google Scholar 

  34. V.I.Vaganov, N.I.Goncharova, I.I.Sluchak, IC piezoresistive sensor with flexible elements of complex forms, Electronic Measuring Devices and Systems, M., Energoatomizdat, 1984, 105–108

    Google Scholar 

  35. V.I.Vaganov, Basic trends and development problems in sensoelectronics and system approach to sensor and actuator design, Proc.Conf. “Transducers based on microelectronic technology”, M., MDNTP, 1986, 3–16. (in Russian)

    Google Scholar 

  36. V. Vaganov, A System Approach to Photonic MEMS Commercialization, Fiberoptic product news, Nov, 2002

    Google Scholar 

  37. V.I.Vaganov, P.P.Polivanov, Local anisotropic etching of silicon for fabricating IC pressure sensors, Electronnaya Technika, 1975, ser, Complex miniaturization of radioelectronic devices and systems, 4, 93–98

    Google Scholar 

  38. V.I.Vaganov, N.I.Goncharova, T.S.Plokhova, Study of dependance etching rate for anisotropic etching of silicon in KOH water solutions versus etching regime. Electronnaya Technika, 1980, ser, Microelectronics, No2, 29–36

    Google Scholar 

  39. V.I.Vaganov, T.S.Plokhova, Study of shape dynamics for local anisotropic etching of silicon. Electronnaya Technika, 1979, ser. Microelectronics, 5, 55–62

    Google Scholar 

  40. Belov N.S. Silicon micro-mechanical structures, Ph.D. dissert., Moscow, MPhEI, 1989.

    Google Scholar 

  41. USSR Pat. 795326. Protective mask, (V.I.Vaganov, T.S.Plohova), 1980

    Google Scholar 

  42. USSR Pat. 858491. Protective mask for batch chemical separating of monocrystalline (100) wafers into chips, (V.I.Vaganov, T.S.Plohova), 1980

    Google Scholar 

  43. USSR Pat. 1220516. Protective mask, (N.S.Belov, V.I.Vaganov), 1985

    Google Scholar 

  44. A.I. Buturlin, T.I. Vishneva, U.D. Chistiakov, Ultrasound activated process of anisot ropic etching of silicon in acid solutions, Digest of projects, Moscow, MIET, 1980

    Google Scholar 

  45. V.I.Vaganov, Microelectronic sensors, text book, MPhEI, Moscow, 1980. (in Russian)

    Google Scholar 

  46. V.I.Vaganov, IC sensors, text book, MPhEI, Moscow, 1981, 77. (in Russian)

    Google Scholar 

  47. V.I.Vaganov, IC piezoresistive sensors, Energoatomizdat, Moscow, 1983. (in Russian)

    Google Scholar 

  48. Hall microsensors on InSb and GaAs epilayers, Catalog, Institute of Solid State Physics and Semiconductors, Belorussian Academy of Sciences, 1983

    Google Scholar 

  49. S.V. Gumenuk, B.I.Podlepetsky, et al.,Integrated magnetic sensor with frequency output, Sensors and Actuators A, v 28, No3, 1991

    Google Scholar 

  50. V.M. Artyomov, E.A. Kudryashov, et al., Silicon capacitive pressure transducer with increased modulation depth, Sensors and Actuators A, v 28, No3, 1991

    Google Scholar 

  51. G.G. Iordan, Kenigsberg V.L., et al., Semiconductor piezoresistive transducers, Digest of All-Union Conf. “Methods and Means in Strain Gauge Measurements and their Applications”, Kishinev, 1976 (in Russian)

    Google Scholar 

  52. Kenigsberg V.L., Stuchebnikov V.M., et al., Izmeritelnaja Technika, 10, 1978

    Google Scholar 

  53. Sensors and Actuators, A special issue devoted to Current Research on Physical Sensors un the U.S.S.R., Guest Editor: V.I.Vaganov, volume A28 No.3, August 1991

    Google Scholar 

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Author information

Authors and Affiliations

  1. Siantis Inc, Los Gatos, California, 95032, USA

    Vladimir Vaganov

Authors
  1. Vladimir Vaganov
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Correspondence to Vladimir Vaganov .

Editor information

Editors and Affiliations

  1. Qualcomm MEMS Technologies, Inc., Junction Avenue 2581, San Jose, 95134, USA

    Evgeni Gusev

  2. Inst. Advanced Materials Devices &, Nanotechnology, Rutgers University, Taylor Road 610, Piscataway, 08854, USA

    Eric Garfunkel

  3. A.E Ioffe Physico-Technical Institute, Russian Academy of Sciences, Polytekhnicheskaya ul. 26, St. Petersburg, 194021, Russian Federation

    Arthur Dideikin

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Vaganov, V. (2010). History of Early Research on MEMS in Russia (U.S.S.R.). In: Gusev, E., Garfunkel, E., Dideikin, A. (eds) Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3807-4_1

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