Abstract
With the fast development of semiconductor, pharmaceutical, food, and other industries, attention has been shifted from the particulate pollution in the past to the chemical pollution recently. For the control object related to the air cleanliness, it has been shifted from single object, i.e., particles in the past, to two objects which also include airborne molecular contaminant (AMC). In fact standard related to air cleanliness and classification of air cleanliness has contained both the particle concentration level (customarily it is still called air cleanliness level) and the AMC concentration level. However, the air cleanliness specifically related to particle concentration level is still the core index to evaluate the air cleanliness of the environment.
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References
Xu ZL (1994) Design of cleanroom. Seismological Press, Beijing (In Chinese)
Kawamata T (1993) Specifications of air cleanliness level in US, Japan and Europe. J Jpn Air Clean Assoc 31(4):74–85 (In Japanese)
GB50073-2001 (2001) Code for design of clean room. China Planning Press, Beijing (In Chinese)
Wang YB, Wang WG (1998) Prediction of particle concentration in ambient air for VLSI production. Contam Control Air Cond Technol 3:10–13 (In Chinese)
Tang HP, Fan CY (1987) Discussion of particle size distribution characteristics inside cleanroom. Department of Science and Technology Information at Tongji University (In Chinese)
Lv JM (1984) Measurement of ultrafine particles in cleanroom. J Jpn Air Clean Assoc 21(4):36–46 (In Japanese)
Hayakawa K (1980) Air conditioning in comprehensive hospital. Jpn Air Cond Heat Refrig News 20(8):51–59 (In Japanese)
Xu ZL, Qian ZM, Shen JM (1983) Lower limit of air velocity in parallel flow cleanroom. Research report of Building Science, p 4 (In Chinese)
Austin PR, Timmerman SW (1965) Design and operation of clean rooms. Business News Publishing Company, Detroit, USA
Kawamura A (1981) Design planning and measurement of high performance cleanroom. Jpn Air Cond Heat Refrig News 21(5):69–75 (In Japanese)
Morrison PW (1973) Environmental control in electronic manufacturing. Van Nostrand Reinhold Company, New York, USA, pp 278–292
Ohara S (1982) Prospect of super LSI high performance computer. Jpn Refrig Air Cond Technol 33(383):2–24 (In Japanese)
Wang WG, Wang YB (1996) Prediction of air cleanliness level. Contam Control Air Cond Technol 1:2–4 (In Chinese)
Kitajima Y, Sasaki K (1997) Influence of particle diameter on the yield of semiconductor. J Jpn Air Clean Assoc 35(2):20–29 (In Japanese)
Xu ZL (1981) Relationship between the yield and the air cleanliness level of the environment. Mech Eng 3(1):45–49 (In Chinese)
Kitajima H, Shiramizu Y (1997) Requirements for contamination control in gigabit era. IEEE Trans Semicond Manuf 10(2):267
Fan CY, Xu WH, Lin ZP (2001) Certain progress of air cleaning technology in microelectronics industry. J HV&AC 31(5):30–38 (In Chinese)
Wang WG (2000) Chemical pollution and its control for the environment of VLSI production. Contam Control Air Cond Technol 1:20–23 (In Chinese)
Fujii S (2000) Cleanrooms and associated controlled environments – classification method and guideline of measurement for airborne molecular contamination. J Jpn Air Clean Assoc 37(6):31–34 (In Japanese)
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Xu, Z. (2014). Classification of Air Cleanliness. In: Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-39374-7_7
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DOI: https://doi.org/10.1007/978-3-642-39374-7_7
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